Properties of ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering in terms of O2/Ar Mixture Flow Ratio (O2/Ar 혼합 유량비를 변수로 갖는 라디오파 마그네트론 스퍼터링으로 성장된 ZnO 박막의 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.20 no.11
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- pp.932-938
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- 2007