• 제목/요약/키워드: Optical and structural properties

검색결과 931건 처리시간 0.022초

RF 마그네트론 스퍼터링으로 증착한 비정질 InGaZnO 박막의 구조적, 광학적, 전기적 특성에 미치는 RF 파워의 영향 (Effect of RF Power on the Structural, Optical and Electrical Properties of Amorphous InGaZnO Thin Films Prepared by RF Magnetron Sputtering)

  • 신지훈;조영제;최덕균
    • 대한금속재료학회지
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    • 제47권1호
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    • pp.38-43
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    • 2009
  • To investigate the effect of RF power on the structural, optical and electrical properties of amorphous InGaZnO (a-IGZO), its thin films and TFTs were prepared by RF magnetron sputtering method with different RF power conditions of 40, 80 and 120 W at room temperature. In this study, as RF power during the deposition process increases, the RMS roughness of a-IGZO films increased from 0.26 nm to 1.09 nm, while the optical band-gap decreased from 3.28 eV to 3.04 eV. In the case of the electrical characteristics of a-IGZO TFTs, the saturation mobility increased from $7.3cm^2/Vs$ to $17.0cm^2/Vs$, but the threshold voltage decreased from 5.9 V to 3.9 V with increasing RF power. It is regarded that the increment of RF power increases the carrier concentration of the a-IGZO semiconductor layer due to the higher generation of oxygen vacancies.

Ga doped ZnO 박막의 열처리 조건에 따른 구조 및 전기적 특성에 관한 연구 (Effect of Annealing on the Structural, Electrical and Optical Characteristics of Ga-doped ZnO(GZO)films)

  • 오수영;김응권;이태용;강현일;김봉석;송준태
    • 한국전기전자재료학회논문지
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    • 제20권9호
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    • pp.776-779
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    • 2007
  • In this study we present the effect of annealing temperatures on the structural, electrical and optical characteristics of Ga-doped ZnO (GZO) films. GZO target is deposited on coming 7059 glass substrates by DC sputtering. and then GZO films are annealed at temperatures of 400, 500, $600^{\circ}C$ in air ambient for 20 min. in this case of as-grown film, it shows the resistivity of $6{\times}10^{-1}{\Omega}{\cdot}cm$ and transmittance under 85%, whereas the electrical and optical properties of film annealed at $500^{\circ}C$ are enhanced up to $1.9{\times}10^{-3}{\Omega}{\cdot}cm$ and 90%, respectively.

비정질-결정질 가역적 상변환 소자용 Ge8Sb2Te11 박막의 W 도핑에 따른 상변환 특성 평가 (Evaluation on the Phase-Change Properties in W-doped Ge8Sb2Te11 Thin Films for Amorphous-to-Crystalline Reversible Phase-Change Device)

  • 박철진;여종빈;공헌;이현용
    • 한국전기전자재료학회논문지
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    • 제30권3호
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    • pp.133-138
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    • 2017
  • We evaluated the structural, electrical and optical properties of tungsten (W)-doped $Ge_8Sb_2Te_{11}$ thin films. In a previous work, GeSbTe alloys were doped with different materials in an attempt to improve thermal stability. 200 mm thick $Ge_8Sb_2Te_{11}$ and W-doped $Ge_8Sb_2Te_{11}$ films were deposited on p-type Si (100) and glass substrates using a magnetron co-sputtering system at room temperature. The fabricated films were annealed in a furnace in the $0{\sim}400^{\circ}C$ temperature range. The structural properties were analyzed using X-ray diffraction (X'pert PRO, Phillips). The results showed increased crystallization temperature ($T_c$) leading to thermal stability in the amorphous state. The optical properties were analyzed using an UV-Vis-IR spectrophotometer (Shimadzu, U-3501, range : 300~3,000 nm). The results showed an increase in the crystalline material optical energy band gap ($E_{op}$) and an increase in the $E_{op}$ difference (${\Delta}E_{op}$). This is a good effect to reduce memory device noise. The electrical properties were analyzed using a 4-point probe (CNT-series). This showed increased sheet resistance ($R_s$), which reduces programming current in the memory device.

Effect of VO(II) Doping on Structural and Optical Properties of Diaquamalonato(1,10-phenanthroline)zinc(II)

  • Hema, Ramesh;Parthipan, Krishnan;Ramachitra, Somasundaram;Balaji, Subramanian
    • Bulletin of the Korean Chemical Society
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    • 제34권12호
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    • pp.3547-3552
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    • 2013
  • Single crystal EPR and optical studies of a mixed ligand zinc(II) complex doped with VO(II) ion is carried out to establish the structural properties. The angular variation of vanadyl hyperfine lines indicates a single site, with spin Hamiltonian parameters as: $g_{xx}=1.985$, $g_{yy}=1.979$, $g_{zz}=1.943$; $A_{xx}=8.71$, $A_{yy}=6.41$ and $A_{zz}=17.80$ mT. By comparing the direction cosines of principal g and A values with the direction cosines of metalligand bonds, it has been confirmed that the vanadyl ion has entered the lattice interstitially. The exact interstitial position of VO(II) in host lattice has been calculated using the fractional coordinates of atoms in the host lattice out of many assumptions. The EPR and optical data have been confirmed to obtain various bonding parameters, from which the nature of the bonding in the complex is discussed. FT-IR confirms the formation of structure of host lattice.

수열합성에 의한 c축 배향 ZnO 나노로드 배열의 성장과 구조, 광학적 특성 (Growth, Structural and Optical Properties of c-axis Oriented ZnO Nanorods Array by Hydrothermal Method)

  • 김경범;김창일;정영훈;이영진;백종후
    • 한국전기전자재료학회논문지
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    • 제23권3호
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    • pp.222-227
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    • 2010
  • ZnO nanorods array have been grown on the seed crystal coated Si(100) substrate by hydrothermal method. The growth, structural and optical properties of ZnO nanorods array were investigated with a variation of precursor concentration from 0.01 M to 0.04 M. The array density of grown ZnO nanorods per same area was increased with increasing the concentration of precursor solution. Vertically aligned ZnO nanorods with hexagonal wurtzite structure have highly preferred c-axis orientation along (002) lattice plane. Especially, ZnO nanorods array developed from 0.04 M precursor solution showed a diameter of about 85 nm and length of 1.2 {\mu}m$ without any crystallographic defects. The photoluminescence spectra of ZnO nanorods from heavier precursor concentration exhibited stronger UV emission around 380 nm corresponding with near-band-edge emission.

Structural, Optical and Photoconductive Properties of Chemically Deposited Nanocrystalline CdS Thin Films

  • Park, Wug-Dong
    • Transactions on Electrical and Electronic Materials
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    • 제12권4호
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    • pp.164-168
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    • 2011
  • Nanocrystalline cadmium sulphide (CdS) thin films were prepared using chemical bath deposition (CBD), and the structural, optical and photoconductive properties were investigated. The crystal structure of CdS thin film was studied by X-ray diffraction. The crystallite size, dislocation density and lattice constant of CBD CdS thin films were investigated. The dislocation density of CdS thin films initially decreases with increasing film thickness, and it is nearly constant over the thickness of 2,500 ${\AA}$. The dislocation density decreases with increasing the crystallite size. The Urbach energies of CdS thin films are obtained by fitting the optical absorption coefficient. The optical band gap of CdS thin films increases and finally saturates with increasing the lattice constant. The Urbach energy and optical band gap of the 2,900 A-thick CdS thin film prepared for 60 minutes are 0.24 eV and 2.83 eV, respectively. The activation energies of the 2,900 ${\AA}$-thick CdS thin film at low and high temperature regions were 14 meV and 31 meV, respectively. It is considered that these activation energies correspond to donor levels associated with shallow traps or surface states of CdS thin film. Also, the value of ${\gamma}$ was obtained from the light transfer characteristic of CdS thin film. The value of ${\gamma}$ for the 2,900 A-thick CdS thin film was 1 at 10 V, and it saturates with increasing the applied voltage.

갈륨 도핑된 ZnO 나노와이어의 합성과 구조적 광학적 특성 분석 (Structural and optical properties of Ga-doped ZnO nanowires synthesized by pulsed laser deposition in furnace)

  • 김창은;안병두;전경아;손효정;김건희;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.46-47
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    • 2006
  • Ga-doped ZnO nanowires have been synthesized by pulsed laser deposition (PLD) in furnace on gold coated (0001) sapphire substrates. The effect of repetition rate on structural and optical properties of Ga-doped ZnO nanowires are investigated. By controlling repetition rate, the diameter of nanowires is varied between about 60 and 100 nm, and the length of nanowires is varied between about 2 and 4 um. The X-ray diffraction (XRD) reveals the structural defects induced by the Ga doping. The room temperature photoluminescence (PL) spectra of Ga-doped ZnO nanowires show strong UV emission between 382.394 and 385.279 nm with negligible visible emission.

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