• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.1-8
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• 1993

A design of four-mirror optical system with reduction magnification 5X for deep UV ($\lambda$=248 nm of KrF excimer laser) submicron lithography is presented. Initially by using the paraxial quantities, the domain of solution for $t=d_1+d_2+d_3$<0 (d;: distance between the mirror $c_i$ and $c_{i+1}$ is found for the system which is free from the four off-axial Seidel first order aberrations that are coma, astigmatism, field curvature, and distortion. The solution with $d_5$=2.95 (normalized with respect to $c_i$= -1) is choosen and the aspherization is carried out to the spherical mirror surfaces ($c_3$ and $c_4$ in order to reduce the axial and residual off-axial higher order aberrations. The numerical aperture of the final system is as large as 0.4, which gives Rayleigh resolution of 0.38 $\mu\textrm{m}$.

• Korean Journal of Optics and Photonics
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• v.3 no.3
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• pp.143-147
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• 1992

1)iscussed in this paper are the effects of phase modulation on the line spread functions (LSF) and MTFs of ;I binocular objective system. The binocular objective lens is made in Korea. It has rotationally symmetric aberrations. The LSFs and MTFs are measured experimentally. The phase modulation is carried out by applying phase retardation $\pi$ on the aperture. The area where the phase is not retarded presents a double annular type. The OTF curves of phase modulated aperture are compared with that of unmodulated aperture. The comparison shows that there is the aberration compensation effect in aberration loaded system. Therefore the performance of many optical system can be improved without any loss of light energy by properly modulating the phase on the aperture.

• Journal of the Optical Society of Korea
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• v.16 no.3
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• pp.228-235
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• 2012

It is very important to analyze effectively the tolerance of an optical system with high resolution as the projection lens of photolithography or as the objective lens of a microscope. We would like to find an effective assembly structure and compensators to correct aberrations through global wavefront sensitivity analysis using Zernike polynomial expansion from the field and pupil coordinates rather than from only pupil coordinates. In this paper, we introduce global wavefront coefficients by small perturbations of the optical system, and analyze the optical performance with these coefficients. From this analysis, it is possible to see how we can enlarge the tolerance through the proper assembly structure and compensators.

• Current Optics and Photonics
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• v.7 no.6
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• pp.692-700
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• 2023

We present a method for improving the accuracy of the modal wavefront reconstruction in the radial shearing interferometers (RSIs). Our approach involves expanding the reduced radial terms of Zernike polynomials to high-order, which enables more precise reconstruction of the wavefront aberrations with high-spatial frequency. We expanded the reduced polynomials up to infinite order with symbolic variables of the radius, shearing amount, and transformation matrix elements. For the simulation of the modal wavefront reconstruction, we generated a target wavefront subsequently, magnified and measured wavefronts were generated. To validate the effectiveness of the high-order Zernike polynomials, we applied both low- and high-order polynomials to the wavefront reconstruction process. Consequently, the peak-to-valley (PV) and RMS errors notably decreased with values of 0.011λ and 0.001λ, respectively, as the order of the radial Zernike polynomial increased.

• Journal of the Optical Society of Korea
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• v.19 no.2
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• pp.136-143
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• 2015

Image deblurring by a deconvolution method requires accurate knowledge of the blur kernel. Existing point spread function (PSF) models in the literature corresponding to lens aberrations and defocus are either parameterized and spatially invariant or spatially varying but discretely defined. In this paper, a parameterized model is developed and presented for a PSF which is spatially varying due to lens aberrations and defocus in an imaging system. The model is established from the Seidel third-order aberration coefficient and the Hu moment. A skew normal Gauss model is selected for parameterized PSF geometry structure. The accuracy of the model is demonstrated with simulations and measurements for a defocused infrared camera and a single spherical lens digital camera. Compared with optical software Code V, the visual results of two optical systems validate our analysis and proposed method in size, shape and direction. Quantitative evaluation results reveal the excellent accuracy of the blur kernel model.

• Korean Journal of Optics and Photonics
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• v.9 no.6
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• pp.396-402
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• 1998

The measurement of OTF(optical transfer function) is used for evalution of imaging performance of optical system as a standard method. In the mass-production, the contrast measurement of projected patterns is also popular because of its simplicity. In this study, a computer program which evaluates the CTF(contrast transfer function) of optical system for periodic line-space patterns is developed by using the diffraction imaging theory. The MTF(modulation transfer function) and CTF of an aberrated system are evaluated and analyzed for the third order aberrations expressed by the C-coefficients and the Zemike polynomials.

• Journal of the Optical Society of Korea
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• v.15 no.1
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• pp.22-29
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• 2011

We analyze aberrations in an optical laser printer system in order to know how to determine an allowable non-uniformity of the movement of a light spot, how to determine allowed variation of spot sizes, and how to minimize the influence of these deviations on technological errors. In this paper, the correction and the tolerance of distortion are analyzed by using the concept of zonal and global distortions. The tolerance of field curvature is also obtained from Gaussian beam properties. In order to reduce the change of the entrance pupil position and to make a more compact laser printer system the minimum size of the rotator is exactly derived from the geometry with the introduction of the shift angle of the input beam.

• Current Optics and Photonics
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• v.7 no.2
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• pp.213-221
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• 2023

The optical window, as a part of the collimator system, is the connector between the outside light source and the optical system inside a vacuum tank. The temperature and pressure difference between the two sides of the optical window cause not only thermoelastic deformation, but also refractive-index irregularities. To suppress the influence of these two changes on the performance of the collimator system, thermo-optical analysis is employed. Coefficients that characterize the deformations and refractive-index distributions are derived through finite-element analysis, and then imported into the collimator system using a user-defined surface in ZEMAX. The temperature and pressure difference imposed on the window seriously degrade the system performance of the collimator. A decentered and tilted lens group is designed to correct both field aberrations and the thermal effects of the window. Through lens-interval adjustment of the lens group, the diffraction-limited performance of the collimator can be maintained with a vacuum level of 10^-5 Pa and inside temperature ranging from -100 ℃ to 20 ℃.

• Transactions of the Society of Information Storage Systems
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• v.3 no.3
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• pp.135-138
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• 2007

Using a Shack-Hartmann sensor and sub-wavelength sized pinhole point source, we develope an optical testing system that measures the wavefront error of high numerical aperture and small sized optical components. The subwavelength sized pinhole generates perfect spherical waves with large diffraction angle and this makes possible to test high numerical aperture optics. The Shack-Hartmann sensor reconstructs the wavefront and calculates the aberrations. We make a home-made reference plane wave source which generates nearly perfect plane waves and the calibration with this plane source gives the overall uncertainty of the optical testing system 0.010 $\lambda$ rms.

• Journal of the Optical Society of Korea
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• v.14 no.4
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• pp.424-430
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• 2010

In coherent anti-Stokes Raman scattering (CARS) microscopy reported until now, conventional microscope objectives are used, so that they are limited for introduction into a living body. Gradient-index (GRIN) rod lenses might be a solution for miniaturized microscope objectives for in-vivo CARS microscopy. However, due to the inherent large amount of chromatic aberration, GRIN rod lenses cannot be utilized for this purpose. CARS imaging catheter, composed of miniaturized microscope objective and fiber bundle, can be introduced into a living body for minimally invasive diagnosis. In order to design the catheter, we have to first investigate design requirements. And then, the optical design is processed with design strategies and intensive computing power to achieve the design requirements. We report the miniaturized objective lens system with diffraction-limited performance and completely corrected chromatic aberrations for an in-vivo CARS imaging catheter.