• Title/Summary/Keyword: Optical Probe

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Optical and Mechanical Characteristics of NF System and NF Gap Control (근접장 광학계의 광학적 및 기계적 특성 분석과 근접장 간격제어)

  • Oh, Hyeong-Ryeol;Lee, Jun-Hee;Gweon, Dae-Gab;Kim, Soo-Kyung
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2000.06a
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    • pp.1528-1532
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    • 2000
  • The conventional optics and near field optics are compared numerically in the view points of the spot size and propagation characteristics. The decaying characteristics of near field light require the optics to access the object within several tens of nanometers. Therefore the gap control is one of the main issues in the near field optics area. In this paper the gap control is done by using the shear force of the NF(Near Field) probe and the characteristics are examined. The probe is modeled as a 2'nd order mass-spring-damper system driven by a harmonic force. The primary cause of the decrease in vibration amplitude is due to the damping force - shear force - between the surface and the probe. Using the model, damping constant and resonance frequency of the probe is calculated as a function of probe-sample distance. Detecting the amplitude and phase shift of the NF probe attached to the high Q-factor piezoelectric tuning fork, we can control the position of the NF probe about 0 to 50nm above the sample. The feedback signal to regulate the probe-sample distance can be used independently for surface topography imaging. 3-D view of the shear force image of a testing sample with the period of $1{\mu}m$ will be shown.

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Optical Scattering as a Probe of Local Field Effect in Micron-sized Cds Spheres

  • 김성규;Alan L. Huston;Anthony J. Campillo
    • Bulletin of the Korean Chemical Society
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    • v.16 no.2
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    • pp.96-101
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    • 1995
  • The optical properties of individual 3-to 14-micron diameter CdS crystalline spheres embedded in poly(methyl methacrylate) were studied using elastic scattering. The presence of well defined sharp peaks in the 550 to 600 nm elastic scattering spectra confirmed that each microcrystal acts as an optical cavity with cavity quality factors exceeding 104. Such natural resonator microcrystals should lead to greatly enhanced local field effects near the surface of CdS, quantum electrodynamic modification of optical transition rates of nearby species and altered photochemistry. Absorptive heating following high intensity laser irradiation was found to induce a transient washout of the high Q modes.

Prediction of the Glucose Concentration Based on Its Optical Absorbance at Multiple Discrete Wavelengths (복수 개의 광파장에 대한 상대적 흡광 특성을 이용한 글루코스 농도 측정)

  • Kim, Ki-Do;Son, Geun-Sik;Lim, Seong-Soo;Lee, Sang-Shin
    • Korean Journal of Optics and Photonics
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    • v.19 no.6
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    • pp.416-421
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    • 2008
  • A scheme for predicting the concentration of a glucose solution based on its relative optical absorbance at multiple probe wavelengths was proposed and verified. The relative absorbance at each of the probe wavelength was obtained with respect to the absorbance at a reference wavelength. The single reference wavelength (1310 nm) and a group of four different probe wavelengths (1064, 1550, 1685, 1798 nm) were selected to exhibit the glucose absorbance with opposite signs, thereby enhancing the accuracy of the prediction. The final glucose concentration was estimated by taking the average of the predicted values provided by the four probe wavelengths. The absorbance of the glucose solution for the path length of 5 mm was $-1.42{\times}10^{-6}\;AU$/(mg/dL) at the reference wavelength of 1310 nm and peaked at $+8.12{\times}10^{-6}\;AU$/(mg/dL) at 1685 nm. The concentration of the glucose solution was decently predicted by means of the proposed scheme with the standard error of prediction of ${\sim}28\;mg/dL$. In addition, the influence of the ambient temperature and the fat thickness upon the prediction of the glucose concentration was examined. The absorption change with the temperature was $-9.1{\times}10^{-5}\;AU/^{\circ}C$ in the temperature range of $26{\sim}40^{\circ}C$ at the reference wavelength, and $-2.08{\times}10^{-2}\;AU/^{\circ}C$ at 1550 nm. And the absorption change with respect to the fat thickness was +1.093 AU/mm at the probe wavelength of 1685 nm.

Fault Detection with OES and Impedance at Capacitive Coupled Plasmas

  • Choe, Sang-Hyeok;Jang, Hae-Gyu;Chae, Hui-Yeop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.499-499
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    • 2012
  • This study was evaluated on etcher of capacitive coupled plasmas with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and C4F8 plasma with variable change such as pressure and addition of gas (Atmospheric Leak: N2 and O2), RF, pressure, that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by Vi probe was analyzed by statistical method to determine healthy of process. The main goal of this study is to understand unwanted tool performance to eventually improve productive capability. It is important for process engineers to actively adjust tool parameter before any serious problem occurs.

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