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Technical Trends of Nanometrology  

Eom, Tae-Bong (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences)
Park, Byung-Chon (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences)
Kim, Jae-Wan (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences)
Eom, Cheon-Il (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences)
Publication Information
Journal of the Korean Society for Precision Engineering / v.19, no.1, 2002 , pp. 25-32 More about this Journal
Keywords
Nanometrology; Laser interferometer; Atomic force microscope; Probe; X-ray interferometer; Fabry-Perot interferometer;
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Times Cited By KSCI : 2  (Citation Analysis)
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