한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제19권1호
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  • Pages.25-32
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  • 2002
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

나노메트롤로지의 기술동향

Technical Trends of Nanometrology

  • 엄태봉 (한국표준과학연구원 광기술표준부) ;
  • 박병천 (한국표준과학연구원 광기술표준부) ;
  • 김재완 (한국표준과학연구원 광기술표준부) ;
  • 엄천일 (한국표준과학연구원 광기술표준부)
  • Eom, Tae-Bong (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences) ;
  • Park, Byung-Chon (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences) ;
  • Kim, Jae-Wan (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences) ;
  • Eom, Cheon-Il (Div. of Optical Metrology, Korea Research Institute of Standards and Sciences)
  • 발행 : 2002.01.01
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초록

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참고문헌

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