• Proceedings of the Optical Society of Korea Conference
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• 1991.06a
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• pp.81-87
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• 1991

A design of a four-mirror optical system for submicron lithography using KrF excimer laser beam(λ=248nm) is presented. By using the third order aberration theory, analytic solutions for a telecentric, flat-field, and anastigmatic four-spherical-mirror system (reduction magnification 5$\times$) are found. Aspherization is carried out to the spherical mirror surfaces in order to reduce the residual higher order aberrations and vignetting effect. Finally we obtain a reflection system useful in submicron lithographic application.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.6
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• pp.1194-1202
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• 2002

A study on the topology optimization of a multi-spectral camera for space-use is presented. The optimization is carried out under self-weight and polishing pressure loading. A multi-spectral camera for space-use experiences degradation of optical image in the space, which can not be detected on the optical test bench on the earth. An optical surface deformation of a primary mirror, which is a principal component of the camera system, is an important factor affecting the optical performance of the whole camera system. In this study, topology optimization of the primary mirror of the camera is presented. As an objective function, a measure of Strehl ratio is used. Total mass of the primary mirror is given as a constraint to the optimization problem. The sensitivities of the objective function and constraint are calculated by direct differentiation method. Optimization procedure is carried out by an optimality criteria method. For the light-weight primary mirror design, a three dimensional model is treated. As a preliminary example, topology optimization considering a self-weight loading is treated. In the second example, the polishing pressure is also included as a loading in the topology optimization of the mirror. Results of the optimized design topology for the mirror with various mass constraints are presented.

• Korean Journal of Optics and Photonics
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• v.28 no.4
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• pp.146-152
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• 2017

Alignment of the mirrors composing a space telescope is an important process for obtaining high optical resolution and performance of the camera system. The alignment of mirrors using cube mirrors requires a relative coordinate mapping between the mirror and the cube mirror before optical-system integration. Therefore, to align the spacecraft camera mirrors, the relative coordinates of the vertex of each mirror and the corresponding cube mirror must be accurately measured. This paper proposes a new method for finding the vertex position of a primary mirror, by using an optical fiber and alignment segments of a computer-generated hologram (CGH). The measurement system is composed of an optical testing interferometer and a multimode optical fiber. We used two theodolites to measure the relative coordinates of the optical fiber located at the mirror vertex with respect to the cube mirror, and achieved a measurement precision of better than $25{\mu}m$.

• Korean Journal of Optics and Photonics
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• v.11 no.3
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• pp.163-165
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• 2000

We propose a new structure of optical cross connect based on a WDM MUX/DEMUX pair and switchable mirrors. In experiment, we demonstrate the operation of the optical cross connect using an optical fiber loop mirror connected to a $2\times2$ optical switch as a switchable mirror.mirror.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.8
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• pp.21-28
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• 2008

Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45$^{\circ}$ fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45$^{\circ}$ fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.920-925
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• 2001

A study on the topology optimization of a multi-spectral camera for space-use is presented. A multi-spectral camera for space-use experiences degradation of optical image in the space, which can not be detected on the optical test bench on the earth. An optical surface deformation of a primary mirror, which is a principal component of the camera system, under the self-weight loading is an important factor affecting the optical performance of the whole camera system. In this study, topology optimization of the primary mirror of the camera is presented. Total mass of the primary mirror is given as a constraint to the optimization problem. The sensitivities of the objective function and constraint are calculated by direct differentiation method. Optimization procedure is carried out by an optimality criterion method using the sensitivities of the objective function and the constraint. As a preliminary example, topology optimization considering a self-weight loading is treated. For practical use, the polishing pressure is included as a loading in the topology optimization of the primary mirror. Results of the optimized design topology for the primary mirror with varying mass ratios are presented.

• Journal of the Optical Society of Korea
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• v.16 no.3
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• pp.243-246
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• 2012

An off-axis four-mirror-anastigmatic telescope is presented here which is composed of two aspheric surfaces and two spherical surfaces. The entrance pupil diameter is 290 mm and the stop is located at the primary mirror. The effective focal length is 900 mm. The strip field of view for the telescope is $15^{\circ}{\times}0.2^{\circ}$ and if the telescope is launched into an orbit about 400 km altitude, the observed range width will be more than 105 km within a scene without any other auxiliary scanning instrument. The spectral range can be as wide as from visual wave band to infrared wave band in the mirror system. This telescope can be used for environmental monitoring with different detectors whose pixel is adapted to the optical resolution. In this paper, the spectral range is chosen as 3.0 -5.0 ${\mu}m$, and center distance of the pixel is 30 ${\mu}m$. And the image quality is near the diffraction limit.

• Proceedings of the Optical Society of Korea Conference
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• 1999.08a
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• pp.128-129
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• 1999

Polygon Mirror Scanning(PMS) is composed of LED array, magnifying lens, polygon mirror and motor. It is important to correct the lens aberrations to gain the image we want to show. In this paper, we have simulated the lens aberration correction to reduce the spherical aberration . We have obtained a aspherical lens which is corrected the spherical aberration.

• Journal of the Korean Institute of Gas
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• v.12 no.4
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• pp.63-68
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• 2008

This paper describes about the simulation and the experimental results of optical cavity with curved mirror surface and vertical mirror surface to improve the light intensity and efficiency of the optical sensors. When we use the vertical mirror surface, the distribution of light reached to the filter surface of detector shows an elliptical shape. Whereas, the curved mirror surface focuses the light into circular shape. Therefore, due to focusing effects in case of using curved mirror surface, the light intensity per unit area has been improved. Consequently, the output voltage of gas sensor has been expected to increase. Based upon the simulation, the experiment of gas sensor has been conducted with $CO_2$ gas from 0ppm to 2,500 ppm at 250 ppm step and $25^{\circ}C$, 45%R.H. ambient. The output voltage of gas sensor that has a curved mirror surface increases approximately 200 mV than that of vertical mirror surface.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.11
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• pp.2732-2741
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• 2000

Combination of magnetic recording technology and optical recording technology such as Near Field Optical Recording is watched recently. In order to accomplish this technology, the development of an electromagnetic driven mm-sized mirror shifting laser beam in track direction have to needed. In Near Field Optical Recording System, shifting laser beam in track direction mean as fine tracking and means as coarse tracking. Therefore in Near Field Optical Recording, 2-stage actuator is composed of servo controller in reading or recording information on disc layer. In our research, through design and simulation process of driven mm-sized mirror, we arrange systematically design process of driven mm-sized mirror having good frequency transfer characteristics. Design and simulation processes included modal analysis of spring, calculation of magnetic moment according to the number of turns and geometric configuration of coil and magnetic circuit analysis meaning that calculation of magnetic flux density in air gap of magnetic circuit. After that we design and make parts of driven mm-sized mirror, assemble and evaluate our electriomagnetic driven mm-sized mirror. we compared design values with actual characteristic values and present solution scheme. Through these processes we performed manufacturing of an electromagnetic driven mm-sized mirror having good frequency-domain characteristics and high sensitivity characteristics.