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A Study on the Tower type Fizeau Interferometer System with a Fold Minor for Measuring Large Optical Lens Profile  

Lee, Eung-Suk (충북대학교 기계공학과)
Lee, Ki-Am (충북대학교 기계공학부)
Kim, Ok-Hyun (충북대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.25, no.8, 2008 , pp. 21-28 More about this Journal
Abstract
Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45$^{\circ}$ fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45$^{\circ}$ fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.
Keywords
Fizeau Interferometer; Fold Mirror; Large Optics; OMM(On Machine Measurement);
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Malacara-Hernandez, D. and Malacara-Doblado, D., "Testing of Aspheric Wavefronts," Fabrication and Testing of Aspheres of OSA Trends in Optics and Photonics, Vol. 24 , pp. 74-85, 1999
2 Hecht, E., "Optics," Addison Wesley Longman Inc., pp. 253-258, 2002
3 Lee, E. S., Bae, K. H., Lee, K. A. and Kim, O. H., "Development of a Fizeau Interferometer System for Measuring the Profile of Large Optical Lens," The Korean Socity of Mechenical Engineers, Vol. 30, No. 5, pp. 1649-1657, 2006   과학기술학회마을   DOI
4 Kim, D. H., "Profile Measurement and Stabilization using Laser Interferometer," Chousun University, MSc Thesis, pp. 22-30, 2004
5 Kim, H. Y., "Accuracy Improvement of Fizeau Interferometer," KAIST, MSc Thesis, pp. 7-13, 2001
6 Song, J. B., "Phase Shift Shear Interferometer using a Wedge plate," KAIST, PhD Thesis, pp. 15-23, 2004