• Title/Summary/Keyword: Optical MEMS

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The improvement of the sidewall roughness of the crystalline silicon for optical MEMS devices (광 MEMS소자 용 결정질 실리콘의 측면 거칠기 개선)

  • Yoon, Sung-Sik;Kwon, Ho-Nam;Yang, Sung;Kim, Won-Hyo;Kim, Young-Yoon;Jeon, Byung-Hee;Lee, Jong-Hyun
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.256-257
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    • 2002
  • 최근 광 스위치, 광학 가변 필터와 같은 광통신용 수동 소자를 구현하기 위해 실리콘 마이크로머시닝 기술을 바탕으로 한 광 MEMS(micro electro mechanical system) 기술이 각광을 받고 있다[1,2]. 특히, 실리콘 기판을 수직 식각하여 제작한 측면 저울은 2$\times$2광 스위치나 광 필터 등에서 반사 평면이나 투과평면으로 많이 이용되고 있다. 광학 평면의 거칠기 특성은 빛의 산란에 의한 광학 손실이나 평행 광 특성 유지 등과 밀접한 관계가 있다. (중략)

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Performance Measurement of SMT(Slewing Mirror Telescope) Optical System

  • Ahn, Ki-Beom;Jeong, Soo-Min;Kim, Ji-Eun;Kim, Sug-Whan;Lee, Jik;Lim, Heui-Jin;Lindere, V.;Nam, Ji-Woo;Nam, Koo-Hyun;Park, Il-H.;Smoot, G.F.
    • Bulletin of the Korean Space Science Society
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    • 2011.04a
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    • pp.23.1-23.1
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    • 2011
  • The SMT is a subsystem of the UFFO (Ultra-Fast Flash Observatory) pathfinder onboard the Lomonosov spacecraft planed to be launched in November 2011. The UFFO is designed for extremely fast observation of optical afterglow of Gamma Ray Burst (GRB). This study is primarily concerned with performance measurement of the SMT optical system under the integration and test phase. SMT is a 100mm Ritchey-Chretien type telescope with a motorized slewing mirror and a $256{\times}256$ pixels Intensified Charge-Coupled Device (ICCD) of 22.2${\mu}m$ in pixel size. SMT is designed to operate over the wavelength coverage between 200 nm and 650 nm. It has 17 arcmin FOV (Field of View), providing 4arcsec in detector pixel resolution. In this study, we describe the integration and test process of the SMT optical system and interim performance measurement results with motorized slewing mirror and ICCD.

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Optimization of Thermo-optical Property for Electrostatic Actuating MEMS-based Variable Emissivity Radiator (정전 구동형 MEMS 기반 가변 방사율 라디에이터의 광학 물성치 최적화 설계)

  • Ha, Heon-Woo;Kang, Soo-Jin;Han, Sung-Hyeon;Kim, Tae-Gyu;Oh, Hyun-Ung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.43 no.2
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    • pp.149-155
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    • 2015
  • MEMS-based louver and shutter type conventional variable emissivity radiators change their emissivity properties in accordance with a temperature condition to achieve efficient thermal control performance. However, there are some drawbacks such as a structural safety of the mechanical moving parts under sever launch environment and constant power consumption to maintain the intended emissivity. In this study, to overcome above drawbacks, we proposed a MEMS-based variable emissivity radiator, which can change the emissivity property according to the polarity change of electrodes by using electric charge of the bead. The effectiveness of the optimized radiator design has been demonstrated through the comparison of efficiency with the fixed emissivity radiator.

Recent Synchronization Signal Circuit System for Low Crosstalk Stereoscopic Display

  • Liou, Jian-Chiun;Huang, Jui-Feng;Tseng, Fan-Gang
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1405-1408
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    • 2008
  • Synchronization signal circuit system for low cross-talk stereoscopic display. We proposed the employment of the scanning beams of any adjacent scanning regions gradually scan from upper to down direction of the LED backlight panel.

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LED Scanning Backlight Stereoscopic Display with Shutter Glasses

  • Liou, Jian-Chiun;Lee, Kuen;Tseng, Fan-Gang
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.710-713
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    • 2008
  • LED Scanning Backlight Stereoscopic Display with Shutter Glasses is provided to realize stereoscopic image viewing even in a liquid crystal display. The eye shutter signal is alternately switched from the left eye to the right eye with 120Hz of LCD Vertical synchronization (V-sync).

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Improvement of Optical Disk Controller Using a MEMS Accelerometer

  • Park, Keeyoung;Kim, Sunghee;Jintai Chung
    • 제어로봇시스템학회:학술대회논문집
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    • 2002.10a
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    • pp.91.6-91
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    • 2002
  • $\textbullet$ Simulation of the effect of external vibration on optical disk pickups.$\textbullet$ Vibration effect is cancelled with aceeleration feedforward. $\textbullet$ MEMS accelerometers are small enough not to require any mechanical design modification. $\textbullet$ LQR, LQG, and SMC type controllers are designed. $\textbullet$ With the feedforward, transmissibility is reduced significantly. $\textbullet$ Time domain simulation confirms the performance enhancement. $\textbullet$ The resultant system shows excellent command following characteristics as well.

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MEMS wavelength tunable filter with 69nm tuning range (69nm 가변 범위를 갖는 MEMS 파장가변 필터)

  • Kim, Chang-Gyu;Lee, Myeong-Rae;Jeon, Chi-Hun;Eom, Yong-Seong;Kim, Yun-Tae
    • Proceedings of the Optical Society of Korea Conference
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    • 2004.02a
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    • pp.286-287
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    • 2004
  • GaAs 기판 위에 성장된 열구동 MEMS형 파장가변 필터 구조를 이용하여 제작 과정이 간단하면서도 구동 전압 1.7 V, 소비전력 0.92 mW만으로 69 nm의 파장가변이 가능한 저전압, 저소비전력 필터 소자를 구현하였다.

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Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

  • Ahmadian, Mehdi;Jafari, Kian;Sharifi, Mohammad Javad
    • ETRI Journal
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    • v.40 no.6
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    • pp.794-801
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    • 2018
  • This paper proposes a novel graphene-based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and integrated optical waveguides. The proposed accelerometer provides several advantages, such as negligible cross-axis sensitivity, appropriate linearity behavior in the operation range, a relatively broad measurement range, and a significantly wider bandwidth when compared with other important contributions in the literature. Furthermore, the functional characteristics of the proposed device are designed analytically, and are then confirmed using numerical methods. Based on the simulation results, the functional characteristics are as follows: a mechanical sensitivity of 1,019 nm/g, an optical sensitivity of 145.7 %/g, a resonance frequency of 15,553 Hz, a bandwidth of 7 kHz, and a measurement range of ${\pm}10g$. Owing to the obtained functional characteristics, the proposed device is suitable for several applications in which high sensitivity and wide bandwidth are required simultaneously.

Investigation of smart multifunctional optical sensor platform and its application in optical sensor networks

  • Pang, C.;Yu, M.;Gupta, A.K.;Bryden, K.M.
    • Smart Structures and Systems
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    • v.12 no.1
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    • pp.23-39
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    • 2013
  • In this article, a smart multifunctional optical system-on-a-chip (SOC) sensor platform is presented and its application for fiber Bragg grating (FBG) sensor interrogation in optical sensor networks is investigated. The smart SOC sensor platform consists of a superluminescent diode as a broadband source, a tunable microelectromechanical system (MEMS) based Fabry-P$\acute{e}$rot filter, photodetectors, and an integrated microcontroller for data acquisition, processing, and communication. Integrated with a wireless sensor network (WSN) module in a compact package, a smart optical sensor node is developed. The smart multifunctional sensor platform has the capability of interrogating different types of optical fiber sensors, including Fabry-P$\acute{e}$rot sensors and Bragg grating sensors. As a case study, the smart optical sensor platform is demonstrated to interrogate multiplexed FBG strain sensors. A time domain signal processing method is used to obtain the Bragg wavelength shift of two FBG strain sensors through sweeping the MEMS tunable Fabry-P$\acute{e}$rot filter. A tuning range of 46 nm and a tuning speed of 10 Hz are achieved. The smart optical sensor platform will open doors to many applications that require high performance optical WSNs.

Angle Measurement of MEMS Devices Image Processing (Image Processing에 의한 MEMS소자의 미세한 각도측정)

  • Ko, Jin-Hwan;Kim, Ho-Seong
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.2198-2200
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    • 2000
  • This paper reports on the measurement of angle between micro mirror and substrate in. the Micro Optical Cross Connect(MOXC). MOXC consists of beam collimators and $N{\times}N$ micro mirrors that are fabricated by using MEMS technology. Using subpixel level image processing, it is possible to measure the angle with the resolution of 0.27$^{\circ}$.

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