• Title/Summary/Keyword: Optical Interferometer

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Pitch Measurement of One-dimensional Gratings Using a Metrological Atomic Force Microscope and Uncertainty Evaluation (미터 소급성을 갖는 원자간력 현미경을 이용한 1차원 격자 피치 측정과 불확도 평가)

  • Kim Jong-Ahn;Kim Jae Wan;Park Byong Chon;Eom Tae Bong;Kang Chu-Shik
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.4
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    • pp.84-91
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    • 2005
  • We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.

OBSERVATIONS OF UPPER THERMOSPHERIC TEMPERATURES USING A GROUND-BASED OPTICAL INSTRUMENT AT THE KING SEJONGSTATION, ANTARCTIC (남극 세종기지 광학 간섭계를 이용한 열권 상부 온도 관측)

  • Chung, Jong-Kyun;Won, Young-In;Lee, Bang-Yong;Kim, Jhoon
    • Journal of Astronomy and Space Sciences
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    • v.15 no.1
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    • pp.139-150
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    • 1998
  • We measured the terrestrial nightglow of OI $6300{\AA}$ in the thermosphere (~250km) using a ground-based Fabry-Perot interferometer at the King Sejong Station, Antarcticfrom March through September, 1997. The King Sejong Station is located at high latitude geographically ($62.22^{\circ}S,\;301.25^{\circ}E$) but at mid latitude geomagnetically ($50.62^{\circ}S,\;7.51^{\circ}E$). It is therefore the strategic location to measure the temperatures of the thermosphere in the Southern Hemisphere associated with both solar and geomagnetic activities. In this study, we analyzed the observed temperatures inrelation to F10.7 and Kp indices to examine the effect of the solar and the geomagneticactivities on high-latitude neutral thermosphere. During the observing period, the solaractivity was at its minimum. The measured temperatures are usually in the range between about 600~1000 K with some seasonal variation and are higher than those predicted by semi-empirical model, VSH (Vector Spherical Harmonics) and empirical model, MSIS (Mass-Spectrometer-Incoherent-Scatter)-86.

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Spectral Mode Analysis of an Injection-Locked Semiconductor Laser (광 주입-잠금된 반도체 레이저의 모드 분석)

  • Bae, I.H.;Moon, H.S.;Kim, J.N.
    • Korean Journal of Optics and Photonics
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    • v.18 no.5
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    • pp.317-322
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    • 2007
  • We performed injection-locking by two independent semiconductor lasers and investigated the spectral modes of the injection-locked laser From the observation of the saturated absorption spectrum in the $^{85}Rb$ D1 transition line, we have confirmed that the frequency of the injection-locked slave laser is synchronized by the frequency of the master laser, and the slave laser has a narrow linewidth after injection-locking. According to the intensity injected into the slave laser, we measured the variation of the injection-locking range and the mode of the injection-locked slave laser by using the confocal Fabry-Ferret interferometer. In the case of the incomplete injection-locking, we observed the competition between the free running mode of the slave laser and the mode of the master laser and analyzed the modes of the injection-locked slave laser.

Phase Noise Filtering in Interferometer Using the Characteristic of SPPCM of $BaTiO_3$ ($BaTiO_3$의 SPPCM 특성을 이용한 간섭계의 위상 잡음 제거)

  • Han, Jeong-Yeop;Kim, Seong-Wan;Kim, Jong-Yun;Park, Se-Jun;Kim, Cheol-Su;Kim, Su-Jong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.2
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    • pp.122-127
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    • 2001
  • The high stability of the interference pattern is very important in the case of measuring interference when a phase noise like a vibration occurs in the measuring environment. In this paper, we proposed the method of phase noise filtering by BaTiO$_3$ with the characteristic of SPPCM. Also, a beam with a shape of an ellipse was incident into BaTiO$_3$ by using the tilted lens so as to improve the reflectivity and the response time. And we confirmed the result by optical experiment.

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A Study on the Design and Fabrication of the Planar Light Waveguide type $2\times32$ Optical Coupler (평면도파로형 $2\times32$ 광커플러의 설계와 제작에 관한 연구)

  • 신기수;최영복;류근호;문동찬
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.24 no.12B
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    • pp.2335-2341
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    • 1999
  • The $2\times32$ coupler consists of Mach-Zehnder interferometer and Y branch coupler. For the designs of this coupler, three dimensional rectangular core waveguide decomposed to two-dimensional structure by the effective index method. To optimize the waveguide structure, the confinement factor was investigated with two-dimensional finite difference Beam Propagation Method. The $2\times32$ coupler fabricated by simulation with height between Mach-Zehnder arms, H=$43.6\mu\textrm{m}$(path difference $0.668\mu\textrm{m}$) was showed best characteristics. In the results of dry etching of core layer, the etching rate of core layer was above 2600${\AA}$/min, the etching ratio of SiO2 to Al mask was 30:1 and the uniformity of etching was $\pm$5%. The maximum insertion loss and the uniformity of $2\times32$ coupler were below 19.2dB, 2dB respectively.

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Deformation Measurement of Well Thinning Elbow by Using Shearography (전단간섭법을 이용한 감육 곡관부의 변형 계측)

  • Jung, Hyun-Chul;Kim, Koung-Suk;Chang, Ho-Sub;Jung, Sung-Wook;Kang, Ki-Soo
    • Journal of the Korean Society for Nondestructive Testing
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    • v.26 no.5
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    • pp.321-328
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    • 2006
  • In this study, the deformation oi wall thinning elbow is measured and the position of the internal thinning defect is found out by shearography. Shearography is an optical method which has applied to nondestructive testing (NDT) and the strain/stress and deformation analysis. This technique has the merit of the directly measuring the first derivative of displacement with sensitivity which can be adjusted by handling the tilt mirror in the interferometer. In this paper, we tested carbon steel pipe locally wall thinned and loaded internal pressure and the shearography was applied to measure the out-of-plane deformation of wall thinning elbow and to investigate the internal thinning defect of it. From the results, it was confirmed that this technique is proper to the practical application on the pipe line system with internal defect.

Characteristics of Visible Laser Diode and Its Injection-Locking (가시광 다이오드 레이저의 스펙트럼 및 주입-잠금 특성분석)

  • 남병호;박기수;권진혁
    • Korean Journal of Optics and Photonics
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    • v.5 no.2
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    • pp.278-285
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    • 1994
  • We investigated the spectral characteristics for temperature and driving current change in visible laser diode. As a result of spectrum analysis, the ratio of frequency change for temperature and driving current change were about $33 GHz/^{\circ}C$, 6.6 GHz/mA in the region which was not mode hopping range. Compared to the sharp mode hopping in the near IR single mode AlGaAs lasers, the visible laser diode showed relatively broad multimode operation in the mode hopping region. We performed the experiment of injection-locking characteristics analysis for visible laser diode. Locking half bandwidth(LHBW) was measured 0~5.0 GHz for $0~25\muW$ input power and it was dependent on the input power. Also, LHBW for polarization angle was dependent on the difference of polarization angle between master laser and slave laser. The phase change of injection-locked output beam of the slave laser diode as a function of the drive current was measured in the interferometer which was composed of master laser and slave laser. The ratio of phase change with the slope of 5.0~1.3 rad/mA was obtained within injection-locking range for the change of $2~25\muW$ input power. power.

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Detection and Analysis of Acoustic Emission Signal at the Epicenter on the Circular Glass Plate During Pencil Land Fracture (연필심 파괴시 유리원판의 진앙점에서 음향방출 신호의 검출 및 해석)

  • Lee, Jong-Gyu;Jang, Ji-Won;Park, Jeong-Man
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.26 no.1
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    • pp.1-7
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    • 1990
  • Theoretical evaluations of the vertical displacement at the epicenter on the circular glass plate have been carried out in the case of the unit point loading(1 dyne force strength) with the Heaviside step-function time dependency. Acoustic emission signals generated during pencil lead($\Phi$=0.5mm, HB) fracture on the soda-lime glass($\Phi$=22cm, thickness=2.8cm) were observed by the optical Michelson interferometer with the stabilized circuit, and then the source function of the observed acoustic emission signals was analyzed by the deconvolution method. The source function of acoustic emission during pencil lead fracture had a 'dip' of~0.7$\mu$sec duration time at the front portion and a step function of~0.5$\mu$sec rise time with a force strength of~4.5N.

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Phase-Shifting System Using Zero-Crossing Detection for use in Fiber-Optic ESPI (영점검출을 이용한 광섬유형 전자 스페클 패턴 간섭계의 위상이동)

  • Park, Hyoung-Jun;Song, Min-Ho;Lee, Jun-Ho
    • Korean Journal of Optics and Photonics
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    • v.16 no.6
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    • pp.516-520
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    • 2005
  • We proposed an efficient phase stepping method for the use in fiber-optic ESPI. To improve phase-stepping accuracy and efficiency, a fiber-optic Michelson interferometer was phase-modulated by a ramp-driven fiber stretcher, resulting in 4$\pi$ phase excursion in the PD interference signal. The zero-crossing points of the signal, which have consecutive $\pi$ phase difference, were carefully detected and used to generate trigger signals for the CCD camera. From the experimental results by using this algorithm, $\pi$/2 phase-stepping errors between the speckle patterns were measured to be less than 0.6 mrad with 100 Hz image capture speed. Also it has been shown that the error from the nonlinear phase modulation and environmental perturbations could be minimized without any feedback algorithm.

The Spatial Coherence Characteristics of Wavefront of NBUR Nd:YAG Laser Output Beam (NBUR Nd:YAG 레이저 위상파면의 공간적 가간섭성 특성)

  • 박대윤;최승호;이승걸
    • Korean Journal of Optics and Photonics
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    • v.6 no.4
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    • pp.288-295
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    • 1995
  • We have studied about spatial wavefront analysis of a pulsed laser output beam by means of an imaging unstable ring resonator with an infinite Fresnel number. We have constructed a Newtonian telescope type NBUR (Negative Branch Unstable Ring) Nd:YAG laser with 4 plane mirrors. Provided that the NBUR resonator is under self imaging condition, the resonator could be reduced diffraction effects which were occuring to the beam transmitting through the circular aperture of scraper mirror in the resonator. We have observed enhancement in the spatial coherence of wavefronts of laser beam due to the iterative round trips of the self imaging beam inside the ring resonator. The information on the spatial wavefronts was determined by the fringe patterns from Mach-Zehnder interferometer and the fringe analysis by means of the Fourier transform method showed the distortion of wavefronts of less than 0.2), In comparison with a standing wave type resonator, we have confirmed that the spatial coherence of the NBUR Nd:YAG laser output beam was enhanced as much as 75%. s 75%.

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