• 제목/요약/키워드: Optical Analysis

검색결과 4,628건 처리시간 0.036초

Determination of Optical Constants of Thin Films in Extreme Ultraviolet Wavelength Region by an Indirect Optical Method

  • Kang, Hee Young;Lim, Jai Dong;Peranantham, Pazhanisami;HwangBo, Chang Kwon
    • Journal of the Optical Society of Korea
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    • 제17권1호
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    • pp.38-43
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    • 2013
  • In this study, we propose a simple and indirect method to determine the optical constants of Mo and ITO thin films in the extreme ultraviolet (EUV) wavelength region by using X-ray reflectometry (XRR) and Rutherford backscattering spectrometry (RBS). Mo and ITO films were deposited on silicon substrates by using an RF magnetron sputtering method. The density and the composition of the deposited films were evaluated from the XRR and RBS analysis, respectively and then the optical constants of the Mo and ITO films were determined by an indirect optical method. The results suggest that the indirect method by using the XRR and RBS analysis will be useful to search for suitable high absorbing EUVL mask material quickly.

Method of Crosstalk Analysis for CO-ORMDM Systems

  • Kyung Hee Seo;Jae Seung Lee
    • Current Optics and Photonics
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    • 제8권2호
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    • pp.156-161
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    • 2024
  • Recently, a new kind of optical multiplexing called optical-receiver-mode (ORM)-division multiplexing (ORMDM) has been proposed, in which an optical channel is a linear sum of ORM subchannels modulated independently. Using coherent-optical (CO) techniques, it has been reported that COORMDM communication systems can have very high spectral efficiencies (SEs). To estimate the SEs of CO-ORMDM communication systems, we introduce a new method of crosstalk analysis. Using this method, we can allocate quadrature-amplitude-modulation (QAM) codes and QAM step sizes unevenly over ORM subchannels to obtain higher SEs. With 50 Gaussian ORMs, we obtain a SE of up to 15.29 bit s-1 Hz-1.

DVD 광 디스크 홀더의 변형 해석 및 실험적 검증 (Deformation Analysis and Experimental Verification of DVD Optical Disc Holders)

  • 김진곤;박용국
    • 한국정밀공학회지
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    • 제20권5호
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    • pp.164-170
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    • 2003
  • To ensure the reliability of DVDR-P and DVD-ROM, it is imperative to remedy the unrecoverable creep deformation and/or relaxation of the holding force of an optical disc holder. To predict the deformation of an optical disc holder, a deformation analysis of an 80 mm optical disc holder considering the creep characteristics of 3 plastic materials has been conducted. Subsequently, the results by this Finite Element Analysis (FEA) are experimentally verified. A disc holder inserted in a cartridge case is kept in a chamber of $60^{\circ}C$ with 90 % humidity for 24 hours. The arm span and the holding force of the disc holder are measured after being left for another 24 successive hours at a room temperature and under normal humidity. The predicted results by FEA are in good agreement with experimentally measured values.

Optical Emission Spectra 신호와 다변량분석기법을 통한 Fluorocarbon에 의해 오염된 반응기의 RF 플라즈마 세정공정 진단 (RF Plasma Processes Monitoring for Fluorocarbon Polluted Plasma Chamber Cleaning by Optical Emission Spectroscopy and Multivariate Analysis)

  • 장해규;이학승;채희엽
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 추계학술대회 논문집
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    • pp.242-243
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    • 2015
  • Fault detection using optical emission spectra with modified K-means cluster analysis and principal component anal ysis are demonstrated for inductive coupl ed pl asma cl eaning processes. The optical emission spectra from optical emission spectroscopy (OES) are used for measurement. Furthermore, Principal component analysis and K-means cluster analysis algorithm is modified and applied to real-time detection and sensitivity enhancement for fluorocarbon cleaning processes. The proposed techniques show clear improvement of sensitivity and significant noise reduction when they are compared with single wavelength signals measured by OES. These techniques are expected to be applied to various plasma monitoring applications including fault detections as well as chamber cleaning endpoint detection.

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Simulation of Rough Surface of CIGS (CuInGaSe) Solar Cell by RCWA (Rigorous Coupled Wave Analysis) Considering the Incoherency of Light

  • Kim, Sung Chul
    • Journal of the Optical Society of Korea
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    • 제18권2호
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    • pp.180-183
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    • 2014
  • The surface of semiconductor solar cells, such as a-Si or CIGS (CuInGaSe) solar cells is not flat but textured in the microscopic domain. With textured surfaces, the optical reflectivity of a solar cell is different from that of flat surfaces in the wavelength region. In this paper, the effects of a textured surface on a CIGS solar cell are presented by RCWA (Rigorous Coupled Wave Analysis) method. The effect of incoherent light is also considered by RCWA with a Fourier analysis while conventional optical simulation uses the input light on the solar cell as coherent light. Using experimental results, the author showed that the RCWA method with a Fourier analysis is a proper method to simulate the optical properties of CIGS solar cells.

역기전력을 이용한 슬림형 광 픽업의 연성 해석 및 비연성 제어기 설계 (Coupling Analysis of Slim Type Optical Pick-up using Back Electromotive Force, and Decoupling Control for It)

  • 최진영;이광현;이재성;김상훈;양현석;박노철;박영필
    • 정보저장시스템학회논문집
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    • 제2권2호
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    • pp.117-122
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    • 2006
  • A novel method to find interaction dynamics between focusing direction and tracking direction in an optical pick-up is proposed. and the decoupling control to reduce the interaction effect is discussed. First, the basic principle to detect dynamic interaction analysis using back electromotive force is introduced. Second, the interaction analysis between focusing and tracking direction of is analyzed for a commercial slim type optical pick-up. Finally. decoupling control process and its simulation results are shown.

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소산파 집적광학 바이오센서에 적합한 Si3N4 립-광도파로 해석 및 설계에 관한 연구 (Analysis and Design of Si3N4 Rib-optical Waveguides for Evanescent-wave Integrated-optical Biosensors)

  • 정홍식
    • 한국광학회지
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    • 제30권1호
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    • pp.15-22
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    • 2019
  • 소산파 기반 집적광학 바이오센서에 적합한 $Si_3N_4$ 립-광도파로 구조에 대한 해석적 분석을 통해서 단일모드 도파조건을 도출하였다. 두-모드 간섭현상을 이용하는 집적광학 바이오센서 구조를 제시하고, 단일모드와 두-모드(감지영역)에 해당되는 립-광도파로 제원인 폭, 립 및 코어 두께 각각에 대해서 $3{\mu}m$, 2 nm, 150 nm와 $3{\mu}m$, 20 nm, 340 nm를 제안하였으며, FMM 전산해석을 통해서 감지영역의 두-모드들에 대한 광학적 특성들을 검토하였다.

Z형 쌍-결합기 광 공진기를 이용한 광섬유 마이크로파 신호처리 (All-Fiber Microwave Signal Processing Device with Z-Shaped Double Coupler Optical Resonator)

  • 이동욱
    • 한국광학회:학술대회논문집
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    • 한국광학회 1999년도 제16회 광학 및 양자전자 학술발표회Proceedings of 16th Optics and Quantum Electronics Conference, 1999
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    • pp.116-117
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    • 1999
  • Optical fiber networks for microwave signal processing have been investigation . Theoretical and experimental results are presented in Z-shaped Double-Coupler Optical Resonator. The use of Mason's rule to calculate transfer functions greatly simplified the analysis in our model. A good comparison between modelling and experiment is presented.

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