• 제목/요약/키워드: One step deposition method

검색결과 32건 처리시간 0.026초

The Characteristics of HTM Free Perovskite Solar Cell with Gas Pressure Assisted Modified Fabrication Process

  • 조만식;장지훈;송상우;황재원;한광희;김동우;문병무
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.415.1-415.1
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    • 2016
  • 2009년도에 Perovskite가 태양전지에 처음 적용된 이후, Perovskite를 기반으로 하는 태양전지는 급속한 발전을 이루고 있으나, 향후 상용화를 위해서는 추가적인 공정개선 및 제조 단가를 낮추는 노력이 필수적이다. 초창기 Perovskite의 증착 공정은 One step deposition 방법이 사용되었으나, Layer의 thickness, uniformity 등을 조절하기 어려워 Sequential deposition 방법으로 개선되었다. 하지만 결과적으로 초기방법 대비 추가공정이 발생함에 따라 시간 및 비용의 증가가 불가피하였다. 제조단가 측면에서는 Perovskite 태양전지를 구성하는 재료 중 HTM(정공수송물질)을 구성하는 Spiro-MeOTAD의 비용이 가장 비싸다. 따라서 저비용 태양전지를 위해서는 HTM이 없는 구조가 필요하다. 이 페이퍼에서는 Perovskite 물질이 고흡광 능력 외에 충분한 전하수송능력을 보유한다는 점에 착안하여, Gas Pressure Assisted Modified One Step Deposition을 이용한 HTM Free Perovskite를 제작하고 기존의 Sequential Deposition Method 통해 만들어진 Perovskite 태양전지와 비교/분석하였다.

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비정질 셀레늄의 박막 제조공정에 따른 미세구조와 IV특성 (The X-ray Detection and morphology Characteristics on Evaporation Temperature of amorphous Selenium based digital X-ray detector)

  • 공현기;차병열;이규홍;김재형;남상희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 센서 박막재료 반도체재료 기술교육
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    • pp.51-54
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    • 2002
  • Recently, due to its better photosensitivity in X-ray, the amorphous selenium based photoreceptor is used on digital direct method conversion material. Compared to other photoconductive material, amorphous selenium has good X-ray response characteristic and low leakage current. It has many parameters of detecting X-ray response on selenium. Among of them, it is well known that manufacture of a-Se is the most basic element. In this paper, we fabricated two types of amorphous selenium sample which had time variable. The one was fabricated continuous deposition sample and the other was step by step sample. Thickness of sample was $300{\mu}m$ and top electrode was evaporated gold. We investigated the leakage current and photo current of them and analysed their electrical characteristics. For analyzing morphology of samples, SEM and surface was pictured. We found that step by step deposition method could be applied for novel fabricating amorphous selenium film.

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압전층의 2단 증착법을 이용한 체적 음향파 박막형 공진기의 제작과 성능향상에 관한 연구 (A Study of the Fabrication and Enhancement of Film Bulk Acoustic Wave Resonator using Two-Step Deposition Method of Piezoelectric Layer)

  • 박성현;추순남;이능헌
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권7호
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    • pp.308-314
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    • 2005
  • The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

Electroless Deposition and Surface-Enhanced Raman Scattering Application of Palladium Thin Films on Glass Substrates

  • Shin, Kuan Soo;Cho, Young Kwan;Kim, Kyung Lock;Kim, Kwan
    • Bulletin of the Korean Chemical Society
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    • 제35권3호
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    • pp.743-748
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    • 2014
  • In this work, we describe a very simple electroless deposition method to prepare moderate-SERS-active nanostructured Pd films deposited on the glass substrates. To the best of our knowledge, this is the first report on the one-pot electroless method to deposit Pd nanostructures on the glass substrates. This method only requires the incubation of negatively charged glass substrates in ethanol-water mixture solutions of $Pd(NO_3)_2$ and butylamine at elevated temperatures. Pd films are then formed exclusively and evenly on glass substrates. Due to the aggregated structures of Pd, the SERS spectra of benzenethiol and organic isonitrile could be clearly identified using the Pd-coated glass as a SERS substrate. This one-step fabrication method of Pd thin film on glass is cost-effective and suitable for the mass production.

스프레이 분무법을 이용한 CIGS 태양전지 박막의 합성 (CIGS Thin Film Fabrication Using Spray Deposition Technique)

  • 조정민;배은진;서정대;송기봉
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.250-250
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    • 2010
  • We have prepared CIGS thin film absorber layers with simple solution spray deposition technique and thin film were synthesized with different atomic ratio. CIGS thin films were synthesized using non-vacuum solution deposition method on pre-heated sodalime glass substrates and Mo-coated soadlime glass substrate. In precursor solution were Cu : In : Ga: S ratio 4 : 3 : 2 : 8 and the crystal type of sprayed thin film were CIGS chalcopyrite structures. This structure was identified as typical chalcopyrite tetragonal structure with XRD analysis. This result showed that CIGS solution deposition technique has potential for the one step synthesis and low cost fabrication process for CIS or CIGS thin film absorber layer.

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산화아연 나노핵의 조작을 통한 산화아연 나노로드의 제어 (Artificial Control of ZnO Nanorods via Manipulation of ZnO Nanoparticle Seeds)

  • 신경식;이삼동;김상우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.399-399
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    • 2008
  • Synthesis and characterization of ZnO structure such as nanowires, nanorods, nanotube, nanowall, etc. have been studied to multifunctional application such as optical, nanoscale electronic and chemical devices because it has a room-temperature wide band gap of 3.37eV, large exiton binding energy(60meV) and various properties. Various synthesis methods including chemical vapor deposition (CVD), physical vapor deposition, electrochemical deposition, micro-emulsion, and hydrothermal approach have been reported to fabricate various kinds of ZnO nanostructures. But some of these synthesis methods are expensive and difficult of mass production. Wet chemical method has several advantage such as simple process, mass production, low temperature process, and low cost. In the present work, ZnO nanorods are deposited on ITO/glass substrate by simple wet chemical method. The process is perfomed by two steps. One-step is deposition of ZnO seeds and two-step is growth of ZnO nanorods on substrates. In order to form ZnO seeds on substrates, mixture solution of Zn acetate and Methanol was prepared.(one-step) Seed layers were deposited for control of morpholgy of ZnO seed layers by spin coating process because ZnO seeds is deposited uniformly by centrifugal force of spin coating. The seed-deposited samples were pre-annealed for 30min at $180^{\circ}C$ to enhance adhesion and crystallinnity of ZnO seed layer on substrate. Vertically well-aligned ZnO nanorods were grown by the "dipping-and-holding" process of the substrates into the mixture solution consisting of the mixture solution of DI water, Zinc nitrate and hexamethylenetetramine for 4 hours at $90^{\circ}C$.(two-step) It was found that density and morphology of ZnO nanorods were controlled by manipulation of ZnO seeds through rpm of spin coating. The morphology, crystallinity, optical properties of the grown ZnO nanostructures were carried out by field-emission scanning electron microscopy, high-resolution electron microscopy, photoluminescence, respectively. We are convinced that this method is complementing problems of main techniques of existing reports.

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One-step microwave synthesis of surface functionalized carbon fiber fabric by ZnO nanostructures

  • Ravi S. Rai;Vivek Bajpai
    • Advances in nano research
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    • 제14권6호
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    • pp.557-573
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    • 2023
  • The rapid growth of zinc-oxide (ZnO) nanostructures (NSs) on woven carbon fiber (WCF) is reported in this study employing a microwave-aided chemical bath deposition process. The effects of different process parameters such as molar concentration, microwave duration and microwave power on morphologies and growth rate of the ZnO on WCF were studied. Furthermore, an attempt has been taken to study influence of different type of growth solutions on ZnO morphologies and growth rates. The surface functionalization of WCF fabrics is achieved by successful growth of crystalline ZnO on fiber surface in a very short duration through one-step microwave synthesis. The morphological, structural and compositional studies of ZnO-modified WCF are evaluated using field-emission scanning electron microscopy, X-ray diffraction and energy dispersive X-ray spectroscopy respectively. Good amount of zinc and oxygen has been seen in the surface of WCF. The presence of the wurtzite phase of ZnO having crystallite size 30-40 nm calculated using the Debye Scherrer method enhances the surface characteristics of WCF fabrics. The UV-VIS spectroscopy is used to investigate optical properties of ZnO-modified WCF samples by absorbance, transmittance and reflectance spectra. The variation of different parameters such as dielectric constants, optical conductivity, refractive index and extinction coefficient are examined that revealed the enhancement of optical characteristics of carbon fiber for wide applications in optoelectronic devices, carbon fiber composites and photonics.

RF 마그네트론 스퍼터링법에 의한 a-축 배향 $YBa_2Cu_3O_{7-\delta}$박막의 제조 (Preparation of a axis oriented $YBa_2Cu_3O_{7-\delta}$ thin films by RF magnetron sputtering)

  • 이재준;김영환;신진;이경희;최상삼;한택상
    • 한국재료학회지
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    • 제4권4호
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    • pp.459-465
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    • 1994
  • a-측으로 배향된 $YBa_2Cu_3O_{7-\delta}$ 고온 초전도 박막을 $LaAIO_{3}$(100)단결정 기판에 이중 타게트 off-axis rf마그네트론 스퍼터링법으로 증착하였다. 박막은 기판온도(Ts)$590^{\circ}C$$680^{\circ}C$사이에서 단일공정으로 증착하는 one-step방법과, $590^{\circ}C$의 저온에서 a-축으로 배향된 YBCO박막(두께-30nm)을 면저 만들어 틀로 작용시킨 후 그 틀위에 나머지 부분을 기판온도를 승온하면서 증착하는 방법인 two-step방법 등 두 가지 방법을 사용하여 증착시켰다. one-step방법에서는 $T_s$가 증가함에 따라 감소하였으며, ($00 \ell$)피크는 증가하였다. Two-step방법으로 증착한 박막은 증착속도가 감소함에 따라 (h00)피크가 우세하게 나타났다. 박막의 미세구조는 a-축, c- 축 배향성이 혼재하여 핀홀과 같은 결함들이 생성되었다. 모든 경우 $T_s$가 감소함에 따라 a-축 배향성은 우세하였으나 전기적 특성은 저하되었고, 긴 전이온도 폭을 가졌다.

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단일 스텝 스핀 코팅 방법에서 증발 제어 공정 변경에 따른 페로브스카이트 박막 물성 및 태양 전지 소자 특성 변화에 관한 연구 (Properties of Perovskite Materials and Devices Fabricated Using the Solvent Engineered One-Step Spin Coating Method)

  • 오정석;권남희;차덕준;양정엽
    • 새물리
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    • 제68권11호
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    • pp.1208-1214
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    • 2018
  • 단일 스텝 스핀 코팅 (one-step spin coating) 공정은 $MAPbI_3$ 페로브스카이트 (Perovskite) 박막의 결정화가 우수하여 고효율 태양 전지 제작이 가능하다. 이 공정의 핵심은 솔벤트 증발 제어 공정을 사용하는 것인데, 이는 스핀 코팅 시 $MAPbI_3$ 의 용해도를 증가 시킬 수 있는 용매를 투입하는 (dripping) 방식이다. 본 연구에서 용매의 양, 투입속도 및 시간에 따라 생성되는 $MAPbI_3$의 특성을 분석하고, 이렇게 만들어진 박막을 이용한 태양 전지 특성을 조사하였다. $MAPbI_3$ 박막 형성을 위하여 lead iodide, methyl-ammonium iodide를 N,N-dimethylformamide에 녹이고, N,N-dimethyl sulfoxide를 첨가하여 용액을 만들었으며, 증발 제어 공정을 위한 용매로 diethyl ether (DE)를 사용하였다. DE의 투입 조건에 따라 $MAPbI_3$ 박막 형성 시 핵 생성에 차이가 생기고, 이는 $MAPbI_3$의 결정화, 밀도 및 표면 상태에 영향을 미치는 것으로 나타났으며, 이에 따라 태양 전지의 효율이 달라지는 것을 알 수 있었다. 0.7 mL의 DE의 양, 3.03 mL/sec 투입 속도, 7초(스핀 코팅 시작 후 투입시간)의 솔벤트 증발 제어 공정 결과 최대 13.74% 효율을 가지는 태양 전지 소자를 재현성 있게 관측할 수 있었다.

TRIZ 기법을 이용한 FDM방식 3D프린터 출력물의 휨 현상 개선에 관한 연구 (A Study on Warpage Reduction of FDM 3D Printer Output Using TRIZ Method)

  • 이송연;허용정;박종순
    • 반도체디스플레이기술학회지
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    • 제15권2호
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    • pp.1-5
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    • 2016
  • 3D printer is the equipment of the system for sequentially layer laminated in the materials. Now 3D printer used in various fields such as, semiconductor, electricity automobile, medical and various types of output method and material. In this paper, we studied about the improvement on warpage due to shrinkage of product from 3D printer of FDM(Fused Deposition Modeling) type, we proposed measures systematically to solve warpage problem using of 6SC(6 Step Creativity) method of practical TRIZ. After experimented with product prototypes experiment, we verified effect about solution.