• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.06a
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• pp.19-23
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• 2000

Stiction is an undesirable phenomenon that can be encountered often in Micro-Electro Mechanical Systems (MEMS) applications, In order to minimize this effect, Self-Assembled Monolayers (SAM) are commonly used. In this work the frictional characteristics of SAM are investigated using both micro-tribotester and SPM. It was found that the performance of SAM is quite sensitive to coating condition. The experimental results show promise for SAM to be used in sliding applications of micro systems.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.43-46
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• 2007

기존 사용되어온 절연막의 $SiO_2$의 절연특성이 신호의 간섭 등의 문제가 있어서 절연특성을 좋게 하기 위해 낮은 유전상수와 비결정질의 절연막을 요구하고 있다. 본 연구에서는 OTS를 이용하여 액상 상태에서 SAMs를 형성하였으며 FTIR을 이용한 결합구조의 변화를 살펴보았다. OTS 유기물의 함량을 0.1%에서부터 0.9%까지 다르게 혼합하여 희석시킨 유기화합물 용액에 따른 $650\;cm^{-1}$에서 $4000\;cm^{-1}$까지 전구간에 대한 FTIR 스펙트라를 보았다.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1273-1275
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• 2005

The influence of oxygen plasma and octadecyltrichlorosilane (OTS) treatment of $SiO_2$ on the patterning of poly(3,4-ethylenedioxythiophene)/poly(4-styrenesulfonate) (PEDOT:PSS) is presented. A significant difference in surface energies between plasma treated and OTS treated $SiO_2$ was noted. Such heterogeneous surface energy guides PEDOT:PSS to wet and spread on the wettable region and to dewet and retract from other regions.

• Journal of Adhesion and Interface
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• v.16 no.3
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• pp.116-121
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• 2015

In this study, octadecyltrichlorosilane (OTS) has been used to replace fluoro-silanes which are much more expensive than OTS. In order to improve the mechanical and adhesive properties of coating layers, inorganic binders were separately synthesized based on sol-gel reaction in acidic condition. Since the synthesized silica nanoparticles gave only nano-scaled roughness, superhydrophobicity is not well obtained. Here, we present a new simple approach by intentionally inducing particle aggregation in the solution which is controlled by adjusting solvent amount. With selecting suitable sizes of silica nanoparticles, superhydrophobic surfaces were obtained with increasing the amount of organic solvents after surface hydrophobization using OTS, and an extremely water-repellent behavior was observed with zero sliding angle. This superhydrophobicity was achived only for the dielectric constant lower than 25, regardless of the composition of solvent, meaning that the dielectric constant could be an excellent indicator for fabricating superhydrobic surfaces induced by particle aggregation in the solution.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.354-359
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• 2006

Recently, the interest in lithography without photo exposure has been increased compare to the conventional photolithography in nano meter and micrometer size patterning area. We studied a self aligned dipping of Ag solution through micro contact printing (${\mu}-CP$) with octadecyltrichlorosilane (OTS) treated polydimethylsiloxane (PDMS) soft mold. The OTS monolayer on the patterned PDMS was formed by dipping it into OTS solution. We transferred the OTS monolayer from PDMS mold to the glass. The OTS monolayer changed the surface energy from hydrophilic surface to hydrophobic surface, And then we made self aligned Ag solution patterns just after dipping the substrate, using adhesion difference of Ag solution between OTS treated hydrophobic area and non-OTS treated hydrophilic area. We finally get the Ag patterns through only dip-coating after the ${\mu}-CP$ process. And we observed surface energies on the glass substrate through the contact angle measurements as time goes on.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.6 s.348
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• pp.18-22
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• 2006

The inspection of surface properties under n-octadecyltrichlorosilane treated $SiO_2$ film was carried out by current-voltage characteristic and the scanning electron microscope. The voltage at zero current in low electric field is the lowest at 0.3 % OTS treated $SiO_2$ film with hybrid type. $SiO_2$ films changed from inorganic to hybrid or organic properties according to the increase of OTS content. OTS treated $SiO_2$ films with hybrid properties decreased the leakage currents, and the grain size of pentacene deposited sample was also the most small at the hybrid properties. The perpendicular generation of pentacene molecular was related with the surface of insulators. The surface with hybrid properties decreased the grain size, but that with inorganic or organic properties increased the grain size.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.512-515
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• 2002

The lubrication characteristics of SAM(self-assembled monolayer) have been investigated according to the change of surface group and surface temperature treatment with FDTS(1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM and OTS(octadecyltrichlorosilane) SAM in micro scale. From the experimental results, it was found that OTS SAM gets destroyed at $200^{\circ}C$ and stiction and fiction coefficient increased, but FDTS SAM was stable up to $400^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM is lower than that of FDTS SAM, but stiction is vice versa. This work shows the importance of surface group of self-assembled monolayer to control the lubrication characteristics and thermal stability.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.1
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• pp.240-247
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• 2003

The tribological characteristics of FDTS (1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM (self-assembled monolayer) and OTS (octadecyltrichlorosilane) SAM treated by high temperature annealing have been investigated from the viewpoint of stiction, adhesion and friction in micro/nano scale. From the experimental results, it was found that OTS SAM gets destroyed at 20$0^{\circ}C$ and stiction, adhesion and friction coefficient increased, but FDTS SAM was stable up to 40$0^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM below 20$0^{\circ}C$ is lower than that of FDTS SAM in micro/nano scale, but stiction and adhesion is vice versa. This work shows the importance of surface group of self-assembled monolayer in dictating the tribological characteristics and thermal stability.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1340_1341
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• 2009

In this report, high-resolution metal electrode patterning is demonstrated by using selective surface treatment and dip casting for low-cost printed electronic applications. On hydrophobic octadecyltrichlorosilane treated $SiO_2$ surface, deep UV irradiation was performed through a patterned quartz photomask to selectively control the surface energy of the $SiO_2$ layer. The deep UV irradiated region becomes hydrophilic and by dipping into Ag nano-ink, Ag patterns were formed on the surface. Using this patterning technique, line patterns and dot arrays having less than $10{\mu}m$ pitch were fabricated.

• Tribology and Lubricants
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• v.19 no.6
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• pp.329-334
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• 2003

The antiwear properties of amphiphilic monolayers and composite multilayer on silicon surface were investigated using micro­tribometer and Auger Electron Spectroscopy. Langmuir­Blodgett (LB) monolayers from behenic acid, 2,4­heneicosanedione(HD) and its lopper complex((HD)$_2$Cu) were fabricated on silicon surface and the composite multilayer of 5­bilayer of (HD)$_2$Cu was fabricated on the surface of octadecyltrichlorosilane (OTS) self­assembled monolayer (SAM). We observed that LB monolayers and the composite multilayer exhibited a steady and excellent friction response when compared with the OTS SAM. These LB mono and multilayer also showed much higher wear­resistance than the OTS SAM.