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InGaZnO active layer 두께에 따른 thin-film transistor 전기적인 영향

  • U, Chang-Ho;Kim, Yeong-Lee;An, Cheol-Hyeon;Kim, Dong-Chan;Gong, Bo-Hyeon;Bae, Yeong-Suk;Seo, Dong-Gyu;Jo, Hyeong-Gyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.5-5
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    • 2009
  • Thin-film-transistors (TFTs) that can be prepared at low temperatures have attracted much attention because of the great potential for transparent and flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited due to low field-effect mobility and rapid degradation after exposing to air. Alternative approach is the use of amorphous oxide semiconductors as a channel. Amorphous oxide semiconductors (AOSs) based TFTs showed the fast technological development, because AOS films can be fabricated at room temperature and exhibit the possibility in application like flexible display, electronic paper, and larges solar cells. Among the various AOSs, a-IGZO has lots of advantages because it has high channel mobility, uniform surface roughness and good transparency. [1] The high mobility is attributed to the overlap of spherical s-orbital of the heavy post-transition metal cations. This study demonstrated the effect of the variation in channel thickness from 30nm to 200nm on the TFT device performance. When the thickness was increased, turn-on voltage and subthreshold swing was decreased. The a-IGZO channels and source/drain metals were deposited with shadow mask. The a-IGZO channel layer was deposited on $SiO_2$/p-Si substrates by RF magnetron sputtering, where RF power is 150W. And working pressure is 3m Torr, at $O_2/Ar$ (2/28 sccm) atmosphere. The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. Finally, Al (150nm) as a gate metal was thermal-evaporated. TFT devices were heat-treated in a furnace at 250 $^{\circ}C$ and nitrogen atmosphere for 1hour. The electrical properties of the TFTs were measured using a probe-station. The TFT with channel thickness of 150nm exhibits a good subthreshold swing (SS) of 0.72 V/decade and on-off ratio of $1{\times}10^8$. The field effect mobility and threshold voltage were evaluated as 7.2 and 8 V, respectively.

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An Ecological Analysis of Lichens Distributed in Rocks of Coast and Field in U-do by Molecular Technique (분자생물학적 기법에 의한 우도해안과 노지암석에 분포하는 지의류의 생태학적 분석)

  • Gang, Hyeong-Il;Yun, Byeong-Jun;Kim, Seong-Hyeon;Sin, Deok-Ja;Kim, Hyeon-U;Heo, Jae-Seon;Gang, Ui-Seong;O, Gye-Heon;Go, Yeong-Jin
    • Microbiology and Biotechnology Letters
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    • v.32 no.4
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    • pp.334-340
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    • 2004
  • This study was initially performed to obtain fundamental data on lichen distribution depending on environmental condiLichens distributed on coastal rocks atleast 20 m far away from the coast were also investigated. Analyof morphological characteristics and rDNA ITS clones revealed that lichens containing 9 families and 15 genera were distributed in coastal rocks of V-do, while lichens containing 10 families and 14 genera were in field rocks, demonstrating little difference of diversity between both sites. Foliose lichens such as PhaeophysPhyscia, Pyxine belonging to the family Physciaceae were representatives distributed in coastal rocks of V-do, along with Xanthoparmelia belonging to Parmeliaceae, fruticose lichens such as Ramalina to Ramaliand crustose lichen Lecanora to Lecanoraceae. In contrast, foliose lichen Cladonia belonging to the family Cladoniaceae, fruitcose lichen Stereocaulon to Streocaulaceae, and crustose lichen Porpidia to Porpidwere found only on the surface of field rocks. Crustose lichens containing genera Caloplaca, CanDirinaria, Graphis, Rhizocarpon, and Pertusaria were rarely distributed in coastal rocks, and most of them were also found in field rocks.

Degradation of Fungicide Tolclofos-methyl by Chemical Treatment (살균제 Tolclofos-methyl의 화학적 처리에 의한 분해)

  • Shin, Kab-Sik;Jeon, Young-Hwan;Kim, Hyo-Young;Hwang, Jung-In;Lee, Sang-Man;Shin, Jae-Ho;Kim, Jang-Eok
    • Korean Journal of Environmental Agriculture
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    • v.29 no.4
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    • pp.396-401
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    • 2010
  • Tolclofos-methyl is one of the most widely used organophosphorous pesticides in control of soil-borne diseases in ginseng field. In Korea, residues of tolclofosmethyl in ginseng and cultivation soil is quite often detecting. The objective of this study was to know the possibility for the accelerated degradation of tolclofos-methyl by various chemical treatment under soil slurry condition. The degradation of tolclofos-methyl was accelerated by zerovalent metals treatment in soil slurry. The degradation rate of tolclofos-methyl was found to be at higher zerovalent zinc than unannealed zerovalent and annealed zerovalent iron. The effect of different sizes of zerovalent iron on tolclofos-methyl degradation was showed that the smaller size of zerovalent iron, the greater the degradation rate. In aqueous solution of pH 4.0 below the degradation rate of tolclofos-methyl was very high. Under this experimental condition, tolclofos-methyl degradation was the greatest at 2% (w/v) of ZVI under 0.1 N of HCl in 24 hours, the degradation rate was 94.4%. By testing various chemicals, it was found that $Fe_2(SO_4)_3$ as iron source showed better for degrading tolclofos-methyl in $H_2O_2$ 500 mM treatment and sodium sulfite also showed the degradable possibility tolclofos-methyl in soil slurry.

PECVD를 이용한 2차원 이황화몰리브데넘 박막의 저온합성법 개발

  • Kim, Hyeong-U;An, Chi-Seong;Arabale, Girish;Lee, Chang-Gu;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.274-274
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    • 2014
  • 금속칼코게나이드 화합물중 하나인 $MoS_2$는 초저 마찰계수의 금속성 윤활제로 널리 사용되고 있으며 흑연과 비슷한 판상 구조를 지니고 있어 기계적 박리법을 통한 그래핀의 발견 이후 2차원 박막 합성법에 대한 활발한 연구가 진행되고 있다. 최근 다양한 응용이 진행 중인 그래핀의 경우 높은 전자이동도, 기계적 강도, 유연성, 열전도도 등 뛰어난 물리적 특성을 지니고 있으나 zero-bandgap으로 인한 낮은 on/off ratio는 thin film transistor (TFT), 논리회로(logic circuit) 등 반도체 소자 응용에 한계가 있다. 하지만 $MoS_2$는 벌크상태에서 약 1.2 eV의 indirect band-gap을 지닌 반면 단일층의 경우 1.8 eV의 direct-bandgap을 나타내고 있다. 또한 단일층 $MoS_2$를 이용하여 $HfO_2/MoS_2/SiO_2$ 구조의 트랜지스터를 제작하였을 때 $200cm^2/v^{-1}s^{-1}$의 높은 mobility와 $10^8$ 이상의 on/off ratio 나타낸다는 연구가 보고되어 있어 박막형 트랜지스터 응용을 위한 신소재로 주목을 받고 있다. 한편 2차원 $MoS_2$ 박막을 합성하기 위한 대표적인 방법인 기계적 박리법의 경우 고품질의 단일층 $MoS_2$ 성장이 가능하지만 대면적 합성에 한계를 지니고 있으며 화학기상증착법(CVD)의 경우 공정 gas의 분해를 위한 높은 온도가 요구되므로 박막형 투명 트랜지스터 응용을 위한 플라스틱 기판으로의 in-situ 성장이 어렵기 때문에 이를 보완할 수 있는 $MoS_2$ 박막 합성 공정 개발이 필요하다. 특히 Plasma enhanced chemical vapor deposition (PECVD) 방법은 공정 gas가 전기적 에너지로 분해되어 chamber 내부에서 cold-plasma 형태로 존 재하기 때문에 박막의 저온성장 및 대면적 합성이 가능하며 고진공을 바탕으로 합성 중 발생하는 오염 요소를 효과적으로 제어할 수 있다. 본 연구에서는PECVD를 이용하여 plasma power, 공정압력, 공정 gas의 유량 등 다양한 공정 변수를 조절함으로써 저온, 저압 조건하에서의 $MoS_2$ 박막 성장 가능성을 확인하였으며 전구체로는 Mo 금속과 $H_2S$ gas를 사용하였다. 또한 향후 flexible 소자 응용을 위한 플라스틱 기판의 녹는점을 고려하여 공정 온도는 $300^{\circ}C$ 이하로 설정하였으며 합성된 $MoS_2$ 박막의 두께 및 화학적 구성은 Raman spectroscopy를 이용하여 확인 하였다. 공정온도 $200^{\circ}C$$150^{\circ}C$에서 성장한 $MoS_2$ 박막의 Raman peak의 경우 상대적으로 낮은 공정온도로 인하여 Mo와 H2S의 화학적 결합이 감소된 것을 관찰할 수 있었고 $300^{\circ}C$의 경우 약 $26{\sim}27cm^{-1}$의 Raman peak 간격을 통해 5~6층의 $MoS_2$ 박막이 형성 된 것을 확인할 수 있었다.

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Silver nanowires and nanodendrites synthesized by plasma discharge in solution for the catalytic oxygen reduction in alkaline media

  • Kim, Hoe-Geun;Song, Myeon-Gyu;Kim, Dong-U;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.62-62
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    • 2018
  • Pt is still considered as one of the most active electrocatalysts for ORR in alkaline fuel cells. However, the high cost and scarcity of Pt hamper the widespread commercialization of fuel cells. As a strong candidate for the replacement of Pt catalyst, silver (Ag) has been extensively studied due to its high activity, abundance, and low cost. Ag is more stable than Pt in the pH range of 8~14 as the equilibrium potential of Ag/Ag+ being ${\approx}200mV$ higher than that of Pt/PtO. However, Ag is the overall catalytic activity of Ag for oxygen reduction reaction(ORR) is still not comparable to Pt catalyst since the surface Ag atoms are approximately 10 times less active than Pt atoms. Therefore, further enhancement in the ORR activity of Ag catalysts is necessary to be competitive with current cutting-edge Pt-based catalysts. We demonstrate the architectural design of Ag catalysts, synthesized using plasma discharge in liquid phase, for enhanced ORR kinetics in alkaline media. An attractive feature of this work is that the plasma status controlled via electric-field could form the Ag nanowires or dendrites without any chemical agents. The plasma reactor was made of a Teflon vessel with an inner diameter of 80 mm and a height of 80 mm, where a pair of tungsten(W) electrodes with a diameter of 2 mm was placed horizontally. The stock solutions were made by dissolving the 5-mM AgNO3 in DI water. For the synthesis of Agnanowires, the electricfield of 3.6kVcm-1 in a 200-ml AgNO3 aqueous solution was applied across the electrodes using a bipolar pulsed power supply(Kurita, Seisakusyo Co. Ltd). The repetition rate and pulse width were fixed at 30kHz and 2.0 us, respectively. The plasma discharge was carried out for a fixed reaction time of 60 min. In case of Ag nanodendrites, the electric field of 32kVcm-1 in a 200-ml AgNO3 aqueous solution was applied and other conditions were identical to the plasma discharge in water in terms of electrode configuration, repetition rate and discharge time. Using SEM and STEM, morphology of Ag nanowires and dendrites were investigated. With 3.6 kV/cm, Ag nanowire was obtained, while Ag dendrite was constructed with 32 kV/cm. The average diameter and legth of Ag nanowireses were 50 nm and 3.5 um, and thoes values of Ag dendrites were 40 nm and 3.0 um. As a results of XPS analysis, the surface defects in the Ag nanowires facilitated O2 incorporation into the surface region via the interaction between the oxygen and the electron cloud of the adjacent Ag atoms. The catalytic activity of Ag for oxygen reduction reaction(ORR) showed that the catalytic ORR activity of Ag nanowires are much better than Ag nanodendrites, and electron transfer number of Ag nanowires is similar to that of Pt (${\approx}4$).

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II. Effect of Pathotype of Pathogens and the Use of Infected Straw on the Development of Kresek (한국에 있어서의 'Kresek'에 관한 연구 II. 균형 및 이병짚 시용이 Kresek 미치는 영향)

  • Choi Y. C.;Cho Y. S.;Chung B. J.
    • Korean journal of applied entomology
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    • v.17 no.1 s.34
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    • pp.23-28
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    • 1978
  • The study has been carried to confirm the pathotypes of Kresek inducing isolates of X. oryzae, and its reaction to the test plants when they were inoculated by the use of various methods. Induction of Kresek symptom by 23 isolates which randomly samplified from 123 Kresek areas through the country also were examined. The specificity of Pathotypes I, II, V in causing Kresek and the potenciality of infected rice straw is a first inoculum for Kresek epidemics in nature were tested. Fifteen out of 23 isolates from kresek area belonged to pathotype group I, while the rest of 8 isolates 5 howed group II reaction, and the most of isolates were originated from infected rice plant of Milyang #23. All of five pathotype groups were abled to produce 'Kresek' symptom although they showed some differences in each group of pathotype. The varieties Milyang #21, 22 and 23 were attacked by all isolates of group I, II and V while the Gogyoku group varieties including Yushin produced kresek symptom only by pathotype group II. Infected and dried straw maintained the pathogens during the winter period, and these straw acted as a first inoculum of Kresek disease when the straw were cutted and used as a manure just before transplanting of rice seedling.

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A Review on Ultimate Lateral Capacity Prediction of Rigid Drilled Shafts Installed in Sand (사질토에 설치된 강성현장타설말뚝의 극한수평지지력 예측에 관한 재고)

  • Cho Nam Jun;Kulhawy F.H
    • Journal of the Korean Geotechnical Society
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    • v.21 no.2
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    • pp.113-120
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    • 2005
  • An understanding of soil-structure interaction is the key to rational and economical design for laterally loaded drilled shafts. It is very difficult to formulate the ultimate lateral capacity into a general equation because of the inherent soil nonlincarity, nonhomogeneity, and complexity enhanced by the three dimensional and asymmetric nature of the problem though extensive research works on the behavior of deep foundations subjected to lateral loads have been conducted for several decades. This study reviews the four most well known methods (i.e., Reese, Broms, Hansen, and Davidson) among many design methods according to the specific site conditions, the drilled shaft geometric characteristics (D/B ratios), and the loading conditions. And the hyperbolic lateral capacities (H$_h$) interpreted by the hyperbolic transformation of the load-displacement curves obtained from model tests carried out as a part of this research have been compared with the ultimate lateral capacities (Hu) predicted by the four methods. The H$_u$ / H$_h$ ratios from Reese's and Hansen's methods are 0.966 and 1.015, respectively, which shows both the two methods yield results very close to the test results. Whereas the H$_u$ predicted by Davidson's method is larger than H$_h$ by about $30\%$, the C.0.V. of the predicted lateral capacities by Davidson is the smallest among the four. Broms' method, the simplest among the few methods, gives H$_u$ / H$_h$ : 0.896, which estimates the ultimate lateral capacity smaller than the others because some other resisting sources against lateral loading are neglected in this method. But it results in one of the most reliable methods with the smallest S.D. in predicting the ultimate lateral capacity. Conclusively, none of the four can be superior to the others in a sense of the accuracy of predicting the ultimate lateral capacity. Also, regardless of how sophisticated or complicated the calculating procedures are, the reliability in the lateral capacity predictions seems to be a different issue.

Annealed effect on the Optical and Electrical characteristic of a-IGZO thin films transistor.

  • Kim, Jong-U;Choe, Won-Guk;Ju, Byeong-Gwon;Lee, Jeon-Guk
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2010.05a
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    • pp.53.2-53.2
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    • 2010
  • 지금까지 능동 구동 디스플레이의 TFT backplane에 사용하고 있는 채널 물질로는 수소화된 비정질 실리콘(a-Si:H)과 저온 폴리실리콘(low temperature poly-Si)이 대표적이다. 수소화된 비정질 실리콘은 TFT-LCD 제조에 주로 사용되는 물질로 제조 공정이 비교적 간단하고 안정적이며, 생산 비용이 낮고, 소자 간 특성이 균일하여 대면적 디스플레이 제조에 유리하다. 그러나 a-Si:H TFT의 이동도(mobility)가 1 cm2/Vs이하로 낮아 Full HD 이상의 대화면, 고해상도, 고속 동작을 요구하는 UD(ultra definition)급 디스플레이를 개발하는데 있어 한계 상황에 다다르고 있다. 또한 광 누설 전류(photo leakage current)의 발생을 억제하기 위해서 화소의 개구율(aperture ratio)을 감소시켜야하므로 패널의 투과율이 저하되고, 게이트 전극에 지속적으로 바이어스를 인가 시 TFT의 문턱전압(threshold voltage)이 열화되는 문제점을 가지고 있다. 문제점을 극복하기 위한 대안으로 근래 투명 산화물 반도체(transparent oxide semiconductor)가 많은 관심을 얻고 있다. 투명 산화물 반도체는 3 eV 이상의 높은 밴드갭(band-gap)을 가지고 있어 광 흡수도가 낮아 투명하고, 광 누설 전류의 영향이 작아 화소 설계시 유리하다. 최근 다양한 조성의 산화물 반도체들이 TFT 채널 층으로의 적용을 목적으로 활발하게 연구되고 있으며 ZnO, SnO2, In2O3, IGO(indium-gallium oxide), a-ZTO(amorphous zinc-tin-oxide), a-IZO (amorphous indium-zinc oxide), a-IGZO(amorphous indium-galliumzinc oxide) 등이 그 예이다. 이들은 상온 또는 $200^{\circ}C$ 이하의 낮은 온도에서 PLD(pulsed laser deposition)나 스퍼터링(sputtering)과 같은 물리적 기상 증착법(physical vapor deposition)으로 손쉽게 증착이 가능하다. 특히 이중에서도 a-IGZO는 비정질임에도 불구하고 이동도가 $10\;cm2/V{\cdot}s$ 정도로 a-Si:H에 비해 월등히 높은 이동도를 나타낸다. 이와 같이 a-IGZO는 비정질이 가지는 균일한 특성과 양호한 이동도로 인하여 대화면, 고속, 고화질의 평판 디스플레이용 TFT 제작에 적합하고, 뿐만 아니라 공정 온도가 낮은 장점으로 인해 플렉시블 디스플레이(flexible display)의 backplane 소재로서도 연구되고 있다. 본 실험에서는 rf sputtering을 이용하여 증착한 a-IGZO 박막에 대하여 열처리 조건 변화에 따른 a-IGZO 박막들의 광학적, 전기적 특성변화를 살펴보았고, 이와 더불어 a-IGZO 박막을 TFT에 적용하여 소자의 특성을 분석함으로써, 열처리에 따른 Transfer Curve에서의 우리가 요구하는 Threshold Voltage(Vth)의 변화를 관찰하였다.

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Antioxidant and Cytotoxicity Effects of Luteolin

  • Park Jin-Ny;Kang Kyoung-Ah;Zhang Rui;Piao Mei Jing;Park So-Yoon;Kim Ju-Sun;Kang Sam-Sik;Hyun Jin-Won
    • Toxicological Research
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    • v.22 no.4
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    • pp.391-395
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    • 2006
  • Flavonoids are polyphenolic compounds that are ubiquitous in plants. They have been shown to possess a variety of biological activities, such as antioxidant and anticancer. Reactive oxygen species (ROS) lead to damages of cellular molecules and it is the one of various factors to induce cancer. The one of flavonoids, Luteolin, was found to scavenge 1,1-diphenyl-2-piculhydrazyl (DPPH) radical and intracellular reactive oxygen species (ROS). Moreover luteolin showed protection on hamster lung fibroblast cells (V79-4 cell) damage induced by $H_2O_2$. And then it was investigated whether it may show cytotoxicity effect against various cancer cells by MTT, Luteolin at $10{\mu}g/ml$ showed the cell viability of 63.2%, 34.7%, 18.4% and 71.4% against NCl-H460, HeLa, U937 and MCF-7, respectively. As a result, luteolin shows more sensitive to U937 cells among the tested cancer cell lines. In summary, luteolin has antioxidant and cytotoxicity effect or various cancer cell lines.

페로브스카이트 광흡수층을 활용한 고성능 MoS2 기반 광검출기 구현

  • O, Ae-Ri;Sim, Jae-U;Park, Jin-Hong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.199.2-199.2
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    • 2015
  • 전이금속 칼코겐화합물(TMD)은 2차원 박막 물질로, 그래핀과 함께 차세대 사물인터넷에 적용할 수 있는 전자소자의 소재로 활용될 것으로 기대되고 있다. 특히 TMD는 그래핀과 다르게 1.2 eV 이상의 넓은 밴드갭을 지녀, 기존 실리콘 기반 반도체 소자를 대체할 차세대 물질로 각광받고 있다. TMD는 또한 실리콘 등의 3차원 반도체보다 광전효율이 뛰어나며, 이를 활용한 광전소자의 개발 및 연구가 활발히 진행되고 있다. 그러나 TMD는 그 두께가 나노미터 단위로 매우 얇아 광흡수율이 매우 떨어지는 단점이 있다. 우리는 이러한 TMD 기반 광전소자의 광흡수율을 향상시키기 위해 광전효율이 매우 뛰어난 페로브스카이트(Perovskite)를 TMD 채널 위에 덮음으로써, 이종접합 광전소자를 구현하였다. TMD 물질은 이황화 몰리브데넘($MoS_2$)을 선택하였으며, 광흡수층으로 선택한 페로브스카이트는 $MAPbI_3$을 스핀 코팅을 통해 TMD 채널 층에 접합하였다. 우리는 Photoluminescence 및 UV-Vis 측정을 통해 페로브스카이트 및 페로브스카이트/$MoS_2$ 층의 광특성을 측정하여 페로브스카이트에서 생성된 광캐리어가 확산되어 $MoS_2$에 전달되는 것을 확인하였다. 우리는 추가로 4가지 서로 다른 파장대의 레이저(520, 655, 785, 850 nm)를 이용하여 페로브스카이트 광흡수층이 있을 때와 없을 때의 $MoS_2$ 광검출기의 성능 변화를 관찰하였다.

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