• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.19-22
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• 2009

A non-vacuum process for fabrication of $CuIn_xGa_{1-x}Se_2$ (CIGS) absorber layer from the corresponing Cu, In, Ga solution precursors was described. Cu, In, Ga precursor solution was prepared by a room temperature colloidal route by reacting the starting materials $Cu(NO_3)_2$, $InCl_3$, $Ga(NO_3)$ and methanol. The Cu, In, Ga precursor solution was mixed with ethylcellulose as organic binder material for the rheology of the mixture to be adjusted for the doctor blade method. After depositing the mixture of Cu, In, Ga solution with binder on Mo/glass substrate, the samples were preheated on the hot plate in air to evaporate remaining solvents and to burn the organic binder material. Subsequently, the resultant CIG/Mo/glass sample was selenized in Se evaporation in order to get a solar cell applicable dense CIGS absorber layer. The CIGS absorber layer selenized at $530^{\circ}C$ substrate temperature for 1h with various metal organic ratio.

• Journal of the Korean Vacuum Society
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• v.4 no.S2
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• pp.106-114
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• 1995

Direct implantation of metallic ion species has been employed in surface processing of industrial components and tools with very encouraging improvements in recent years. In spite of high technicla effectiveness, this new surface processing technique has not been extensively accepted by industries mainly because of high cost(capital and operating) compared with other competitive surface processing techniques. High current and large implantation area with eliminating the mass analyzer and the beam-scanning unit make metal vapor vacuum are(MEVVA)source ion implantation versatile, simple and cheap to operate and well suited to commercial surface processing. In this paper, the recent development of MEVVA source ion implantation technique ar Beijing Normal University has been reviewed and the results of production trials of several industrial components and tools implanted by MEVVA source ion implantation have been presented and discussed.

• 한국신재생에너지학회:학술대회논문집
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• 2006.06a
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• pp.222-224
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• 2006

A non-vacuum process for $Cu(In,Ga)Se_2$ (CIGS) thin film solar cells from nanoparticle precursors was described in this work CIGS nanoparticle precursors was prepared by a low temperature colloidal route by reacting the starting materials $(CuI,\;InI_3,\;GaI_3\;and\;Na_2Se)$ in organic solvents, by which fine CIGS nanoparticles of about 20nm in diameter were obtained. The nanoparticle precursors were mixed with organic binder material for the rheology of the mixture to be adjusted for the doctor blade method. After depositing the mixture of CIGS with binder on Mo/glass substrate, the samples were preheated on the hot plate in air to evaporate remaining solvents ud to burn the organic binder material. Subsequently, the resultant (porous) CIGS/Mo/glass simple was selenized in a two-zone Rapid Thermal Process (RTP) furnace in order to get a solar ceil applicable dense CIGS absorber layer. Complete solar cell structure was obtained by depositing. The other layers including CdS buffer layer, ZnO window layer and Al electrodes by conventional methods. The resultant solar cell showed a conversion efficiency of 0.5%.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.494-494
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• 2013

Atmospheric pressure non-thermal plasma of the needle-typed interaction with aqueous solutions has received increasing attention for their biomedical applications [1]. In this context, surface discharges at bio-solutions were investigated experimentally. We have generated the non-thermal plasma jet bombarding the bio-solution surface by using an Ar gas flow and investigated the emission lines by OES (optical emission spectroscopy) [2]. Moreover, The non-thermal plasma interaction with bio-solutions has received increasing attention for their biomedical applications. So we researched, the OH radical density of various biological solutions in the surface by non-thermal plasma were investigated by Ar gases. The OH radical density of DI water; deionized water, DMEM Dulbecco's modified eagle medium, and PBS; 1x phosphate buffered saline by non-thermal plasma jet. It is noted that the OH radical density of DI water and DMEM are measured to be about $4.33{\times}1016cm-3$ and $2.18{\times}1016cm-3$, respectively, under Ar gas flow 250 sccm (standard cubic centimeter per minute) in this experiment. The OH radical density of buffer solution such as PBS has also been investigated and measured to be value of about $2.18{\times}1016cm-3$ by the ultraviolet optical absorption spectroscopy.

• Electrical & Electronic Materials
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• v.9 no.5
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• pp.476-482
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• 1996

The multi-dielectric layer SiO$_{2}$/Si$_{3}$N$_{4}$/SiO$_{2}$(ONO) is used to improve electrical capacitance and to scale down the memory device. In this paper, improvement of the capacitance by reducing the bottom oxide thickness in the nitride deposition with load lock(L/L) vacuum system is studied. Bottom oxide thickness under the nitride layer is measured by ellipsometer both in L/L and non-L/L systems. Both results are in the range of 3-10.angs. and 10-15.angs., respectively, independent of the nitride and top oxide thickness. Effective thickness and cell capacitance for SONOS capacitor are in the range of 50-52.angs. and 35-37fF respectively in the case of nitride 70.angs. in L/L vacuum system. Compared with non-L/L system, the bottom oxide thickness in the case of L/L system decreases while cell capacitance increases about 4 fF. The results obtained in this study are also applicable to ONO scaling in the thin bottom oxide region of memory stacked capacitor.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.370.1-370.1
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• 2016

Volatile organic compounds (VOCs) are considered hazardous air pollutants and these are emitted from building materials and household products. VOCs can cause global warming as well as human sickness, and even cancer. Photocatalysis provides a way of converting VOCs into harmless materials. Various researches have shown that $TiO_2$ is the most efficient photocatalysts due to its excellent activity. In this study, metal/non-metal doped $TiO_2$ particles are synthesized for the enhancement of the photocatalytic properties of pure $TiO_2$. By metal/non-metal doping, band gap energies of prepared samples were analyzed by UV/Visible spectrophotometer. The physical and chemical properties of synthesized powder were characterized by field emission scanning electron microscope, by BET for measuring their specific surface area, and by XRD for phase identification and particle size determination. Degradation ability for p-xylene was evaluated through monitoring the concentration in a closed chamber. Relation between their properties and decomposition abilities for VOC were evaluated based on the experimental results.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.312-320
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• 2001

A Non-Evaporable Getter(NEG) pump was fabricated using Zr-V-Fe alloy modules to obtain $10^{-9}$ Pa range pressures. Pumping performances and activation characteristics were investigated and the pumping speeds for hydrogen, deuterium and carbon monoxide gases of the NEG pump were measured. And hydrogen desorption characteristics were examined during activation at $450^{\circ}C$. Futhermore the vacuum performance was compared with those of other high vacuum pumps as turbo-molecular pump, sputter-ion pump, and cryo pump by analyzing the residual gases of the system.

• Transactions of Materials Processing
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• v.20 no.3
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• pp.250-256
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• 2011

Vacuum-assisted thermoforming is one of the critical steps for the successful application of film insert molding(FIM) to parts of complex shapes. If the thickness distribution of the formed film is non-uniform, cracking, deformation, warping, and wrinkling can easily occur at the injection molding stage. In this study, the effects of processing parameters, which include the film heating time, plug depth, plug speed and vacuum delay time, on film thickness distribution were investigated. It was found that the film thickness at the part sidewall decreases with increasing the film heating time and plug depth, but the thickness at the bottom was found to exhibit the opposite behavior. The film thickness of the sidewall was observed to increase at higher plug speed and vacuum delay time of 0 ~ 0.3sec.

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.101-102
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• 2008

SF6 widely used as insulating gas is rising as the environment problem. For decreasing this greenhouse gas, electrical breakdown characteristics of vacuum with air are studied in non-uniform field. The gap of needle to plane was 0.5mm. The pressure of vacuum the range of 10^-4${\sim}$10^-5torr. The diameter of a plane made of the stainless steel is 150mm. As a result of the experiment, the breakdown voltage is increased about degree of vacuum increased. The electrode material influenced breakdown voltage in vacuum.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.366-367
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• 2008

SF6 widely used as insulating gas is rising as the environment problem. For decreasing this greenhouse gas, electrical breakdown characteristics of vacuum with air are studied in non-uniform field. The gap of needle to plane was 0.5mm, 0.8mm. The pressure of vacuum the range of 10^-4-10^-5torr. The diameter of a plane made of the stainless steel is150mm. As a result of the experiment, the breakdown voltage is increased about electrode gap distance increased. The electrode material influenced breakdown voltage in vacuum.