Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

SURFACE PROCESSING OF TOOLS AND COMPONENTS BY MEVVA SOURCE ION IMPLANTATION

  • Lin, W.L. (Institute of Low Energy Nuclear Physics, Beijing Normal University) ;
  • Sang, J.M. (Beijing General Research Institute of Non-Ferrous Metals) ;
  • Ding, X.J. (Beijing General Research Institute of Non-Ferrous Metals) ;
  • Yuan, X.M. (Institute of Low Energy Nuclear Physics, Beijing Normal University) ;
  • Xu, J. (Beijing General Research Institute of Non-Ferrous Metals) ;
  • Zhang, H.X. (Institute of Low Energy Nuclear Physics, Beijing Normal University) ;
  • Zhang, X.J. (Institute of Low Energy Nuclear Physics, Beijing Normal University)
  • Published : 1995.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Direct implantation of metallic ion species has been employed in surface processing of industrial components and tools with very encouraging improvements in recent years. In spite of high technicla effectiveness, this new surface processing technique has not been extensively accepted by industries mainly because of high cost(capital and operating) compared with other competitive surface processing techniques. High current and large implantation area with eliminating the mass analyzer and the beam-scanning unit make metal vapor vacuum are(MEVVA)source ion implantation versatile, simple and cheap to operate and well suited to commercial surface processing. In this paper, the recent development of MEVVA source ion implantation technique ar Beijing Normal University has been reviewed and the results of production trials of several industrial components and tools implanted by MEVVA source ion implantation have been presented and discussed.

Keywords