• Title/Summary/Keyword: Nitridation rate

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출발 SiC 입자 크기가 Si3N4-Bonded SiC 세라믹스의 질화율과 강도에 미치는 영향 (Effect of Starting SiC Particle Size on Nitridation and Strength of Silicon Nitride-Bonded Silicon Carbide Ceramics)

  • 최영훈;김영욱;우상국;한인섭
    • 한국세라믹학회지
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    • 제47권2호
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    • pp.157-162
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    • 2010
  • Effect of starting SiC particle size on nitridation rate and flexural strength of $Si_3N_4$-bonded-SiC (SNBSC) ceramics was investigated by using SiC particles of different size (${\sim}200\;{\mu}m$, ${\sim}100\;{\mu}m$ and ${\sim}45\;{\mu}m$). The specimen prepared from smaller SiC particles resulted in higher nitridation rate after nitridation at $1450^{\circ}C$, owing to the lower packing density in green body. The flexural strength showed maxima after 1-h nitridation for all specimens and then decreased with prolonged nitridation because of local densification-induced pore coarsening. The specimen prepared from smaller SiC particles showed better flexural strength because of smaller pore size and partly higher nitridation rate in the specimen. A maximal flexural strength of 29 MPa was obtained in the specimen with a density of $2.04\;g{\cdot}cm^3$, which was prepared from $45\;{\mu}m$-SiC particles.

The Effect of Processing Variables and Composition on the Nitridation Behavior of Silicon Powder Compact

  • Park, Young-Jo;Lim, Hyung-Woo;Choi, Eugene;Kim, Hai-Doo
    • 한국세라믹학회지
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    • 제43권8호
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    • pp.472-478
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    • 2006
  • The effect of compositional and processing variables on a nitriding reaction of silicon powder compact and subsequent post sintering of RBSN (Reaction-Bonded Silicon Nitride) was investigated. The addition of a nitriding agent enhanced nitridation rate substantially at low temperatures, while the formation of a liquid phase between the nitriding agent and the sintering additives at a high temperature caused a negative catalyst effect resulting in a decreased nitridation rate. A liquid phase formed by solely an additive, however, was found to have no effect on nitridation for the additive amount used in this research. The original site of a decomposing pore former was loosely filled by a reaction product ($Si_3N_4$), which provided a specimen with nitriding gas passage. For SRBSN (Sintered RBSN) specimens of high porosity, only a marginal dimensional change was measured after post sintering. Its engineering implication for near-net shaping ability is discussed.

알루미나 수화물로부터 탄소환원질화법에 의한 질화알루미늄 분말의 합성 (Synthesis of Aluminum Nitride Powder from Aluminum Hydroxide by Carbothermal Reduction-Nitridation)

  • 황진명;정원중;최상욱
    • 한국세라믹학회지
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    • 제31권8호
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    • pp.893-901
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    • 1994
  • In this study, AlN powder of fine particle size and of high purity was synthesized by the carbothermal reduction-nitridation of monodisperse, spherical Al(OH)3 which had been prepared by sol-gel method using Al(O-sec-C4H9)3 as the starting material. Depending on the mixing order and kinds of reducing agents, the optimum condition for the preparation of AlN was determined as follows. AlN single-phase was produced by the carbothermal reduction-nitridation of (1) Benzene-washed Al(OH)3 and the reducing agent, carbon, which was mixed in a ball mill: for 5 hours at 140$0^{\circ}C$ under NH3 atmosphere; (2) The mixture prepared by hydrolysis of alkoxide solution into which carbon had been dispersed beforehand: for 5 hours at 135$0^{\circ}C$ ; (3) Al(OH)3 Poly(furfuryl alcohol) composite powder: for 2.5 hours at 135$0^{\circ}C$; (4) The mixture of Al(OH)3 and polyacrylonitrile: for 5 hours at 140$0^{\circ}C$. Addition of CaF2 increased the nitridation rate when carbon or polyacrylonitrile was used as the reducing agent; but it had no effect on the nitridation rate when furfuryl alcohol was used as the reducing agent.

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HVPE 법을 활용한 GaN 성장 시 질화처리에 관한 연구 (A study on the nitridation of GaN crystal growth by HVPE method)

  • 이승훈;이주형;이희애;오누리;이성철;강효상;이성국;양재득;박재화
    • 한국결정성장학회지
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    • 제29권4호
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    • pp.149-153
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    • 2019
  • HVPE는 GaN 단결정의 제조 방법 중 하나로 빠른 성장 속도가 장점인 상업적으로 널리 사용되는 성장 방법이다. HVPE 법에 의한 GaN 단결정 성장은 여러 공정으로 이루어지며, 특히 GaN 성장 전 기판의 질화 처리는 성장되는 GaN 단결정 품질에 상당한 영향을 미친다. 본 연구에서는 사파이어 기판 위에 GaN 단결정 성장 시 기판의 질화처리가 성장되는 GaN 단결정 품질에 미치는 영향을 알아보고자 하였다. 질화 처리를 제외한 다른 성장 조건은 동일하게 하였고 질화처리 시 기판에 공급되는 가스 유량을 다양하게 변화시킨 후 GaN 박막을 성장시키고, 성장된 GaN의 표면 특성평가를 통하여, HVPE 법에서의 질화처리 효과를 고찰하여 보고자 하였다.

질화규소의 반응조건에 따른 미세구조 변화 (Microstructure Study on $Si_3N_4$ Formed by Various Nitridation Condition)

  • 전계남;김종희
    • 한국세라믹학회지
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    • 제21권3호
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    • pp.253-258
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    • 1984
  • This paper deals with the reaction-bonded silicon nitride I terms of its microstructural development during nitrida-tion. Silicon powder compacts were reacted with nitrogen at 1185$^{\circ}C$ and 13$65^{\circ}C$ according to the nitriding schedule. Microstructures of nitrided specimens were examined by means of optical and scanning electron microscope to discuss the nitridation or microstructural development at initial and intermediat stage of nitridation. Reaction products were also analysed by X-ray diffraction method at each stage of nitridation. The results indicate that ho-mogeneous and uniform microstructure with find porosity can be obtained only under the reaction condition. such as slow and relatively constant reaction rate with time.

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AlN 분말합성에 있어서 LiF와 BaF$_2$ 첨가효과 (Effect of LiF and BaF2 Addition on Synthesis of AlN Powder)

  • 최병현;이창송;신태수;이종민
    • 한국세라믹학회지
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    • 제28권8호
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    • pp.647-653
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    • 1991
  • In order to synthesize fine AlN powder by the direct nitridation of Aluminum metal power added LiF and BaF2 as additives was heated at 150$0^{\circ}C$ for 3 hrs. in nitrogen gas with flow rate of 20 mι/sec. Additives are promoted the nitridation by prevented the aggromerate of powders when 3% LiF and 2% BaF2 were added to Al metal powder. Rate of nitridation was about 100% and average size of AlN powders were very fine such as 0.3 ${\mu}{\textrm}{m}$. Specific surface area of synthesized AlN powder was 3.95$m^2$/g and also O2 and N2 contents were 2.595% and 33.25%, respectively.

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바나디움 산화물의 환원 및 질화반응으로부터 얻어진 바나디움 산화질화물의 제조, 특성분석 및 암모니아 분해반응에서의 촉매 활성 (Synthesis, Characterization and Ammonia Decomposition Reaction Activity of Vanadium Oxynitride Obtained from the Reduction/Nitridation of Vanadium Oxide)

  • 윤경희;신채호
    • Korean Chemical Engineering Research
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    • 제60권4호
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    • pp.620-629
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    • 2022
  • 가열 속도, 몰 공간속도, 질화반응온도 등 다양한 실험 조건을 변화하며 바나디움 산화물과 암모니아와의 승온 질화반응을 통하여 바나디움 산화질화물을 제조하여 특성분석을 수행하였으며 제조된 바나디움 산화질화물 상에서 암모니아 분해반응의 촉매 활성을 검토하였다. 제조된 촉매의 물리·화학적 특성을 알아보기 위하여 N2 흡착분석, X-선 회절분석(XRD), 수소 승온환원(H2-TPR), 산소 존재 하 승온산화 (TPO), 암모니아 탈착 (NH3-TPD), 투과전자현미경(TEM) 분석을 수행하였다. 340 ℃에서 5 m2 g-1의 낮은 비표면적을 갖는 V2O5의 환원에 의하여 V2O3 으로의 변환은 미세 기공 형성에 의해 115 m2 g-1 높은 비표면적 값을 보여주었으며 그 이상의 질화반응 온도가 증가함에 따라 소결현상에 의해 지속적인 비표면적의 감소를 초래하였다. 비표면적에 가장 큰 영향을 미치는 질화반응 변수는 반응온도였으며, 단일 상의 VNxOy의 x + y 값은 질화반응온도가 증가함에 따라 1.5에서 1.0으로 근접하였으며 680 ℃의 높은 반응온도에서 입방 격자상수 a는 VN 값에 근접하였다. 본 실험 조건 중에 질화반응온도가 가장 높았던 680 ℃에서 암모니아 전환율은 93%로 나타났으며 비활성화는 관찰되지 않았다.

규소의 질화반응에 있어 산화마그네시움의 효과 (Effect of Magnesium Oxide on the Nitridation of Silicon Compact.)

  • 박금철;최상원
    • 한국세라믹학회지
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    • 제20권4호
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    • pp.305-314
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    • 1983
  • In order to enhance the rate of th nitridation and to give the high density of reaction-bonded silicon nitride MgO powder as nitriding aid were added to silicon powders and the mixture was pressed isostatically into compacts which were nitrided in the furnace of 1, 35$0^{\circ}C$ where 95% $N_2$-5% $H_2$ gases were flowing. As the other nitriding aid $Mg(NO_3)_2 6H_2O$ was selected, A slip made of magnesium nitrate solution and fine silicon particles was spray-dried and then decomposed at 30$0^{\circ}C$. Magnesium oxide-coated silicon powders were formed into compacts prior to the nitridation on the same condition as the former. Magnesium nitrate (MgO, produced from the decomposition of magnesium nitrate) was more effective for the formation of the $\beta$-phase in the initial stage of the nitridation probably due to the easy formation of $MgO-SiO_2$-metal oxide eutectic melt. It has been confirmed that forsterite was formed as a result of the reaction between MgO and $SiO_2$ film of silicon surface. It was considered that MgO produced from magnesium nitrate may be finer more reactive and more uniformly distributed on the surface of silicon particles than original MgO. The higher the forming pressure was the more the $\beta$-phase was formed.

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금속티타늄분말의 질화반응과 산화반응에 관한 연구 (A Study on Nitridation and Oxidation Reaction of Titanium Powder)

  • 이영기;손용운;조영수;김용석;김석윤
    • 열처리공학회지
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    • 제8권2호
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    • pp.137-148
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    • 1995
  • The nitridation kinetics of titanium powder were studied by isothermal and non-isothermal (dynamic) methods in high purity nitrogen under I atm pressure. For the comparison with nitridation, the oxidation kinetics of titanium powder were also studied in dry oxygen at I atm pressure. An automatic recording electrobalance was used to measure the weight gain as a function of time and temperature. For the reaction with nitrogen, the nitride was formed at over $700^{\circ}C$. The reaction with nitrogen followed the parabolic rate law, and the activation energy was calculated to be 31 kcal/mol in the isothermal method (above $900^{\circ}C$). The non-stoichiometric TiNx has been synthesized by the nitridation at a proper temperature and time, followed by the homogenizing treatment above $1100^{\circ}C$. In comparison with the stoichiometric $TiN_{1.0}$ and the non-stoichiometric TiNx ($TiN_{0.5}$ and $TiN_{0.65}$), the hot oxidation characteristics of the former is superior to that of the latter. However, both non-stoichiometric nitrides make little difference in the hot oxidation characteristics.

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탄소환원질화법에 의한 AlN 합성의 속도론적 연구 (Kinetic Study of Synthesis of Aluminum Nitride Using Carbon Reduction and Subsequent Nitridation Method)

  • 박형규;최영윤;남철우
    • 자원리싸이클링
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    • 제26권3호
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    • pp.39-46
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    • 2017
  • 탄소환원질화법을 이용하여 질화알루미늄(Aluminum Nitride: AlN)을 제조하는 연구를 실험실 규모로 수행하였다. 고품위 알루미나 분말과 탄소(carbon black)를 배합하여 흑연 도가니에 장입하고, 노내 분위기를 진공으로 한 다음 질소 가스를 흘려주어 온도($1,600{\sim}1,700^{\circ}C$), 시간(0.5~6 hr), $N_2$유량($4.7{\times}10^{-6}{\sim}20{\times}10^{-6}m^3/sec$), 장입 시료층 높이(0.5~20 mm)를 변화시키면서 AlN을 합성하였다. 실험결과, 고순도 알루미나와 탄소 혼합물을 질소 분위기의 $1600{\sim}1700^{\circ}C$ 온도 범위에서 반응시킬 때 반응 온도가 높을수록 생성된 AlN의 1차 입자 크기가 커지고, 반응 활성화 에너지는 382 kJ/mol로 화학 반응이 율속 단계로 판단되었다. 시험 제조한 AlN들의 산소 함량은 0.71~0.96 wt%였고, 질소는 30.7~35.1 wt%로서 상용 제품과 근접한 결과를 나타내었다.