• Title/Summary/Keyword: Ni-SiC

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Simultaneous Formation of NiSi Contact and Cu Plug/Ti Barrier (NiSi 접촉과 Cu 플러그/Ti 확산방지층의 동시 형성 연구)

  • Bae, Kyoo-Sik
    • Korean Journal of Materials Research
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    • v.20 no.6
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    • pp.338-343
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    • 2010
  • As an alternative to the W plug used in MOSFETs, a Cu plug with a NiSi contact using Ta / TaN as a diffusion barrier is currently being considered. Conventionally, Ni was first deposited and then NiSi was formed, followed by the barrier and Cu deposition. In this study, Ti was employed as a barrier material and simultaneous formation of the NiSi contact and Cu plug / Ti barrier was attempted. Cu(100 nm) / Ti / Ni(20 nm) with varying Ti thicknesses were deposited on a Si substrate and annealed at $4000^{\circ}C$ for 30 min. For comparison, Cu/Ti/NiSi thin films were also formed by the conventional method. Optical Microscopy (OM), Scanning Probe Microscopy (SPM), X-Ray Diffractometry (XRD), and Auger Electron Microscopy (AES) analysis were performed to characterize the inter-diffusion properties. For a Ti interlayer thicker than 50 nm, the NiSi formation was incomplete, although Cu diffusion was inhibited by the Ti barrier. For a Ti thickness of 20 nm and less, an almost stoichiometric NiSi contact along with the Cu plug and Ti barrier layers was formed. The results were comparable to that formed by the conventional method and showed that this alternative process has potential as a formation process for the Cu plug/Ti barrier/NiSi contact system.

Synthesis of NiO and TiO2 Combined SiC Matrix Nanocomposite and Its Photocatalytic MB Degradation

  • Zambaga, Otgonbayar;Jun Hyeok, Choi;Jo Eun, Kim;Byung Jin, Park;Won-Chun, Oh
    • Korean Journal of Materials Research
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    • v.32 no.11
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    • pp.458-465
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    • 2022
  • Interest in the use of semiconductor-based photocatalyst materials for the degradation of organic pollutants in a liquid phase has grown, due to their excellent performance and response to the light source. Herein, we fabricated a NiO-SiC-TiO2 ternary structured photocatalyst which had reduced bandgap energy, with strong activation under UV-light irradiation. The synthesized samples were examined using XRD, SEM, EDX, TEM, DRS, EIS techniques and photocurrent measurement. The results confirmed that the two types of metal oxides were well bonded to the SiC fiber surface. The junction of the new photocatalyst exhibited a large number of photoexcited electrons and holes. The holes tended to oxidize the water and form a hydroxyl radical, which promoted the decomposition of methylene blue. The close contact between the 2D SiC fiber and metal oxide semiconductors expanded the scope of absorption wavelength, and enhanced the usability of the ternary photocatalyst for the degradation of methylene blue. Among three synthesized samples, the NiO-SiC-TiO2 showed the best photocatalytic effect, and was considered to have excellent photoelectron transfer due to the synergy effect between the metal oxide and SiC.

Effect of Added B4C on the Mechanical Properties of WC/Ni-Si Hardmetal (WC/Ni-Si 초경합금의 기계적 성질에 미치는 B4C의 영향)

  • Lee, Gil-Geun;Ha, Gook-Hyun
    • Journal of Powder Materials
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    • v.20 no.5
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    • pp.366-370
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    • 2013
  • The effects of $B_4C$ on the mechanical properties of WC/Ni-Si hardmetal were analyzed using sintered bodies comprising WC(70-x wt.%), Ni (28.5 wt.%), Si (1.5 wt.%), and $B_4C$ (x wt.%), where $$0{\leq_-}x{\leq_-}1.2$$ wt.%. Samples were prepared by a combination of mechanical milling and liquid-phase sintering. Phase and microstructure characterizations were conducted using X-ray diffractometry, scanning electron microscopy, and electron probe X-ray micro analysis. The mechanical properties of the sintered bodies were evaluated by measuring their hardness and transverse rupture strength. The addition of $B_4C$ improved the sinterability of the hardmetals. With increasing $B_4C$ content, their hardness increased, but their transverse rupture strength decreased. The changes of sinterability and mechanical properties were attributed to the alloying reaction between $B_4C$ and the binder metal (Ni, Si).

A Study on the exchange anisotropy and the giant magnetoresistance of Mn-Ir/Ni-Fe/buffer/Si with various buffer layers (Mn-Ir/Ni-Fe/buffer/Si 다층박막에서 하지층에 따른 교환이방성 및 거대자기저항에 대한 연구)

  • 윤성용;노재철;전동민;박준혁;서수정;이확주
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.5
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    • pp.486-492
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    • 1999
  • The purpose of this research was to find out what is the dominant factor determining the $H_{ex}$ and the $H_C$ of Mn-Ir/Ni-Fe multilayers with different buffer layers. Regardless of (111) texture of Mn-Ir layer, all samples showed over the $H_{ex}$ of 155 Oe. We found out the $H_{ex}$ and the $H_C$ of Mn-Ir/Ni-Fe multilayers depend on interface morphology and grain size of Mn-Ir layer at the interface between Mn-Ir and Ni-Fe layers. The dependence of magnetroesistance ratio and coupling field on the thickness of ferromagnetic layer, thickness of Cu layer and different buffer layers have been studied. Maximum magnetoresistance ratio appeared for the sample Ta(5 nm)/Mn-Ir(10 nm)/Ni-Fe(7.5 nm)/Cu(2 nm)/Ni-Fe(6 nm)/Ta(5 nm)/Si. Magnetoresistance ratio may be related to grain of ferromagnetic layer. Coupling field may be related to the roughness and the grain size of ferromagnetic layer in the spin-valve multilayers.

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Effect of Color Development of Willemite Crystalline Glaze by Adding NiO (Willemite 결정유에 NiO 첨가가 발색에 미치는 영향)

  • Lee, Chi-Youn;Lee, Byung-Ha
    • Journal of the Korean Ceramic Society
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    • v.47 no.6
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    • pp.598-602
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    • 2010
  • When metal oxides are added into crystalline glaze, colors of glaze and crystals are similar as colorants generally. But the case of NiO in zinc crystalline glaze is different from general color development. When NiO is added to zinc crystalline glaze it can develop two or three colors. The active use of color development mechanism by adding NiO to the zinc crystalline glaze to control color of the base glaze and crystal with stability is investigated. This report is expected to contribute to the ceramic industry in improving application of zinc crystalline glaze. For the experiment of NiO, the quantity of NiO additives is changed to the base glaze for the most adequate formation of willemite crystal from previous research and firing condition: temperature increasing speed $5^{\circ}C/min$, holding 1 h at $1270^{\circ}C$, annealing speed $3^{\circ}C/min$ till $1170^{\circ}C$, holding 2 h at $1170^{\circ}C$ then naturally annealed. The samples are characterized by X-ray diffraction (XRD), UV-vis, and Micro-Raman. The result of the procedure as follows; Ni substitutes for Zn ion then glaze develops blue willemite crystals, as if cobalt is used, on brown glaze base. When NiO quantity is increased to over 5 wt%, willemite size is decreased, and the density of the crystal is increased, at the same time $Ni_2SiO_4$ (olivine) phase, the second phase, has been developed. The excessive NiO is reacted with silicate in the glass then developed green $Ni_2SiO_4$ (olivine), and quantity of $Ni_2SiO_4$ (olivine) is increased as quantity of willemite is decreased. It is proved to create three colors, blue, brown and green by controlling the quantity of NiO to the zinc crystalline glaze and it will improve the multiple use of colors to the ceramic design.

Initial oxidation behavior in High temperature of low carbonsteel containing small amount Ni element. (미량 Ni 함유 저 합금강의 고온초기 산화거동)

  • 손근수
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1999.10a
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    • pp.179-184
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    • 1999
  • When the steel containing Si is oxidated in hi temperature, Re2O3, Red scale is made on the metal side as the spike phase, and this scale invasion into matrix. Therefore, it affects the feature, after rolling. It is reported that the role of Si is FeO/Fe2SiO4 eutectic compound, but Si can not affect pure iron independently. There must be Ni, then the spike phase can exist. Prominence and depression made by Ni that is necessity at the process to work iron. Therefore, in this study after the change of the amount of Ni in pure iron and steel and oxidation, the structure of the oxide and the surface, and the distribution of the elements were considered. In conclusion, at 100$0^{\circ}C$, 110$0^{\circ}C$, 120$0^{\circ}C$ the curves of oxidation weight are all S curves. Especially, in the beginning of oxidation as the amount of Ni increase, the amount of oxidation also increase. Practical steel has less oxidation than pure steel added Ni. There is much FeO in Fe-Ni alloy, compare to practical steel which has much Fe3O4. Especially, we could know considerable Ni was concentrated on the metal side in Fe-Ni alloy, practical steel. and the surface of the scale.

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Decomposition Reaction of Methanol over Ni-Cu/SiO$_2$Catalyst (Ni-Cu/SiO$_2$촉매 상에서의 메탄올 분해 반응)

  • 박지영;문승현;윤형기;박성룡;이상남;정승용
    • Journal of Energy Engineering
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    • v.5 no.1
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    • pp.65-71
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    • 1996
  • Decomposition reaction of methanol was conducted on Ni-Cu/SiO$_2$catalysts with several variables. Variables used in this study are S.V(Space Velocity), partial pressure of methanol, reaction temperature, and composition rate of Ni-Cu. The range of S.V is 10,000-30,000h$\^$-1/, the temperature range is 150-400$^{\circ}C$ and values of Cu/(Ni+Cu) are 0, 0.25, 0.5, 0.75, and 1. Over Ni/SiO$_2$, and Ni-Cu/SiO$_2$, the conversion rate of decomposition reaction of methanol arrived at 100% with increasing of temperature. At this time the selectivity of CO on Ni/SiO$_2$, was suddenly decreased, but on Ni-Cu/SiO$_2$, it was still sustained highly. The main products of reaction were CO and H$_2$, and by-products were CO$_2$ and CH$_4$mainly.

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Structural Study of Tetragonal-Ni1-xMxSi/Si (001) (M = Co, Pd, Pt): First Principles Calculation (Tetragonal-Ni1-xMxSi/Si (001) (M = Co, Pd, Pt) 구조연구 : 제 1 원리계산)

  • Kim, Dae-Hee;Seo, Hwa-Il;Kim, Yeong-Cheol
    • Korean Journal of Metals and Materials
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    • v.46 no.12
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    • pp.830-834
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    • 2008
  • NiSi is currently being employed in 45 nm CMOS devices as a contact material. We employed a first principles calculation to understand the movements of atoms when Co, Pd, and Pt were added to tetragonal-NiSi on Si (001). The Ni atoms in the tetragonal-NiSi/Si (001) favored away from the original positions along positive c-direction in a systematic way during the energy minimization. Two different Ni sites were identified at the interface and the bulk, respectively. The Ni site at the interface farther away from the interface was more favorable for Pd and Pt substitution. Co, however, prafered the bulk site to the interface site, unlike Pd and Pt.