• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.2
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• pp.252-261
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• 2014

A Bayesian network (BN) based fault diagnosis framework for semiconductor etching equipment is presented. Suggested framework contains data preprocessing, data synchronization, time series modeling, and BN inference, and the established BNs show the cause and effect relationship in the equipment module level. Statistically significant state variable identification (SVID) data of etch equipment are preselected using principal component analysis (PCA) and derivative dynamic time warping (DDTW) is employed for data synchronization. Elman's recurrent neural networks (ERNNs) for individual SVID parameters are constructed, and the predicted errors of ERNNs are then used for assigning prior conditional probability in BN inference of the fault diagnosis. For the demonstration of the proposed methodology, 300 mm etch equipment model is reconstructed in subsystem levels, and several fault diagnosis scenarios are considered. BNs for the equipment fault diagnosis consists of three layers of nodes, such as root cause (RC), module (M), and data parameter (DP), and the constructed BN illustrates how the observed fault is related with possible root causes. Four out of five different types of fault scenarios are successfully diagnosed with the proposed inference methodology.

• Journal of the Institute of Electronics Engineers of Korea TE
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• v.39 no.4
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• pp.370-378
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• 2002

Fuzzy inference which combines numerical data and linguistic data has been used to design adaptive filter algorithms. In adaptive IIR filter design, the fuzzy prefilter is taken account, and applied to both direct and lattice structure. As for the fuzzy inference of the fuzzy filter, the Sugeno's method is employed. As membership functions and inference rules are recursively generated through neural network, the accuracy can be improved. The proposed adaptive algorithm, adaptive IIR filter with fuzzy prefilter, has been applied to adaptive system identification for the purposed of performance test. The evaluations have been carried out with viewpoints of convergence property and tracking properties of the parameter estimation. As a result, the faster convergence and the better coefficients tracking performance than those of the conventional algorithm are shown in case of direct structures.

• Structural Engineering and Mechanics
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• v.31 no.1
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• pp.57-74
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• 2009

Power signals resulting from spindle and feed motor, present a rich content of physical information, the appropriate analysis of which can lead to the clear identification of the nature of the tool wear. The partial least-squares regression (PLSR) method has been established as the tool wear analysis method for this purpose. Firstly, the results of the application of widely used techniques are given and their limitations of prior methods are delineated. Secondly, the application of PLSR is proposed. The singular value theory is used to noise reduction. According to grey relational degree analysis, sample variable is filtered as part sample variable and all sample variables as independent variables for modelling, and the tool wear is taken as dependent variable, thus PLSR model is built up through adapting to several experimental data of tool wear in different milling process. Finally, the prediction value of tool wear is compare with actual value, in order to test whether the model of the tool wear can adopt to new measuring data on the independent variable. In the new different cutting process, milling tool wear was predicted by the methods of PLSR and MLR (Multivariate Linear Regression) as well as BPNN (BP Neural Network) at the same time. Experimental results show that the methods can meet the needs of the engineering and PLSR is more suitable for monitoring tool wear.

• 제어로봇시스템학회:학술대회논문집
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• 1992.10b
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• pp.124-129
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• 1992

The goal of the proposed Intelligent Assisting System - IAS is to assist human operators in an intelligent way, while leaving decision and goal planning instances for the human. To realize the IAS the very important issue of manipulation skill identification and analysis has to be solved, which then is stored in a Skill Data Base. Using this data base the IAS is able to perform complex manipulations on the motion control level and to assist the human operator flexibly. We propose a model for manipulation skill based on the dynamics of the grip transformation matrix, which describes the dynamic transformation between object space and finger joint space. Interaction with a virtual world simulator allows the calculation and feedback of appropriate forces through controlled actuators of the sensor glove with 10 degrees-of-freedom. To solve the sensor glove calibration problem, we learn the nonlinear calibration mapping by an artificial neural network(ANN). In this paper we also describe the experimental system setup of the skill acquisition and transfer system as a first approach to the IAS. Some simple manipulation examples and simulation results show the feasibility of the proposed manipulation skill model.

• Journal of the Institute of Convergence Signal Processing
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• v.5 no.1
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• pp.32-39
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• 2004

Biological neurons generally have chaotic characteristics for permanent or transient period. The effects of chaotic response of biological neuron have not yet been verified by using analytical methods. Even though the transient chaos of neuron could be beneficial to overcoming the local minimum problem, the permanent chaotic response gives adverse effect on optimization problems in general. To solve optimization problems, which are needed in almost all neural network applications such as pattern recognition, identification or prediction, and control, the neuron should have one stable fixed point. In this paper, the dynamic characteristics of the chaotic dynamic neuron and the condition that produces the chaotic response are analyzed, and the convergence conditions are presented.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2000.05a
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• pp.47-50
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• 2000

In this paper, an optimal identification method using Multi-FNN(Fuzzy-Neural Network) is proposed for model ins of nonlinear complex system. In order to control of nonlinear process with complexity and uncertainty of data, proposed model use a HCM clustering algorithm which carry out the input-output data preprocessing function and Genetic Algorithm which carry out optimization of model. The proposed Multi-FNN is based on Yamakawa's FNN and it uses simplified inference as fuzzy inference method and Error Back Propagation Algorithm as learning rules. HCM clustering method which carry out the data preprocessing function for system modeling, is utilized to determine the structure of Multi-FNN by means of the divisions of input-output space. Also, the parameters of Multi-FNN model such as apexes of membership function, learning rates and momentum coefficients are adjusted using genetic algorithms. Also, a performance index with a weighting factor is presented to achieve a sound balance between approximation and generalization abilities of the model, To evaluate the performance of the proposed model, we use the time series data for gas furnace and the numerical data of nonlinear function.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.52 no.8
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• pp.471-480
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• 2003

The design of a measurement system to perform Harmonic State Estimation (HSE) is a very complex problem. Among the reasons for its complexity are the system size, conflicting requirements of estimator accuracy, reliability in the presence of transducer noise and data communication failures, adaptability to change in the network topology and cost minimization. In particular, the number of harmonic instruments available is always limited. Therefore, a systematic procedure is needed to design the optimal placement of measurement points. This paper presents a new HSE algorithm which is based on an optimal placement of measurement points using Genetic Algorithms (GAs) which is widely used in areas such as: optimization of the objective function, learning of neural networks, tuning of fuzzy membership functions, machine learning, system identification and control. This HSE has been applied to the Simulation Test Power System for the validation of the new HSE algorithm. The study results have indicated an economical and effective method for optimal placement of measurement points using Genetic Algorithms (GAs) in the Harmonic State Estimation (HSE).

• Journal of Institute of Control, Robotics and Systems
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• v.4 no.2
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• pp.203-208
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• 1998

This paper presents an adaptive fuzzy controller using an neural network and adaptation algorithm. Reference-model following neuro-fuzzy controller(RMFNFC) is invesgated in order to overcome the difficulty of rule selecting and defects of the membership function in the general fuzzy logic controller(FLC). RMFNFC is developed to tune various parameter of the fuzzy controller which is used for the discrete nonlinear system control. RMFNFC is trained with the identification information and control closed loop error. A closed loop error is used for design criteria of a fuzzy controller which characterizes and quantize the control performance required in the overall control system. A control system is trained up the controller with the variation of the system obtained from the identifier and closed loop error. Numerical examples are presented to control of the discrete nonlinear system. Simulation results show the effectiveness of the proposed controller.

• Journal of the Korean Institute of Telematics and Electronics B
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• v.32B no.9
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• pp.1215-1230
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• 1995

The purpose of this paper is to build a computer vision system that endows an autonomous mobile robot the ability of automatic measuring of the analog and digital meters installed in nuclear power plant(NPP). This computer vision system takes a significant part in the organization of automatic surveillance and measurement system having the instruments and gadzets in NPP under automatic control situation. In the meter image captured by the camera, the meter area is sorted out using mainly the thresholding and the region labeling and the meter value recognition process follows. The positions and the angles of the needles in analog meter images are detected using the projection based method. In the case of digital meters, digits and points are extracted and finally recognized through the neural network classifier. To use available database containing relevant information about meters and to build fully automatic meter recognition system, the segmentation and recognition of the function-name in the meter printed around the meter area should be achieved for enhancing identification reliability. For thus, the function- name of the meter needs to be identified and furthermore the scale distributions and values are also required to be analyzed for building the more sophisticated system and making the meter recognition fully automatic.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.43 no.2
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• pp.33-38
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• 2020

Anomaly detection of Machine Learning such as PCA anomaly detection and CNN image classification has been focused on cross-sectional data. In this paper, two approaches has been suggested to apply ML techniques for identifying the failure time of big time series data. PCA anomaly detection to identify time rows as normal or abnormal was suggested by converting subjects identification problem to time domain. CNN image classification was suggested to identify the failure time by re-structuring of time series data, which computed the correlation matrix of one minute data and converted to tiff image format. Also, LASSO, one of feature selection methods, was applied to select the most affecting variables which could identify the failure status. For the empirical study, time series data was collected in seconds from a power generator of 214 components for 25 minutes including 20 minutes before the failure time. The failure time was predicted and detected 9 minutes 17 seconds before the failure time by PCA anomaly detection, but was not detected by the combination of LASSO and PCA because the target variable was binary variable which was assigned on the base of the failure time. CNN image classification with the train data of 10 normal status image and 5 failure status images detected just one minute before.