• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• 한국진공학회지
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• 제8권4B호
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• pp.530-535
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• 1999

W made a near-field optical microscope(NSOM) apparatus and evaluated it. To control the distance between a tip and a sample, we used a piezoelectric translator and a He-Ne laser, and consequently obtained the spatial resolution better than 100nm. For the semiconductor spectroscopic applications, we performed photoluminescence and photocurrent experiments on the GaAs/AlGaAs MQWs samples. In the case of PL experiment, we obtained the low signal to nose ration due to the extremely small power of a light source passing through the nanometric optical fiber tip. However photocurrent experiment shows a hundred times better signal to noise than that of PL experiment. This suggests that photocurrent experiment using NSOM have the possibility to provide the spatial resolution better than 10nm.

• Bulletin of the Korean Chemical Society
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• 제35권3호
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• pp.891-894
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• 2014

The ultrashort electron pulse, laser-emitted from the metal tip apex has been characterized and used as a probing source for a new electron microscope to visualize the morphology of the gold-mesh in the nanometric resolution. As the gap between the tungsten tip and Au-surface is approached within a few nm, the large electromagnetic field enhancement for the incident P-polarized laser pulse with respect to the tip-sample axis is strongly observed. Here, we demonstrate that the time-resolved tip-enhanced electron emission microscope (TEEM) can be implemented on the laboratory table top to give the two-dimensional image, opening lots of challenges and opportunities in the near future.

• 한국정밀공학회지
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• 제18권6호
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• pp.80-86
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• 2001

This paper proposes a precision displacement measuring method of detecting fringe movement of interferograms with a nanometric resolution. It is well known that the laser interferometer plays a useful and essential role in scientific and industrial application, but they have such error sources as an unequal gain of detectors, imbalanced beams, and lack of quadrature. These error sources degrade the accuracy of the interferometer. However, the fringe movement of interferograms has little relation with these error sources. In order to investigate performance of the proposed method. analysis and simulation were executed over random noise and wavefront distorion. Results of the simulation show that the proposed method is robust against these errors. Experiment was implemented to verify this method.

• 한국정밀공학회지
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• 제24권9호
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• pp.68-75
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• 2007

The pitch and orthogonality of two-dimensional (2D) gratings have been measured by using a metrological atomic force microscope (MAFM) and measurement uncertainty has been analyzed. Gratings are typical standard artifacts for the calibration of precision microscopes. Since the magnification and orthogonality in two perpendicular axes of microscopes can be calibrated simultaneously using 2D gratings, it is important to certify the pitch and orthogonality of 2D gratings accurately for nano-metrology using precision microscopes. In the measurement of 2D gratings, the MAFM can be used effectively for its nanometric resolution and uncertainty, but a new measurement scheme was required to overcome some limitations of current MAFM such as nonnegligible thermal drift and slow scan speed. Two kinds of 2D gratings, each with the nominal pitch of 300 nm and 1000 nm, were measured using line scans for the pitch measurement of each direction. The expanded uncertainties (k = 2) of measured pitch values were less than 0.2 nm and 0.4 nm for each specimen, and those of measured orthogonality were less than 0.09 degree and 0.05 degree respectively. The experimental results measured using the MAFM and optical diffractometer were coincident with each other within the expanded uncertainty of the MAFM. As a future work, we also proposed another scheme for the measurements of 2D gratings to increase the accuracy of calculated peak positions.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.18-22
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• 2008

The pitch and orthogonality of two-dimensional (2-D) gratings were measured using a metrological atomic force microscope (MAFM), and the measurement uncertainty was analyzed. Gratings are typical standard devices for the calibration of precision microscopes, Since the magnification and orthogonality in two perpendicular axes of microscopes can be calibrated simultaneously using 2-D gratings, it is important to certify the pitch and orthogonality of such gratings accurately for nanometrology. In the measurement of 2-D gratings, the MAFM can be used effectively for its nanometric resolution and uncertainty, but a new measurement scheme is required to overcome limitations such as thermal drift and slow scan speed. Two types of 2-D gratings with nominal pitches of 300 and 1000 nm were measured using line scans to determine the pitch measurement in each direction. The expanded uncertainties (k = 2) of the measured pitch values were less than 0.2 and 0.4 nm for each specimen, and the measured orthogonality values were less than $0.09^{\circ}$ and $0.05^{\circ}$, respectively. The experimental results measured using the MAFM and optical diffractometer agreed closely within the expanded uncertainty of the MAFM. We also propose an additional scheme for measuring 2-D gratings to increase the accuracy of calculated peak positions, which will be the subject of future study.

• Advances in nano research
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• 제10권2호
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• pp.191-210
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• 2021

To compare the antifungal effect of two nanomaterials (NMs), nanoparticles of zinc oxide were synthesized by a chemical route and zinc oxide-based nanobiohybrids were obtained using green synthesis in an extract of garlic (Allium sativum). The techniques of X-Ray Diffraction (XRD), Infrared (IR) and Ultraviolet Visible (UV-Vis) absorption spectroscopies and Scanning (SEM) and Transmission Electron Microscopies (TEM) were used to determine the characteristics of the nanomaterials synthesized. The results showed that the samples obtained were of nanometric size (< 100 nm). To compare their antifungal capacity, their effect on Cercospora sp. was evaluated. Test results showed that both nanomaterials had an antifungal capacity. The nanobiohybrids (green route) gave an inhibition of fungal growth of ~72.4% while with the ZnO-NPs (chemical route), inhibition was ~87.1%. Microstructural studies using High Resolution Optical Microscopy (HROM) and ultra-structural analysis using TEM carried out on the treated strains demonstrated the effect of the nanofungicides on the vegetative and reproductive structures, as well as on their cell wall. To account for the antifungal effect presented by ZnO-NPs and ZnO nanobiohybrids on the fungi tested, effects reported in the literature related to the action of nanomaterials on biological entities were considered. Specifically, we discuss the electrical interaction of the ZnO-NPs with the cell membrane and the biomolecules (proteins) present in the fungi, taking into account the n-type nature of the ZnO semiconductor and the electrical behavior of the fungal cell membrane and that of the proteins that make up the protein crown.