• 한국세라믹학회지
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• 제55권6호
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• pp.581-589
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• 2018

This work concentrated on the effect of different laser beams on the microstructure and dielectric properties of $BaTiO_3$ nanoparticles at different calcinations times during the gelling preparation step. The nanoparticles were prepared by the sol-gel method. A green (1000 mW, 532 nm) and red laser beam (500 mW, 808 nm), were applied vertically at the center of stirring raw materials. The samples were sintered at $1000^{\circ}C$ for 2, 4, and 6 h. X-ray diffraction (XRD) analysis showed that samples prepared under the green laser have the highest purity. The FT-IR spectra showed that the stretching and bending vibrations of TiO bond without any other bonds, which are compatible to the X-ray diffraction (XRD) results. Samples were characterized by transmission electron microscopy (TEM), Scan electron microscopy (SEM), and UV-Visible spectrophotometer. Characterization showed the samples prepared under the green laser to have the highest particle size (~ 50 nm) and transparency for all sintering durations. Laser beam effects on electrical characterization were studied. BT nanoparticles prepared under the green laser show the higher dielectric constant, which was found to increase with sintering temperature.

• 한국생산제조학회지
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• 제22권4호
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• pp.761-766
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• 2013

A precision linear motion table plays a crucial role in manufacturing systems used in various industries such as machine tools, semiconductors, and nanofabrication. In particular, one of the most typical mechanisms for a linear motion table is to use a ballscrew and LM guides. However, this mechanism is inevitably influenced by friction because of the relative motion in its joint regions. One of the most complex phenomena in friction is the hysteresis behavior of dynamic friction, which was compared with the steady dynamic friction that was presented using a Stribeck curve in this study. Therefore, we investigated the dynamic friction and its hysteresis behavior using a miniaturized linear table equipped with a ballscrew and LM guides that were lubricated with grease. Subsequently, it could be seen that hysteresis could be considered a time delay after zero-velocity crossing and that it was influenced by acceleration.

• 한국산학기술학회논문지
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• 제13권9호
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• pp.3835-3840
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• 2012

최근 나노임프린트 리소그래피 공정이 마이크로/나노 스케일의 소자 개발에 있어서 경제적으로 대량 생산할 수 있는 기술로 주목 받고 있다. 나노임프린트 공정에 대해서, 최근까지 수많은 연구가 이루어지고 있으나, 대부분 R&D 수준의 재료 및 제조와 관련된 실험적 결과 혹은 공정이해 수준의 수치해석적 연구에 그치고 있다. 본 연구에서는 유한요소법을 이용한 점탄성 해석모델을 완성하여 나노임프린트 공정의 충전과정 및 잔류층 형성을 해석하고, 패턴 전사 실험을 통하여 해석의 정확성을 검증하였다.

• 마이크로전자및패키징학회지
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• 제14권4호
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• pp.1-7
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• 2007

최근 나노임프린트 리소그래피 공정이 마이크로/나노스케일의 소자 개발에 있어서 경제적으로 대량 생산할 수 있는 기술로 주목 받고 있다. 나노 스케일의 패턴을 성공적으로 전사하기 위해서는 폴리머의 기계적 거동에 대한 이해를 바탕으로, 적절한 공정 조건 즉, 압력, 온도, 시간 등의 선택이 필요하다. 본 연구에서는 열-나노임프린트 공정에서의 충전과정을 해석하기 위하여 비선형 유한요소법을 이용하였으며, 폴리머의 거동을 점탄성으로 가정하여 재료의 응력완화 효과를 고려하였다. 해석을 통하여 온도 및 몰드의 패턴형상이 열-나노임프린트 공정에 미치는 영향을 살펴보았다.

• Bulletin of the Korean Chemical Society
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• 제26권3호
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• pp.361-370
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• 2005

In this review, the field of biosurface organic chemistry is defined and some examples are presented. The aim of biosurface organic chemistry, composed of surface organic chemistry, bioconjugation, and micro- and nanofabrication, is to control the interfaces between biological and non-biological systems at the molecular level. Biosurface organic chemistry has evolved into the stage, where the lateral and vertical control of chemical compositions is achievable with recent developments of nanoscience and nanotechnology. Some new findings in the field are discussed in consideration of their applicability to nanobiotechnology and biomedical sciences.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2007년도 춘계 학술대회논문집
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• pp.153-158
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• 2007

Since the introduction of Nanoimprint in the mid-1990s, Nanoimprint lithography, a low-cost, non-convential method, has been the dominant lithography technology that guarantees high-throughput patterning of nanostructures. Based on the mechanical embossing mechanism, Nanoimprint lithography creates the nanopatterns on the polymer material cast on the substrate. In essence, the process needs nanofabrication equipment for printing with the adequate control of temperature, pressure and control of parallels of the stamp and substrate. This article introduce the possibility and reality of the thermal control on the hot plate using a CFD code. Numerical computation has been conducted for assessing the feasibility of a hot plate($120{\times}120\;mm2$). PID control is adopted to ensure high temperature uniformity in several zones. Parallel experiments have also been performed for verifying thermal performance. Not only show the results the optimum number of thermocouples related to controllers but also suggest that the thermal simulation using a CFD code would be an alternative method to design and develop the thermal control equipment in the financial aspect.

• 한국정밀공학회지
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• 제22권7호
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• pp.62-70
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• 2005

The nanoindenter and AFM have been used for nanofabrication, such as nanolithography, nanowriting, and nanopatterning, as well as measurement of mechanical properties and surface topology. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is very important to make indents of desired morphology (shape, size and depth). Indents of different shapes can be obtained by using indenters of different geometries such as a cube comer and conical and spherical tips. The depth and size of indents can be controlled by making indentations at different indentation loads. However, in case of viscoplastic viscoelastic materials such as polymethylmethacrylate (PMMA) the time dependent deformation (TDD) should also be considered. In this study, the effect of process parameters such as loading rate and hold-time at peak load on the indent morphology (maximum penetration depth, elastic recovery, transient creep recovery, residual depth pile-up height) of PMMA were studied for hyperfine pattern fabrication.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.157-158
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• 2006

A novel nanofabrication process has been developed using two-photon crosslinking (TPC) for the fabrication of three-dimensional (3D) SiCN ceramic microstructures applicable to high functional 3D devices, which can be used in harsh working environments requiring a high temperature, a resistance to chemical corrosion, as well as tribological properties. After sequential processes: TPC and pyrolysis, 3D ceramic microstructures are obtained. However, large shrinkage due to low-ceramic yield during the pyrolysis is a serious problem to be solved in the precise fabrication of 3D ceramic microstructures. In this work, silica nanoparticles were employed as a filler to reduce the amount of shrinkage. In particular, the ceramic microstructures containing 40 wt% silica nanoparticles exhibited relatively isotropic shrinkage owing to its sliding free from the substrate during pyrolysis.

• 한국재료학회지
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• 제23권3호
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• pp.177-182
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• 2013

Nanosphere lithography is an inexpensive, simple, high-throughput nanofabrication process. NSL can be done in different ways, such as drop coating, spin coating or by means of tilted evaporation. Nitride-based light-emitting diodes (LEDs) are applied in different places, such as liquid crystal displays and traffic signals. The characteristics of gallium nitride (GaN)-based LEDs can be enhanced by fabricating nanopatterns on the top surface of the LEDs. In this work, we created differently sized (420, 320 and 140 nm) nanopatterns on the upper surfaces of GaN-based LEDs using a modified nanosphere lithography technique. This technique is quite different from conventional NSL. The characterization of the patterned GaN-based LEDs revealed a dependence on the size of the holes in the pattern created on the LED surface. The depths of the patterns were 80 nm as confirmed by AFM. Both the photoluminescence and electroluminescence intensities of the patterned LEDs were found to increase with an increase in the size of holes in the pattern. The light output power of the 420-nm hole-patterned LED was 1.16 times higher than that of a conventional LED. Moreover, the current-voltage characteristics were improved with the fabrication of differently sized patterns over the LED surface using the proposed nanosphere lithography method.

• Macromolecular Research
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• 제12권4호
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• pp.374-378
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• 2004

The biodegradable and biocompatible poly(3-hydroxybutyrate-co-3-hydroxyvalerate) (PHBV), a copolymer of microbial polyester, was fabricated as nanofibrous mats by electrospinning. Image analysis of the electrospun nanofibers fabricated from a 2 wt% 2,2,2-trifluoroethanol solution revealed a unimodal distribution pattern of fiber diameters with an observed average diameter of ca. 185 nm. The fiber diameter of electrospun fabrics could be controlled by adjusting the electro spinning parameters, including the solvent composition, concentration, applied voltage, and tip-to-collector distance. Chondrocytes derived from rabbit ear were cultured on a PHBV cast film and an electrospun PHBV nano-fibrous mat. After incubation for 2 h, the percentages of attached chondrocytes on the surfaces of the flat PHBV film and the PHBV nanofibrous mat were 19.0 and 30.1 %, respectively. On the surface of the electrospun PHBV fabric, more chondrocytes were attached and appeared to have a much greater spreaded morphology than did that of the flat PHBV cast film in the early culture stage. The electro spun PHBV nanofabric provides an attractive structure for the attachment and growth of chondrocytes as cell culture surfaces for tissue engineering.