• 제목/요약/키워드: Nanofabrication

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Low Cost, Large Area Nanopatterning via Directed Self-Assembly

  • 김상욱
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.24-25
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    • 2011
  • Molecular self-assembly has several advantages over other nanofabrication methods. Molecular building blocks ensure ultrafine pattern precision, parallel structure formation allows for mass production and a variety of three-dimensional structures are available for fabricating complex structures. Nevertheless, the molecular interaction for self-assembly generally relies on weak forces such as van der Waals force, hydrogen bonding, or hydrophobic interaction. Due to the weak interaction, the structure formation is usually slow and the degree of ordering is low in a self-assembled structure. To promote self-assembly, directed assembly methods employing prepatterned substrates or external fields have been developed and gathered a great deal of technological attention as a next generation nanofabrication process. In this presentation a variety of directed assembly methods for soft nanomaterials including block copolymers, peptides and carbon nanomaterials will be introduced. Block copolymers are representative self-assembling materials extensively utilized in nanofabrication. In contrast to colloid assembly or anodized metal oxides, various shapes of nanostructures, including lines or interconnected networks, can be generated with a precise tunability over their shape and size. Applying prepatterned substrates$^{1,2}$ or introducing thickness modulation$^3$ to block copolymer thin films allowed for the control over the orientational and positional orderings of self-assembled structures. The nanofabrication processes for metals, semiconductors$^4$, carbon nanotubes$^{5,6}$, and graphene$^{6,7}$ templating block copolymer self-assembly will be presented.

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Novel 3D nanofabrication technique and its applications

  • 전석우
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.15.1-15.1
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    • 2009
  • Nano transfer printing and micro contact printing is well known printing method based on soft lithography which uses conformal soft elastomer with designed surface relief structures. Here I introduce another class of novel 3D nanofabrication technique by using the same elastomer but in a different manner. The approach, which we refer to as proximity field nanopatterning, uses the surface-reliefed elastomers as phase masks to pattern thick layers of transparent, photosensitive materials. Aspects of the optics, the materials, and the physical chemistry associated with this method are outlined. A range of 3D structures illustrate its capabilities, and several application examples demonstrate possible areas of use in technologies ranging from microfluidics to photonic materials to density gradient structures for chemical release and high-energy density science.

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Epitaxial Self-Assembly of Block Copolymer Thin Film for Nanofabrication

  • Kim, Sang-Ouk
    • 한국고분자학회:학술대회논문집
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    • 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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    • pp.293-293
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    • 2006
  • Self-assembled nanostructures of block copolymer thin films have gathered significant attention due to their potential applications as templates for nanofabrication. However the lack of a robust strategy to control the structure formation in thin film geometries has been considered a major obstacle for the practical application. In this presentation 'epitaxial self-assembly' will be introduced as a successful strategy to control the self-assembled nanostructure of block copolymer. Chemically patterned surfaces prepared by advanced lithographic techniques successfully registered nanodomains in block copolymer thin film without any single defect over an arbitrarily large area.

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Development of Nanostructured Plasmonic Substrates for Enhanced Optical Biosensing

  • Byun, Kyung-Min
    • Journal of the Optical Society of Korea
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    • 제14권2호
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    • pp.65-76
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    • 2010
  • Plasmonic-based biosensing technologies have been successfully commercialized and applied for monitoring various biomolecular interactions occurring at a sensor surface. In particular, the recent advances in nanofabrication methods and nanoparticle syntheses provide a new route to overcome the limitations of a conventional surface plasmon resonance biosensor, such as detection limit, sensitivity, selectivity, and throughput. In this paper, optical and physical properties of plasmonic nanostructures and their contributions to a realization of enhanced optical detection platforms are reviewed. Following vast surveys of the exploitation of metallic nanostructures supporting localized field enhancement, we will propose an outlook for future directions associated with a development of new types of plasmonic sensing substrates

이온빔을 이용한 마이크로/나노 가공: 모델링 (Ion Beam Induced Micro/Nano Fabrication: Modeling)

  • 김흥배
    • 한국정밀공학회지
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    • 제24권8호통권197호
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    • pp.108-115
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    • 2007
  • 3D nano-scale manufacturing is an important aspect of advanced manufacturing technology. A key element in ability to view, fabricate, and in some cases operate micro-devices is the availability of tightly focused particle beams, particularly of photons, electrons, and ions. The use of ions is the only way to fabricate directly micro-/ nano-scale structures. It has been utilized as a direct-write method for lithography, implantation, and milling of functional devices. The simulation of ion beam induced physical and chemical phenomena based on sound mathematical models associated with simulation methods is presented for 3D micro-/nanofabrication. The results obtained from experimental investigation and characteristics of ion beam induced direct fabrication will be discussed.

Nanowell Array based Sensor and Its Packaging

  • Lee, JuKyung;Akira, Tsuda;Jeong, Myung Yung;Lee, Hea Yeon
    • 마이크로전자및패키징학회지
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    • 제21권3호
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    • pp.19-24
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    • 2014
  • This article reviews the recent progress in nanowell array biosensors that use the label-free detection protocol, and are detected in their natural forms. These nanowell array biosensors are fabricated by nanofabrication technologies that should be useful for developing highly sensitive and selective also reproducible biosensors. Moreover, electrochemical method was selected as analysis method that has high sensitivity compared with other analysis. Finally, highly sensitive nanobiosensor was achieved by combining nanofabrication technologies and classical electrochemical method. Many examples are mentioned about the sensing performance of nanowell array biosensors will be evaluated in terms of sensitivity and detection limit compared with other micro-sized electrode without nanowell array.