• Journal of the Korean Society for Precision Engineering
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• v.29 no.1
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• pp.114-120
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• 2012

We present a simple and low-cost method to fabricate poly(methyl-methacrylate) (PMMA) nanochannels with various shapes by combining the standard optical lithography with a PMMA layer transfer and collapse technique. We utilized PMMA membrane reflowing/collapsing phenomena into microchannels to fabricate nanochannels at both corners of arbitrarily-shaped microchannels. This allows nanochannels with various shapes such as curved nanochannels as well as straight nanochannels to be easily fabricated since the shape of the microchannel determines the shape of the nanochannels. This nanochannel fabrication method is simple, flexible, and low-cost since the standard optical lithography with low-resolution optical masks can be used to fabricate nanoscale channels as small as 100 nm wide with various shapes. Also, the sealing of nanochannels can be naturally achieved while the nanochannels are formed through the polymer layer transfer and collapse.

• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.4
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• pp.254-259
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• 2007

In this report, several fabrication techniques for the formation of various nanochannels (with $SiO_2$, Si, or Quartz) are introduced. Moreover, simple fabrication technique for generating $SiO_2$ nanochannels without nanolithography is presented. By using different nanochannels, the degree of stretching DNA molecule will be evaluated. Finally, we introduce a nanometer scale fluidic channel with electrodes on the sidewall of it, to detect and analyze single DNA molecule. The cross sectional shape of the nanotrench is V-groove, which was implemented by thermal oxidation. Electrodes were deposited through both sidewalls of nanotrench and the sealing of channel was done by covering thin poly-dimethiysiloxane (PDMS) polymer sheet.

• Transactions on Electrical and Electronic Materials
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• v.11 no.5
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• pp.230-233
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• 2010

The authors investigated the anodization mechanism of aluminum in an oxalic acid solution, and the electrochemical reaction is very unique for pore formation via the dissolution process, which is very dependent on the surface geometry in nanoporous alumina templates. The cross-sectional nanochannels showed that the geometrical curvature of the initial surface can cause the branching of nanochannels to be adjusted in volume occupancy to be direct to the electric field normal to the surface. The nanoporous alumina with the crystalline $\gamma-Al_2O_3$ phase showed hexagonal ordering at a voltage of 40 V, with a nanohole distance of 102 nm from the charge density oscillation of the oxalic acid solution.

• Membrane Journal
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• v.26 no.4
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• pp.291-300
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• 2016

Techniques for selectively separating molecules of gas and liquid states using various separation membranes have been widely used in variety of applications such as chemical, biological, pharmaceutical, and petrochemical industries. As the nanochannel diameter, inter-channel distance and length of the nanochannel of the anodic aluminum oxide (AAO) membranes can be precisely controlled, various studies to effectively separate mixture of various molecules using AAO membrane have been widely carried out. In this study, we fabricated AAO membranes of cylindrical nanochannels of various diameter sizes and of through-hole structure, that is, nanochannels of which both ends of each nanochannel are open. Using those AAO membranes of through-hole nanochannel structure, we studied the selective permeation polymer chains dissolved in a solvent based on hydraulic volume of the polymer chains. We found a precise, quantitative relationship between the radius of gyration of polymer chains that permeated through nanochannels inside AAO membrane and the diameter of nanochannels. In addition, we demonstrate that the behavior of the polymer solution flowing through nanochannel of the AAO membrane can be successfully described with the Hagen-Poiseuille relationship. It is, therefore, possible to theoretically interpret the nanoflow of the solution flowing inside the cylindrical nanochannel.

• 한국전산유체공학회:학술대회논문집
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• 2004.10a
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• pp.161-164
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• 2004

A finite volume numerical model is developed for simulating non-equilibrium electroosmotic flow in micro- and nanochannels. The Guoy-Chapman model is adopted to compute the flow and electric potential. The Nernst-Planck equation is employed to trace unsteady transports of ionic species, i.e., time-dependent net charge density. A new set of boundary conditions based on surface charge density are designed rather than using the conventionally-employed zeta potential. A few issues for an efficient computation of electroosmotic flows are discussed. Representative computational examples are given to illustrate the robustness of the numerical model.

• KSTLE International Journal
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• v.10 no.1_2
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• pp.1-5
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• 2009

This paper reports an investigation on nanotribological properties of silicon nanochannels coated by a diamond-like carbon (DLC) film. The nanochannels were fabricated on Si (100) wafers by using photolithography and reactive ion etching (RIE) techniques. The channeled surfaces (Si channels) were then further modified by coating thin DLC film. Water contact angle of the modified and unmodified Si surfaces was examined by an anglemeter using the sessile-drop method. Nanotribological properties, namely friction and adhesion forces, of the Si channels coated with DLC (DLC-coated Si channels) were investigated in comparison with those of the flat Si, DLC-coated flat Si (flat DLC), and Si channels, using an atomic force microscope (AFM). Results showed that the DLC-coated Si channels greatly increased hydrophobicity of silicon surfaces. The DLC coating and Si channels themselves individually reduced adhesion and friction forces of the flat Si. Further, the DLC-coated Si channels exhibited the lowest values of these forces, owing to the combined effect of reduced contact area through the channeling and low surface energy of the DLC. This combined modification could prove a promising method for tribological applications at small scales.

• Bulletin of the Korean Chemical Society
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• v.32 no.1
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• pp.33-34
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• 2011

• Transactions of the KSME C: Technology and Education
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• v.3 no.4
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• pp.249-255
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• 2015

Functional nanochannels were fabricated in order to control selective ion transportation with high permeability and low energy consumption. In this research, nanochannel platform fabrication process and surface functionalization process were developed. In addition, selective ion transportation and concentration measurement system was also set-up. By using fabricated multilayer metal membrane with electrical bias, 95% of ion ($Cl^-$) was blocked. This developed process is new-conceptional membrane fabrication technology and is expected to be applied to next-generation water purification/desalination, portable artifical kidney, and artificial sense organ.

• Proceedings of the IEEK Conference
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• 2004.08c
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• pp.787-791
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• 2004

We investigated field-effect ion-transport devices based on carbon nanotubes by using classical molecular dynamics simulations under applied external force fields, and we present model schematics that car be applied to the nanoscale data storage devices and unipolar ionic field-effect transistors. As the applied external force field is increased, potassium ions rapidly flow through the nanochannel. Under low external force fields, ther nal fluctuations of the nanochannels affect tunneling of the potassium ions whereas the effects of thermal fluctuations are negligible under high external force fields. Since the electric current conductivity increases when potassium ions are inserted into fullerenes or carbon nanotubes, the field effect due to the gate, which can modify the position of the potassium ions, changes the tunneling current between the drain and the source.

• Journal of Powder Materials
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• v.19 no.5
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• pp.367-372
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• 2012

Single crystalline Cu nanowires with controlled diameters and aspect ratios have been synthesized using electrochemical deposition within confined nanochannels of a porous anodic aluminium oxide(AAO) template. The diameters of nano-sized cylindrical pores in AAO template were adjusted by controlling the anodization conditions. Cu nanowires with diameters of approximately 38, 99, 274 nm were synthesized by the electrodeposition using the AAO templates. The crystal structure, morphology and microstructure of the Cu nanowires were systematically investigated using XRD, FE-SEM, TEM and SAED. Investigation results revealed that the Cu nanowires had the controlled diameter, high aspect ratio and single crystalline nature.