• 제목/요약/키워드: Nano-thickness

검색결과 842건 처리시간 0.02초

액체누설 감지용 테이프형 필름센서 (Tape-Type Liquid Leakage Film Sensor)

  • 유동근;김경신;유홍근;한국희;김동준;김정현;한상호;조광섭
    • 한국진공학회지
    • /
    • 제20권2호
    • /
    • pp.146-154
    • /
    • 2011
  • 접착테이프 형태의 액체누설 감지 필름 센서와 이를 이용하고 경보 장치를 포함한 감지 시스템을 개발하였다. 액체누설 감지 필름형 테이프 센서는 베이스 필름층, 전도성 라인층, 보호 필름층으로 구성되며, 테이프의 두께 $300{\sim}500{\mu}m$, 폭 3.55 cm, 그리고 단위 테이프의 길이는 200 m이다. 전도성 라인층의 필름에는 3개의 전도선과 1개의 저항선이 있다. 이들은 도전성 은나노 잉크를 전자인쇄방식으로 설치한다. 이들 저항선과 전도선 사이에 액체가 누설되어 전기적으로 상호 통전되면, 두 선사이의 저항변화를 전압의 변화로 계측하여 누설 위치를 감지한다. 물을 포함한 전도성 액체에 대한 누설 위치 감지에서 길이 200 m에서 오차 범위는 ${\pm}1m$ 이내이다.

수열합성 법으로 성장된 산화 아연 나노로드의 전구체 농도에 따른 구조적, 광학적 특성 연구 (Study the Effects of Precursor Concentration on ZnO Nanorod Arrays by Hydrothermal Method)

  • 류혁현
    • 한국진공학회지
    • /
    • 제18권1호
    • /
    • pp.73-78
    • /
    • 2009
  • 본 연구에서는 metal oxide chemical vapor deposition (MOCVD)을 이용하여 p형 실리콘(100) 기판 위에 30 nm 두께의 산화 아연 완충층을 $500^{\circ}C$ 에서 증착 시킨 후, 그 위에 산화 아연 나노로드를 수열합성법을 이용하여 성장시켰다. 그리고 산화아연 나노로드 성장 시 0.02몰${\sim}$0.5몰의 다양한 농도의 전구체를 사용함으로써 그에 따라 변화되는 산화 아연 나노로드의 배열상태, 구조적, 그리고 광학적 특성 평가를 실시하였다. 특성 평가는 FE-SEM(field emission scanning electron microscopy), XRD(X-ray diffraction), 그리고 PL(photoluminescence) 등의 분석 방법들을 통해 이루어졌다 본 연구를 통하여 전구체의 농도가 증가할수록 나노로드의 직경과 길이가 길어지며 0.3몰의 농도에서 뛰어난 광학 특성이 나타나는 것을 발견할 수 있었다.

IoT 적용을 위한 다종 소자 전자패키징 기술 (Heterogeneous Device Packaging Technology for the Internet of Things Applications)

  • 김사라은경
    • 마이크로전자및패키징학회지
    • /
    • 제23권3호
    • /
    • pp.1-6
    • /
    • 2016
  • IoT 적용을 위해서는 다종 소자를 높은 connectivity 밀도로 집적화시키는 전자패키징 기술이 매우 중요하다. FOWLP 기술은 입출력 밀도가 높고, 소자의 집적화가 우수하고, 디자인 유연성이 우수하여, 최근 개발이 집중되고 있는 기술이다. 웨이퍼나 패널 기반의 FOWLP 기술은 초미세 피치 RDL 공정 기술과 몰딩 기술 개발이 최적화 되어야 할 것이다. 3D stacking 기술 특히 웨이퍼 본딩 후 TSV를 제조하는 방법(via after bonding)은 가격을 낮추면서 connectivity를 높이는데 매우 효과적이라 하겠다. 하지만 저온 웨이퍼 본딩이나 TSV etch stop 공정과 같이 아직 해결해야할 단위 공정들이 있다. Substrate 기술은 두께를 줄이고 가격을 낮추는 공정 개발이 계속 주목되겠지만, 칩과 PCB와의 통합설계(co-design)가 더욱 중요하게 될 것이다.

Cyclic olefin copolymer (COC) 폴리머 프리즘을 사용한 광섬유 기반 표면 플라즈몬 공명 (SPR) 바이오 센서 (A fiber optic surface plasmon resonance (SPR) sensorusing cyclic olefin copolymer (COC) polymer prism)

  • 윤성식;이수현;안종혁;이종현
    • 센서학회지
    • /
    • 제17권5호
    • /
    • pp.369-374
    • /
    • 2008
  • A novel fiber optic surface plasmon resonance (SPR) sensor using cyclic olefin copolymer (COC) prism with the spectral modulation is presented. The SPR sensor chip is fabricated using the SU-8 photolithography, Ni-electroplating and COC injection molding process. The sidewall of the COC prism is partially deposited with Au/Cr (45/2.nm thickness) by e-beam evaporator, and the thermal bonding process is conducted for micro fluidic channels and optical fibers alignment. The SPR spectrum for a phosphate buffered saline (0.1.M PBS, pH.7.2) solution shows a distinctive dip at 1300.nm wavelength, which shifts toward longer wavelength with respect to the bovine serum albumin (BSA)concentrations. The sensitivity of the wavelength shift is $1.16\;nm{\cdot}{\mu}g^{-1}{\cdot}{\mu}l^{-1}$. From the wavelength of SPR dips, the refractive indices (RI) of the BSA solutions can be theoretically calculated using Kretchmann configuration, and the change rate of the RI was found to be $2.3{\times}10^{-5}RI{\cdot}{\mu}g^{-1}{\cdot}l^{-1}$. The realized fiber optic SPR sensor with a COC prism has clearly shown the feasibility of a new disposable, low cost and miniaturized SPR biosensor for biochemical molecular analyses.

하이브리드 선형이온원에 의한 유압 기어펌프용 Cr-DLC코팅막의 특성과 효율성능 (Coatings Properties and Efficiency Performance of Cr-DLC Films Deposited by Hybrid Linear Ion Source for Hydraulic Gear Pump)

  • 차순용;김왕렬;박민석;권세훈;정원섭;강명창
    • 한국분말재료학회지
    • /
    • 제17권6호
    • /
    • pp.456-463
    • /
    • 2010
  • This paper describes the results of the application of Cr-Diamond-like carbon (DLC) films for efficiency improvement through surface modification of spur gear parts in the hydraulic gear pump. Cr-DLC films were successfully deposited on SCM 415 substrates by a hybrid coating process using linear ion source (LIS) and magnetron sputtering method. The characteristics of the films were systematically investigated using FE-SEM, nano-indentation, sliding tester and AFM instrument. The microstructure of Cr-DLC films turned into the dense and fine grains with relatively preferred orientation. The thickness formed in our Cr buffer layer and DLC coating layer were obtained the 487 nm and $1.14\;{\mu}m$. The average friction coefficient of Cr-DLC films considerably decreased to 0.15 for 0.50 of uncoated SCM415 material. The hardness and surface roughness of Cr-DLC films were measured 20 GPa and 10.76 nm, respectively. And then, efficiency tests were performed on the hydraulic gear pump to investigate the efficiency performance of the Cr-DLC coated spur gear. The experimental results show that the volumetric and mechanical efficiency of hydraulic gear pump using the Cr-DLC spur gear were improved up to 2~5% and better efficiency improvement could be attributed to its excellent microstructure, higher hardness, and lower friction coefficient. This conclusion proves the feasibility in the efficiency improvement of hydraulic gear pump for industrial applications.

플라즈마 전해산화공정을 이용한 Mg95Zn4.3Y0.7 합금분말 성형체의 표면특성제어 (Surface Treatment of Mg95Zn4.3Y0.7 Alloy Powder Consolidates using Plasma Electrolytic Oxidation)

  • 김재호;최한신;김도향;황덕영;김형섭;김택수
    • 한국분말재료학회지
    • /
    • 제15권2호
    • /
    • pp.95-100
    • /
    • 2008
  • The investigation is to modify the mechanical and chemical properties of Mg alloys using a combination of rapid solidification and surface treatment. As the first approach, $Mg_{95}Zn_{4.3}Y_{0.7}$ was gas atomized and pressure sintered by spark plasma sintering process (SPS), showing much finer microstructure and higher strength than the alloys as cast. Further modification was performed by treating the surface of PM Mg specimen using Plasma electrolytic oxidation (PEO) process. During the PEO processing, MgO layer was initiated to form on the surface of Mg powder compacts, and the thickness and the density of MgO layer were varied with the reaction time. The thickening rate became low with the reaction time due to the limited diffusion rate of Mg ions. The surface morphology, corrosion behavior and wear resistance were also discussed.

Microscopic characterization of pretransition oxide formed on Zr-Nb-Sn alloy under various Zn and dissolved hydrogen concentrations

  • Kim, Sungyu;Kim, Taeho;Kim, Ji Hyun;Bahn, Chi Bum
    • Nuclear Engineering and Technology
    • /
    • 제50권3호
    • /
    • pp.416-424
    • /
    • 2018
  • Microstructure of oxide formed on Zr-Nb-Sn tube sample was intensively examined by scanning transmission electron microscopy after exposure to simulated primary water chemistry conditions of various concentrations of Zn (0 or 30 ppb) and dissolved hydrogen ($H_2$) (30 or 50 cc/kg) for various durations without applying desirable heat flux. Microstructural analysis indicated that there was no noticeable change in the microstructure of the oxide corresponding to water chemistry changes within the test duration of 100 days (pretransition stage) and no significant difference in the overall thickness of the oxide layer. Equiaxed grains with nano-size pores along the grain boundaries and microcracks were dominant near the water/oxide interface, regardless of water chemistry conditions. As the metal/oxide interface was approached, the number of pores tended to decrease. However, there was no significant effect of $H_2$ concentration between 30 cc/kg and 50 cc/kg on the corrosion of the oxide after free immersion in water at $360^{\circ}C$. The adsorption of Zn on the cladding surface was observed by X-ray photoelectron spectroscopy and detected as ZnO on the outer oxide surface. From the perspective of $OH^-$ ion diffusion and porosity formation, the absence of noticeable effects was discussed further.

Friction and Wear Properties of Boron Carbide Coating under Various Relative Humidity

  • Pham Duc-Cuong;Ahn Hyo-Sok;Yoon Eui-Sung
    • KSTLE International Journal
    • /
    • 제6권2호
    • /
    • pp.39-44
    • /
    • 2005
  • Friction and wear properties of the Boron carbide ($B_{4}C$) coating 100 nm thickness were studied under various relative humidity (RH). The boron carbide film was deposited on silicon substrate by DC magnetron sputtering method using $B_{4}C$ target with a mixture of Ar and methane ($CH_4$) as precursor gas. Friction tests were performed using a reciprocation type friction tester at ambient environment. Steel balls of 3 mm in diameter were used as counter-specimen. The results indicated that relative humidity strongly affected the tribological properties of boron carbide coating. Friction coefficient decreased from 0.42 to 0.09 as the relative humidity increased from $5\%$ to $85\%$. Confocal microscopy was used to observe worn surfaces of the coating and wear scars on steel balls after the tests. It showed that both the coating surface and the ball were significantly worn-out even though boron carbide is much harder than the steel. Moreover, at low humidity ($5\%$) the boron carbide showed poor wear resistance which resulted in the complete removal of coating layer, whereas at the medium and high humidity conditions, it was not. X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) analyses were performed to characterize the chemical composition of the worn surfaces. We suggest that tribochemical reactions occurred during sliding in moisture air to form boric acid on the worn surface of the coating. The boric acid and the tribochemcal layer that formed on steel ball resulted in low friction and wear of boron carbide coating.

다공성 3차원 Ti 지지체의 제조 및 알카리처리에 따른 생체활성 평가 (Fabrication of Porous 3-Dimensional Ti Scaffold and Its Bioactivity by Alkali Treatment)

  • 안상현;김승언;김교한;윤희숙;현용택
    • 한국재료학회지
    • /
    • 제19권7호
    • /
    • pp.362-368
    • /
    • 2009
  • Ti scaffolds with a three-dimensional porous structure were successfully fabricated using powder metallurgy and modified rapid prototyping (RP) process. The fabricated Ti scaffolds showed a highly porous structure with interconnected pores. The porosity and pore size of the scaffolds were in the range of 66$\sim$72% and $300\sim400\;\mu$m, respectively. The sintering of the fabricated scaffolds under the vacuum caused the Ti particles to bond to each other. The strength of the scaffolds depended on the layering patterns. The compressive strength of the scaffolds ranged from 15 MPa to 52 MPa according to the scaffolds' architecture. The alkali treatment of the fabricated scaffolds in an aqueous NaOH solution was shown to be effective in improving the bioactivity. The surface of the alkali-treated Ti scaffolds had a nano-sized fibre-like structure. The modified surface showed a good apatite forming ability. The apatite was formed on the surface of the alkali treated Ti scaffolds within 1 day. The thickness of the apatite increased when the soaking time in a simulated body fluid (SBF) solution increased. It is expected that the surface modification of Ti scaffolds by alkali treatment could be effective in forming apatites in vivo and can subsequently enhance bone formation.

자동차 시트용 탄소섬유 발열체의 전기적 및 저항 발열 특성 (Electrical and Resistance Heating Properties of Carbon Fiber Heating Element for Car Seat)

  • 최경은;박찬희;서민강
    • 공업화학
    • /
    • 제27권2호
    • /
    • pp.210-216
    • /
    • 2016
  • 본 연구에서는 무전해 니켈 도금 시간을 달리하여 제조한 자동차 시트용 탄소섬유 발열체의 발열 및 전기적 특성에 관하여 고찰하였다. 무전해 니켈 도금된 탄소섬유의 비저항 및 비열은 4-point probe method 및 differential scanning calorimetry (DSC)를 이용하여 분석하였으며, 표면 형상 및 표면 온도는 scanning electron microscope (SEM) 및 열화상 카메라를 이용하여 관찰하였다. 실험 결과, 도금시간의 증가에 따라 니켈 도금 두께 및 표면 온도는 증가하였으며, 반면에 비열 및 비저항은 도금시간이 증가함에 따라 감소하였다. 결과적으로 무전해 니켈 도금은 자동차 시트용 탄소섬유 발열체의 저항 발열 및 전기적 특성을 크게 향상시키는 것으로 판단된다.