• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.264-267
• /
• 2005

A subregional slicing method (SSM) is proposed to increase the nanofabrication efficiency of a nano-stereolithography (NSL) process based on two-photon polymerization (TPP). The NSL process can be used to fabricate 3D microstructures via the accumulation of layers of uniform thickness; hence, the precision of the final 3D microstructure depends on the layer thickness. The use of a uniform layer thickness means that, to fabricate a precise microstructure, a large number of thin slices is inevitably required. leading to long processing times. In the SSM proposed here, however, the 3D microstructure is divided into several subregions on the basis of the geometric slope, and then each of these subregions is uniformly sliced with a layer thickness determined by the geometric slope characteristics of each subregion. Subregions with gentle slopes are sliced with thin layer thicknesses, whereas subregions with steep slopes are sliced with thick layer thicknesses. Here, we describe the procedure of the SSM based on TPP, and discuss the fabrication efficiency of the method through the fabrication of a 3D microstructure.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.14 no.1
• /
• pp.436-444
• /
• 2013

This article presents the dynamic response of nano-scale plates using the nonlocal continuum theory and higher-order shear deformation theory. The nonlocal elasticity of Eringen has ability to capture the small scale effects and the higher-order shear deformation theory has ability to capture the quadratic variation of shear strain and consequently shear stress through the plate thickness. The solutions of transient dynamic analysis of nano-scale plate are presented using these theories to illustrate the effect of nonlocal theory on dynamic response of the nano-scale plates. The relations between nonlocal and local theories are discussed by numerical results. Also, the effects of nonlocal parameters, aspect ratio, side-to-thickness ratio, size of nano-scale plate and time step on dynamic response are investigated and discussed. The amplitude and cycle increase when nonlocal parameter increase. In order to validate the present solutions, the reference solutions are used and discussed. The theoretical development as well as numerical solutions presented herein should serve as reference for nonlocal theories as applied to the transient dynamic analysis of nano-scale structures.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2008.10a
• /
• pp.261-263
• /
• 2008

We attempted modulation of the hydrogen dilution ratio in a Cat-CVD system to achieve both the minimal incubation layer and the high throughput. We obtained the incubation layer thickness of 3 nm, and were able to grow a 200 nm-thick film having a 70 % crystallinity in 18 minutes.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.59 no.5
• /
• pp.922-926
• /
• 2010

We have investigated the grating coupled surface plasmon resonance (GC-SPR) sensors using ZnO nano-grating structures to enhance the sensitivity of an SPR sensor. The GC-SPR sensors were analyzed using the finite-difference time-domain method. The optimum resonance angles of 49 degrees are obtained in the 150 nm wide grating structure with a period of 300 nm for the ZnO thickness of 30 nm. Then, the ZnO nano-grating patterns were fabricated by using laser interference lithography. The measured resonance angle of nano-grating patterns was around 49 degrees. Here, an enhanced evanescent field is obtained due to the surface plasmon on the edge of the bandgap when the ZnO grating structures are used to excite the surface palsmon.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2009.10a
• /
• pp.557-559
• /
• 2009

We attempted modulation of hydrogen dilution ratio to achieve both the minimal incubation layer and high deposition rate. The incubation layer thickness was estimated by transmission electron microscopy (TEM) and crystallization fraction was measured by Raman spectroscopy.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2001.06a
• /
• pp.127-134
• /
• 2001

Nano adhesion and friction between a Sj$_3$N$_4$ AFM tip and thin silver films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various ranges of normal load. Thin silver films deposited by IBAD (ion beam assisted deposition) on Si-wafer (100) and Si-wafer of different surface roughness were used. Results showed that nano adhesion and friction decreased as the surface roughness increased. When the Si surfaces were coated by pure silver, the adhesion and friction decreased. But the adhesion and friction were not affected by the thickness of IBAD silver coating. As the normal force increased, the adhesion forces of bare Si-wafer and IBAD silver coating film remained constant, but the friction forces increased linearly. Test results suggested that the friction was mainly governed by the adhesion as long as the normal load was low.

• Tribology and Lubricants
• /
• v.20 no.3
• /
• pp.125-131
• /
• 2004

Nano-wear behavior of amorphous carbon films was studied by Atomic Force Microscopy. The a-C films are deposited on Si(100) substrate by DC magnetron sputtering method. The influences of different surface roughness on the nano-wear are investigated. Nano-wear tests were carried out using a very sharp diamond coated tip. Its spring constant was 1.6 N/m and radius of curvature was 110 nm. Normal force used in the wear tests ranged 0 to 400 nN. It was found that surface depression occurred during scratching because of plastic deformation and abrasive wear (cutting St ploughing). Wear depth increased linearly with normal force. Changing the surface roughness variables according to the bias pulse control, the less surface roughness decreased the wear depth. The thickness did not affect the wear resistance.

• Structural Engineering and Mechanics
• /
• v.67 no.4
• /
• pp.417-425
• /
• 2018

The main aim of this paper is to investigate the bending of Euler-Bernouilli nano-beams made of bi-directional functionally graded materials (BDFGMs) using Eringen's non-local elasticity theory in the integral form with compare the differential form. To the best of the researchers' knowledge, in the literature, there is no study carried out into integral form of Eringen's non-local elasticity theory for bending analysis of BDFGM Euler-Bernoulli nano-beams with arbitrary functions. Material properties of nano-beam are assumed to change along the thickness and length directions according to arbitrary function. The approximate analytical solutions to the bending analysis of the BDFG nano-beam are derived by using the Rayleigh-Ritz method. The differential form of Eringen's non-local elasticity theory reveals with increasing size effect parameter, the flexibility of the nano-beam decreases, that this is unreasonable. This problem has been resolved in the integral form of the Eringen's model. For all boundary conditions, it is clearly seen that the integral form of Eringen's model predicts the softening effect of the non-local parameter as expected. Finally, the effects of changes of some important parameters such as material length scale, BDFG index on the values of deflection of nano-beam are studied.

• Journal of the Optical Society of Korea
• /
• v.18 no.4
• /
• pp.350-358
• /
• 2014

The collapse of Langmuir monolayers of arachidic acid (AA) on water at various rates of molecular area compression has been investigated in situ by imaging ellipsometry (IE). The thickness of the collapsed AA molecules, which are inherently inhomogeneous, was determined by IE with a spatial resolution of a few microns. For the analysis, we determined the dielectric function of AA monolayers from 380 to 1690 nm by conventional spectroscopic ellipsometry. Compression rates ranged from 0.23 to $0.94{\AA}^2/min$. A change of multilayer domains was observed in the in situ IE images. Lower compression rates resulted in more uniform collapsed films. Our experimental results correspond with previous theoretical simulations.

• Transactions of Materials Processing
• /
• v.16 no.1 s.91
• /
• pp.20-24
• /
• 2007

Polypropylene substrate with hair-like nano features(aspect $ratio{\sim}10$) on the surface is fabricated by injection molding process. Pure aluminum plate is anodized to have nano pore array on the surface and used as a stamper for molding nano features, The size and the thickness of the stamper is $30mm{\times}30mm$ and 1mm. The fabricated pore is about 120nm in diameter and 1.5 um deep. For molding of a substrate with nano-hair type of surface features, the stamper is heated up over $150^{\circ}C$ before the filling stage and cooled down below $70^{\circ}C$ after filling to release the molded part. For heating the stamper, stamper itself is used as a heating element by applying electrical power directly to each end of the stamper. The stamper becomes cooled down without circulation of coolant such as water or oil. With this new stamper heating method, nano hairs with aspect ratio of about 10 was successfully injection molded. We also found the heating & cooling process of the stamper is good for releasing of molded nano-hairs.