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Injection Molding of High Aspect Ratio Nano Features Using Stamper Heating/Cooling Process

스탬퍼 가열/냉각을 이용한 고세장비 나노 구조물 성형

  • 유영은 (한국기계연구원 나노공정장비연구센터) ;
  • 최성주 (서울산업대학교 금형설계학과) ;
  • 김선경 (서울산업대학교 금형설계학과) ;
  • 최두선 (한국기계연구원 나노공정장비연구센터) ;
  • 황경현 (한국기계연구원 나노공정장비연구센터)
  • Published : 2007.02.01

Abstract

Polypropylene substrate with hair-like nano features(aspect $ratio{\sim}10$) on the surface is fabricated by injection molding process. Pure aluminum plate is anodized to have nano pore array on the surface and used as a stamper for molding nano features, The size and the thickness of the stamper is $30mm{\times}30mm$ and 1mm. The fabricated pore is about 120nm in diameter and 1.5 um deep. For molding of a substrate with nano-hair type of surface features, the stamper is heated up over $150^{\circ}C$ before the filling stage and cooled down below $70^{\circ}C$ after filling to release the molded part. For heating the stamper, stamper itself is used as a heating element by applying electrical power directly to each end of the stamper. The stamper becomes cooled down without circulation of coolant such as water or oil. With this new stamper heating method, nano hairs with aspect ratio of about 10 was successfully injection molded. We also found the heating & cooling process of the stamper is good for releasing of molded nano-hairs.

Keywords

References

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