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http://dx.doi.org/10.9725/kstle.2004.20.3.125

Nano Wear Behavior of a-C Films with Variation of Surface Roughness  

채영훈 (경북대학교 트라이볼로지연구소)
장영준 (경북대학교 대학)
나종주 (한국기계연구)
김석삼 (경북대학교 기계공학부)
Publication Information
Tribology and Lubricants / v.20, no.3, 2004 , pp. 125-131 More about this Journal
Abstract
Nano-wear behavior of amorphous carbon films was studied by Atomic Force Microscopy. The a-C films are deposited on Si(100) substrate by DC magnetron sputtering method. The influences of different surface roughness on the nano-wear are investigated. Nano-wear tests were carried out using a very sharp diamond coated tip. Its spring constant was 1.6 N/m and radius of curvature was 110 nm. Normal force used in the wear tests ranged 0 to 400 nN. It was found that surface depression occurred during scratching because of plastic deformation and abrasive wear (cutting St ploughing). Wear depth increased linearly with normal force. Changing the surface roughness variables according to the bias pulse control, the less surface roughness decreased the wear depth. The thickness did not affect the wear resistance.
Keywords
nano-wear; bias pulse control; AFM; surface roughness; diamond like amorphous carbon.;
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