• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.246-246
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• 2010

As the trench width in the interconnect technology decreases down to nano-scale below 50 nm, superconformal gap-filling process of Cu becomes very critical for Cu interconnect. Obtaining superconfomral gap-filling of Cu in the nano-scale trench or via hole using MOCVD is essential to control nucleation and growth of Cu. Therefore, nucleation of Cu must be suppressed near the entrance surface of the trench while Cu layer nucleates and grows at the bottom of the trench. In this study, suppression of Cu nucleation was achieved by treating the Ru barrier metal surface with capacitively coupled hydrogen plasma. Effect of hydrogen plasma pretreatment on Cu nucleation was investigated during MOCVD on atomic-layer deposited (ALD)-Ru barrier surface. It was found that the nucleation and growth of Cu was affected by hydrogen plasma treatment condition. In particular, as the plasma pretreatment time and electrode power increased, Cu nucleation was inhibited. Experimental data suggests that hydrogen atoms from the plasma was implanted onto the Ru surface, which resulted in suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. Due to the hydrogen plasma treatment of the trench on Ru barrier surface, the suppression of Cu nucleation near the entrance of the trenches was achieved and then led to the superconformal gap filling of the nano-scale trenches. In the case for without hydrogen plasma treatments, however, over-grown Cu covered the whole entrance of nano-scale trenches. Detailed mechanism of nucleation suppression and resulting in nano-scale superconformal gap-filling of Cu will be discussed in detail.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.365-365
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• 2010

Similar to the superhydrophobic surfaces of lotus leaf, water strider leg is attributed to hierarchical structure of micro pillar and nano-hair coated with low surface energy materials, by which water strider can run and even jump on the water surface. In order to mimick its leg, many effort, especially, on the fabrication of nanohairs has been made using several methods such as a capillarity-driven molding and lithography using poly(urethane acrylate)(PUA). However most of those effort was not so effective to create the similar structure due to its difficulty in the fabrication of nanoscale hairy structures with hydrophobic surface. In this study, we have selected a low surface energy polymeric material of polytetrafluoroethylene (PTFE, or Teflon) assisted with surface modification of CF4 plasma treatment followed by hydrophobic surface coating with pre-cursor of hexamethyldisiloxane (HMDSO) using a plasma enhanced chemical vapor deposition (PE-CVD). It was found that the plasma energy and duration of CF4 treatment on PTFE polymer could control the aspect ratio of nano-hairy structure, which varying with high aspect ratio of more than 20 to 1, or height of over 1000nm but width of 50nm in average. The water contact angle on pristine PTFE surface was measured as approximately $115^{\circ}$. With nanostructures by CF4 plasma treatment and hydrophobic coating of HMDSO film, we made a superhydrophobic nano-hair structure with the wetting angle of over $160^{\circ}C$. This novel fabrication method of nanohairy structures has been applied not only on 2-D flat substrate but also on 3-D substrates like wire and cylinder, which is similarly mimicked the water strider's leg.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.213-214
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• 2009

A thin film hydroxyapatite (HA) films was deposited on anodized titanium by RF sputtering method. The anodized titanium enhanced the biocompatibility of the Ti and the bioactivity was improved further by the HA deposited on the anodized Ti. $TiO_2$ layer with $0.2{\sim}0.5{\mu}$ diameter pore size was formed on the Ti surface by anodization. Anodized $TiO_2$ layer analysis HA film deposited, oxide pore size and number decreased compared with non-HA deposited surface. The corrosion resistance of HA deposited/anodized Ti was higher than that of the non-treatment Ti alloy in Hank's solution, indicating better protective effect. From the results of cell culture using MTT assays, the best cell proliferation showed in HA deposited surface after anodization of Ti surfaces compared with another surface treatment.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.12-16
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• 2012

Although silver is used for T-OLED (Top emitting organic Light-Emitting Diode) as reflective anode, it is not an ideal material due to its low work function. Thus, we study the effect of annealing and atmospheric pressure plasma treatment on Ag film that increases its work function by forming the thin silver oxide layer on its surface. In this study, we deposited silver on glass substrate using RF sputtering. Then we treated the Ag samples annealing at $300^{\circ}C$ for 30 minutes in atmosphere or treating the atmospheric plasma treatment for 30, 60, 90, 120s, respectively. We measured the change of the mechanical properties and the potential value of surface with each one at a different treatment type and time. We used nano-indenter system and KPFM (Kelvin Probe Force Microscopy). KPFM method can be measured the change of surface potential. The nanoindenter results showed that the plasma treatment samples for 30s, 120s had very low elastic modulus, hardness and Weibull modulus. However, annealed sample and plasma treated samples for 60s and 90s had better mechanical properties. Therefore, plasma treatment increases the uniformity thin film and the surface potential that is very effective for the performace of T-OLED.

• Journal of the Korean institute of surface engineering
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• v.45 no.1
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• pp.43-52
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• 2012

Recently, it has been developed for Eco-environment, Super light, Multi-functional nano materials. As needed mobile parts in Smart phone or TV, computer, information communication for high pass signal, multi-function, Magnetic thin film materials have been developed. As last, magnetic powder, sintered and sputtering parts were thick and low purity than electroplating layer, low pass signal and noise were resulted, vibrated TV screen. Because chemical complex temperature was high and ununiform surface layer, it has been very difficult for data pass in High Frequency (GHz) area. Large capacity data pass is used to GHz. Above GHz, signal pass velocity is dependent on Skin Effect of surface layer. If surface layer is thick or ununiform, attachment is poor, low pass signal and cross talk, noise are produced and leaked. It has been reported technical trend of Electrochemically plating and Surface treatment of Metal, Polymer, Ceramic etc. by dispersion/complex for Multi functional nano-magnetic material in this paper.

• Journal of the Korean institute of surface engineering
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• v.41 no.6
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• pp.308-311
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• 2008

Oxide layers were prepared on Al2021 alloys substrate under a hybrid voltage of AC 200 V (60 Hz) combined with DC 260 V value at room temperature within $5{\sim}60\;min$ by plasma electrolytic oxidation (PEO). An optimized aluminate-fluorosilicate solution was used as the electrolytes. The surface morphology, thickness and composition of layers on Al2021 alloys at different reaction times were studied. The results showed that it is possible to generate oxide layers of good properties on Al2021 alloys in aluminate-fluorosilicate electrolytes. Analysis show that the double-layer structure oxide layers consist of different states such as ${\alpha}-{Al_2}{O_3}$ and ${\gamma}-{Al_2}{O_3}$. For short treatment times, the formation process of oxide layers follows a linear kinetics, while for longer times the formation process slows down and becomes a steady stage. During the PEO processes, the average size of the discharge channels increased gradually as the PEO treatment time increased.

• Journal of Powder Materials
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• v.22 no.1
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• pp.21-26
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• 2015

In this study, the control of microstructure for increasing surface roughness of Al with an electro-chemical reaction and a post treatment is systematically investigated. The Al specimen is electro-chemically treated in an electrolyte. In condition of the post treatment at $100^{\circ}C$ for 10 min, a change of the surface microstructure occur at 50V (5 min), and a oxidized layer is at 400V, to which lead a decreasing surface roughness. The minimum temperature of the post treatment for a change of microstructure is $80^{\circ}C$. Moreover, in the condition of 300V (5 min), the electro-chemical reaction is followed by the post treatment at $100^{\circ}C$, the critical enduring time for the change of microstructure is 3 min. The longer post treatment time leads to the rougher surface. The treated Al specimen demonstrate better heat release ability owing to the higher surface roughness than the non-treated Al.

• Journal of Powder Materials
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• v.24 no.1
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• pp.46-52
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• 2017

Fecralloy coating layer with large surface area is suitable for use as a filter media for efficient removal of hot gaseous pollutants exhausted from combustion processes. For uniform preparation of a Fecralloy coating layer with large surface area and strong adhesion to substrate, electrospray coating and thermal treatment processes are experimentally optimized in this study. A nano-colloidal solution with 0.05 wt% Fecralloy nanoparticles is successfully prepared. Optimized electrospraying conditions are experimentally discovered to prepare a uniform coating layer of Fecralloy nano-colloidal solution on a substrate. Drying the electrospray coated Fecralloy nano-colloidal solution layer at $120^{\circ}C$ and subsequent heating at $600^{\circ}C$ are the best post-treatment for enhancing the adhesion force and surface roughness of the Fecralloy coating layer on a substrate. An electrospray coating system, consisting of several multi-groove nozzles, is also experimentally confirmed as a reasonable device for uniform coating of Fecralloy nano-colloid on a large area substrate.

• Journal of the Korean Ceramic Society
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• v.43 no.10 s.293
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• pp.613-618
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• 2006

Graphite is suitable materials as a moderator, reflector, and supporter of a nuclear reactor because of high tolerance to the high temperature and neutron irradiations. Because graphite is so weak to the oxidation, its oxidation study is essentially demanded for the operation and design of the nuclear reactor. This work focuses on the effect of the surface oxidation of graphite according to the surface treatment. With thermogravimeter (TG), oxidation characteristics of the isotropic graphite are measured at the three temperature areas, and oxidation ratio and amounts are estimated as changing the surface roughness. Furthermore, the polished graphite surface produced fom the surface treatment is investigated with the Raman spectroscopic study. Oxidation behaviors of the surface are also evaluated as elimination the polished layer by washing with strong sonication.

• 한국신재생에너지학회:학술대회논문집
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• 2007.06a
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• pp.317-319
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• 2007

Recently, there were many researches for efficiency improvement of DSC. Among of these works, research of surface treatment is still a prerequisite for electron diffusion, light-harvesting and surface state of $DSC^{4)}$. Using of the surface treatment, it can be raise up porosity of $TiO_{2}$ nano-crystalline structure on $photo-electrode^{5)}$. There are chemical, physical, electrical and optical methods which raise up its porosity. In this paper, we have designed and manufactured MOPA-type ultrasonic circuit (100W, frequency and duty variable). Manufactured ultrasonic circuit to use to force cavity density and power into $TiO_{2}$ paste. Then, we have optimized forcing time, frequency and duty of ultrasonic irradiation for surface treatment of photo-electrode of DSC. In I-V characteristic test of DSC, ultrasonic and thermal treated DSC shows 19% improved its efficiency against established DSC.