• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.96-103
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• 2006

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.156.1-156.1
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• 2005

• Composites Research
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• v.29 no.6
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• pp.353-357
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• 2016

An appropriate way to fabricate a hybrid composite containing evenly dispersed carbon nano tubes(CNTs) is to stacking B-stage resin films that contain evenly dispersed CNTs and various reinforcing fiber layers alternatively. In the present study, B-stage resin films are manufactured via shear mixing and three-roll milling. CNT dispersion in resin via these two processes are evaluated by SEM on their fracture surfaces. For more efficient process, the dispersivities are evaluated according to the number of calendering passes. Samples are made for different number of passes during calendering, and their dispersions are evaluated via SEM fractographs as well as by measuring their electrical conductivities. Additionally, the optimal process conditions are obtained by measuring the electrical conductivity and evaluating their dispersivity of the samples prepared by gap mode and force mode.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Advances in concrete construction
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• v.11 no.1
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• pp.45-58
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• 2021

Experimental investigation has been conducted to study the effect of using Micro/Nano Silica in presence of steel fibers on improving the static response of reinforced concrete beams. Twenty-one mixtures were prepared with micro silica (MS), Nano silica (NS) and steel fibers (SFs) at different percentages. Cement was replaced by 10% and 15% of Micro silica and 1%, 2% and 3% of Nano silica in the presence of steel fibers at different volume fractions 0%, 1%, and 2%. 258 concrete samples, (126 cubes, 63 cylinders, 63 prisms, and six R.C beams), were investigated experimentally in two stages. The first stage was to investigate the mechanical properties of the prepared mixtures. The second stage was to study the static behavior of R.C beams, using the designed concrete mixtures, under a four-point flexural test. The results showed that replacing cement by (10% MS and 1% NS) produces the optimum mix with a significant improvement in the mechanical properties and the response of R.C beams under static loads. In addition, incorporating steel fibers at different volume fractions have a considerable effect on the flexural toughness of concrete mixes.

• Journal of the Korean institute of surface engineering
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• v.41 no.4
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• pp.163-168
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• 2008

The dental orthodontic bracket requires good mechanical properties, such as elastic strength and frictional resistance, combined with a high resistance to corrosion. The objective of this study was to investigate the effects of TiN and ZrN coating on corrosion resistance of orthodontic brackets using various electrochemical methods. Brackets manufactured by Ormco Co. were used, respectively, for experiment. Ion plating was carried out for coatings of bracket using Ti and Zr coating materials with nitrogen gas. Ion plated surface of each specimen was observed with field emission scanning electron microscopy(FE-SEM), energy dispersive Xray spectroscopy(EDS) and electrochemical tester. The corrosion potential of the TiN and ZrN coated bracket was comparatively high. The current density of TiN and ZrN coated bracket was smaller than that of non-coated bracket in 0.9% NaCl solution. Pit nucleated at angle of bracket slot.

• 제어로봇시스템학회:학술대회논문집
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• 1990.10b
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• pp.1312-1315
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• 1990

Nanometer positioning control with high velocity and long stroke is discussed. A one-axis stage mechanism driven by an AC linear motor and guided by a rolling ball guide has been constructed. Coarse and fine position controls are designed by using nonlinear dynamics of the rolling guide. Switching from coarse positioning to fine positioning is studied.

• Bulletin of the Korean Chemical Society
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• v.33 no.6
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• pp.1962-1966
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• 2012

Boehmite sols have been prepared by crystallization of amorphous aluminum hydroxide gel obtained by hydrolysis and peptization of aluminum using acetic acid. The size of the boehmite crystallites could be controlled by Al molar concentration in amorphous gel by means of controlling grain growth at nucleation stage. The size of boehmite increases as a function of Al molar concentration. With increasing boehmite crystallite size, the $d_{(020)}$ spacing and the specific surface area decreases, whereas the pore volume increases along with pore size. Especially, the pore size of the boehmite sol particles is comparable to the crystallite size along the b axis, suggesting that the fibril thickness along the b axis among the crystallite dimensions of the boehmite contributes to the pore size. Therefore, the physical properties of boehmite sols can be determined by the crystallite size controlled as a function of initial Al concentration.

• Journal of the Korean Society for Heat Treatment
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• v.18 no.5
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• pp.312-317
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• 2005

The precipitation process in Cu-0.2 wt.%Cr-0.05 wt.%Zr alloys has been studied by electrical electrical resistivity measurements. The kinetics of precipitation could be well described by Johnson-Mehl-Avrami equation, $f(t)=1-\exp(-kt^n)$. The values of n were found to be in the range of 0.36~0.42 at first stage and 1.3~1.6 at second stage. The activation energy was determined by cross-cut method and was 80~89 kJ/mol. The value is similar to the energy for the migration of either a vacancy or a vacancy-solute complex through the lattice.