• Title/Summary/Keyword: Nano-scale

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Thermal Stability Improvement of Ni-germanide using Ni-Co alloy for Ge-MOSFETs Technology (Ge-MOSFETs을 위한 Ni-Co 합금을 이용한 Ni-germanide의 열안정성 개선)

  • Park, Kee-Young;Jung, Soon-Yen;Zhang, Ying-Ying;Han, In-Shik;Li, Shi-Guang;Zhong, Zhun;Shin, Hong-Sik;Kim, Yeong-Cheol;Kim, Jae-Jun;Lee, Ga-Won;Wang, Jin-Suk;Lee, Hi-Deok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.8
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    • pp.733-737
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    • 2008
  • In this paper, Ni-Co alloy was used to improve thermal stability of Ni Germanide. It was found that uniform germanide is obtained on epitaxial Ge-on-Si substrate by employing Ni-Co alloy. Moreover, neither agglomeration nor penetration is observed during post-germanidation annealing process. The thermal stability of Ni germanide using Ni-Co alloy is improved due to the less agglomeration of Germanide. Therefore, the proposed Ni-Co alloy is promising for highly thermal immune Ni germanide for nano scale Ge-MOSFETs technology.

40nm InGaAs HEMT's with 65% Strained Channel Fabricated with Damage-Free $SiO_2/SiN_x$ Side-wall Gate Process

  • Kim, Dae-Hyun;Kim, Suk-Jin;Kim, Young-Ho;Kim, Sung-Wong;Seo, Kwang-Seok
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.3 no.1
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    • pp.27-32
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    • 2003
  • Highly reproducible side-wall process for the fabrication of the fine gate length as small as 40nm was developed. This process was utilized to fabricate 40nm InGaAs HEMTs with the 65% strained channel. With the usage of the dual $SiO_2$ and $SiN_x$ dielectric layers and the proper selection of the etching gas, the final gate length (Lg) was insensitive to the process conditions such as the dielectric over-etching time. From the microwave measurement up to 40GHz, extrapolated fT and fmax as high as 371 and 345 GHz were obtained, respectively. We believe that the developed side-wall process would be directly applicable to finer gate fabrication, if the initial line length is lessened below the l00nm range.

Nondestructive Damage Sensitivity for Functionalized Carbon Nanotube and Nanofiber/Epoxy Composites Using Electrical Resistance Measurement and Acoustic Emission (전기저항 측정과 음향방출을 이용한 표면 처리된 탄소 나노튜브와 나노 섬유 강화 에폭시 복합재료의 비파괴적 손상 감지능)

  • Kim, Dae-Sik;Park, Joung-Man;Kim, Tae-Wook
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2003.10a
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    • pp.42-45
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    • 2003
  • Nondestructive damage sensing and mechanical properties for acid-treated carbon nanotube (CNT) and nanofiber (CNF)/epoxy composites were investigated using electro-micromechanical technique and acoustic emission (AE). Carbon black (CB) was used to compare to CNT and CNF. The results were compared to the untreated case. The fracture of carbon fiber was detected by nondestructive acoustic emission (AE) relating to electrical resistivity under double-matrix composites test. Sensing for fiber tension was performed by electro-pullout test under uniform cyclic strain. The sensitivity for fiber damage such as fiber fracture and fiber tension was the highest for CNT/epoxy composites. Reinforcing effect of CNT obtained from apparent modulus measurement was the highest in the same content. For surface treatment case, the damage sensitivity and reinforcing effect were higher than those of the untreated case. The results obtained from sensing fiber damage were correlated with the morphological observation of nano-scale structure using FE-SEM. The information on fiber damage and matrix deformation and reinforcing effect of carbon nanocomposites could be obtained from electrical resistivity measurement as a new concept of nondestructive evaluation.

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Prediction of Elastic Bending Modulus of Multi-layered Graphene Sheets Using Nanoscale Molecular Mechanics (나노스케일 분자역학을 이용한 다층 그래핀의 굽힘 탄성거동 예측)

  • Kim, Dae-Young;Han, Seog-Young
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.24 no.4
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    • pp.421-427
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    • 2015
  • In this paper, a description is given of finite element method (FEM) simulations of the elastic bending modulus of multi-layered graphene sheets that were carried out to investigate the mechanical behavior of graphene sheets with different gap thicknesses through molecular mechanics theory. The interaction forces between layers with various gap thicknesses were considered based on the van der Waals interaction. A finite element (FE) model of a multi-layered rectangular graphene sheet was proposed with beam elements representing bonded interactions and spring elements representing non-bonded interactions between layers and between diagonally adjacent atoms. As a result, the average elastic bending modulus was predicted to be 1.13 TPa in the armchair direction and 1.18 TPa in the zigzag direction. The simulation results from this work are comparable to both experimental tests and numerical studies from the literature.

Optical Tracking of Three-Dimensional Brownian Motion of Nanoparticles

  • Choi C. K.;Kihm K.D.
    • Journal of the Korean Society of Visualization
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    • v.3 no.1
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    • pp.3-19
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    • 2005
  • Novel optical techniques are presented for three-dimensional tracking of nanoparticles; Optical Serial Sectioning Microscopy (OSSM) and Ratiometric Total Internal Reflection Fluorescent Microscopy (R-TIRFM). OSSM measures optically diffracted particle images, the so-called Point Spread Function (PSF), and dotermines the defocusing or line-of-sight location of the imaged particle measured from the focal plane. The line-of-sight Brownian motion detection using the OSSM technique is proposed in lieu of the more cumbersome two-dimensional Brownian motion tracking on the imaging plane as a potentially more effective tool to nonintrusively map the temperature fields for nanoparticle suspension fluids. On the other hand, R-TIRFM is presented to experimentally examine the classic theory on the near-wall hindered Brownian diffusive motion. An evanescent wave field from the total internal reflection of a 488-nm bandwidth of an argon-ion laser is used to provide a thin illumination field of an order of a few hundred nanometers from the wall. The experimental results show good agreement with the lateral hindrance theory, but show discrepancies from the normal hindrance theory. It is conjectured that the discrepancies can be attributed to the additional hindering effects, including electrostatic and electro-osmotic interactions between the negatively charged tracer particles and the glass surface.

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A Study of the Heat Conduction Phenomena with a Phase Lag of Heat Flux (열유속 상지연이 존재하는 열전도 현상에 대한 연구)

  • Jin, Chang-Fu;Kim, Kyung-Kun;Chung, Han-Shik;Jeong, Hyo-Min;Choi, Du-Yeol;Choi, Soon-Ho
    • Journal of Advanced Marine Engineering and Technology
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    • v.32 no.5
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    • pp.684-690
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    • 2008
  • In most engineering applications related with the heat conduction phenomena, a conventional Fourier heat conduction equation has been successfully applied and it has supplied quite reasonable results. However, it is well known that the Fourier heat conduction equation is failed in the application to the extremely small space and short time, in other words, a nano-scale system and a pico-second time. In this study, non-Fourier effect was evaluated in the heat conduction by considering the concept of a phase lag model. The results show the existence of a heat wave, which means that the heat is transferred with a finite speed while an infinite speed of heat transfer is assumed in the conventional Fourier heat conduction. In addition, the copper and the gold are tested to evaluate the phase lag time between the heat flux and the temperature gradient. The results show that the gold has the heat wave speed faster than that of the copper consistent with the prediction based on an actual experiment.

Evaluation of Elastic Properties for Nanoscale Coating Layers Using Ultrasonic Atomic Force Microscopy (초음파원자현미경을 이용한 나노스케일 박막 코팅층에 대한 탄성특성 평가)

  • Kwak, Dong Ryul;Cho, Seung Bum;Park, Ik Keun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.24 no.5
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    • pp.475-480
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    • 2015
  • Ultrasonic atomic force microscopy (Ultrasonic-AFM) has been used to investigate the elastic property of the ultra-thin coating layer in a thin-film system. The modified Hertzian theory was applied to predict the contact resonance frequency through accurate theoretical analysis of the dynamic characteristics of the cantilever. We coat 200 nm thick Aluminum and Titanium thin films on the substrate using the DC Magnetron sputtering method. The amplitude and phase of the contact resonance frequency of a vibrating cantilever varies in response to the local stiffness constant. Ultrasonic-AFM images were obtained using the variations in the elastic property of the materials. The morphology of the surface was clearly observed in the Ultrasonic-AFM images, but was barely visible in the topography. This research demonstrates that Ultrasonic-AFM is a promising technique for visualizing the distribution of local stiffness in the nano-scale thin coatings.

A nonlocal strain gradient theory for scale-dependent wave dispersion analysis of rotating nanobeams considering physical field effects

  • Ebrahimi, Farzad;Haghi, Parisa
    • Coupled systems mechanics
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    • v.7 no.4
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    • pp.373-393
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    • 2018
  • This paper is concerned with the wave propagation behavior of rotating functionally graded temperature-dependent nanoscale beams subjected to thermal loading based on nonlocal strain gradient stress field. Uniform, linear and nonlinear temperature distributions across the thickness are investigated. Thermo-elastic properties of FG beam change gradually according to the Mori-Tanaka distribution model in the spatial coordinate. The nanobeam is modeled via a higher-order shear deformable refined beam theory which has a trigonometric shear stress function. The governing equations are derived by Hamilton's principle as a function of axial force due to centrifugal stiffening and displacement. By applying an analytical solution and solving an eigenvalue problem, the dispersion relations of rotating FG nanobeam are obtained. Numerical results illustrate that various parameters including temperature change, angular velocity, nonlocality parameter, wave number and gradient index have significant effect on the wave dispersion characteristics of the understudy nanobeam. The outcome of this study can provide beneficial information for the next generation researches and exact design of nano-machines including nanoscale molecular bearings and nanogears, etc.

Nonlocal effects on thermal buckling properties of double-walled carbon nanotubes

  • Tounsi, Abdelouahed;Benguediab, Soumia;Adda Bedia, El Abbas;Semmah, Abdelwahed;Zidour, Mohamed
    • Advances in nano research
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    • v.1 no.1
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    • pp.1-11
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    • 2013
  • The thermal buckling properties of double-walled carbon nanotubes (DWCNTs) are studied using nonlocal Timoshenko beam model, including the effects of transverse shear deformation and rotary inertia. The DWCNTs are considered as two nanotube shells coupled through the van der Waals interaction between them. The geometric nonlinearity is taken into account, which arises from the mid-plane stretching. Considering the small-scale effects, the governing equilibrium equations are derived and the critical buckling temperatures under uniform temperature rise are obtained. The results show that the critical buckling temperature can be overestimated by the local beam model if the nonlocal effect is overlooked for long nanotubes. In addition, the effect of shear deformation and rotary inertia on the buckling temperature is more obvious for the higher-order modes. The investigation of the thermal buckling properties of DWCNTs may be used as a useful reference for the application and the design of nanostructures in which DWCNTs act as basic elements.

Free axial vibration analysis of axially functionally graded thick nanorods using nonlocal Bishop's theory

  • Nazemnezhad, Reza;Kamali, Kamran
    • Steel and Composite Structures
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    • v.28 no.6
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    • pp.749-758
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    • 2018
  • Free axial vibration of axially functionally graded (AFG) nanorods is studied by focusing on the inertia of lateral motions and shear stiffness effects. To this end, Bishop's theory considering the inertia of the lateral motions and shear stiffness effects and the nonlocal theory considering the small scale effect are used. The material properties are assumed to change continuously through the length of the AFG nanorod according to a power-law distribution. Then, nonlocal governing equation of motion and boundary conditions are derived by implementing the Hamilton's principle. The governing equation is solved using the harmonic differential quadrature method (HDQM), After that, the first five axial natural frequencies of the AFG nanorod with clamped-clamped end condition are obtained. In the next step, effects of various parameters like the length of the AFG nanorod, the diameter of the AFG nanorod, material properties, and the nonlocal parameter value on natural frequencies are investigated. Results of the present study can be useful in more accurate design of nano-electro-mechanical systems in which nanotubes are used.