• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.667-673
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.125-128
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• 2005

The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.304-307
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.342-347
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• 2002

After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.180-185
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• 2003

Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modem control theory, dual servo algorithm is developed by minimum order observer, and stability priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.10
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• pp.728-737
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• 2019

In this study, the minimized on-board computer (OBC) module for integrated navigation is developed, which provides satellites' relative position information in formation flying and cluster operation situations. The scalability is considered to apply the user-selected wireless communication module and Global Positioning System (GPS) receiver for navigation, while considering to meet the structural design standard of nano-satellites. As a result of the product development and production, the processing speed of integrated navigation and real-time data synchronization is satisfied for cluster operation nano-satellites by using micro controller unit (MCU). From a heat/vacuum, vibration and radiation test, the OBC was confirmed to be operated in space environments. From these results, a mass production system of OBC was made which is a key part of development on satellite formation flying and cluster/constellation missions that the community demands are increasing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.917-918
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• 2011

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.