• Journal of Sensor Science and Technology
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• v.24 no.1
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• Journal of the Korean Chemical Society
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• v.55 no.6
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• pp.932-935
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• 2011

Using tetrabutyl titanate as precursor, $Eu^{3+}$ doped $TiO_2$ nano-powder was prepared by sol-gel method, the nature of luminescence of nano-powder was studied. The interaction of chlorpyrifos with $Eu^{3+}$ doped $TiO_2$ was studied by absorption and fluorescence spectroscopy. The results indicated the fluorescence intensity of $Eu^{3+}$ doped $TiO_2$ was quenched by chlorpyrifos and the quenching rate constant ($k_q$) was $1.24{\times}10^{11}\;L/mol{\cdot}s$ according to the Stern-Volmer equation. The dynamics of photoinduced electron transfer from chlorpyrifos to conduction band of $TiO_2$ nanoparticle was observed and the mechanism of electron transfer had been confirmed by the calculation of free energy change (${\Delta}G_{et}$) by applying Rehm-Weller equation as well as energy level diagram. A new rapid method for detection of chlorpyrifos was established according to the fluorescence intensity of $Eu^{3+}$ doped $TiO_2$ was proportional to chlorpyrifos concentration. The range of detection was $5.0{\times}10^{-10}-2.5{\times}10^{-7}mol/L$ and the election limit ($3{\sigma}$) was $3.2{\times}10^{-11}$ mol/L.

• International Journal of Advanced Culture Technology
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• v.5 no.1
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• pp.90-97
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• 2017

Nowadays, the most of commercial buildings are build-out with complex architecture and decorated with more complicated interiors of buildings so establishing intelligible escape routes becomes an important case of fire or other emergency in a limited time. The commercial buildings are already equipped with multiple exit signs and these exit signs may create confusion and leads the people into different directions under emergency. This can jeopardize the emergency situation into a chaotic state, especially in a complex layout buildings. There are many research focused on implementing different approached to improve the exit sign system with better visual navigating effects, such as the use of laser beams, the combination of audio and video cues, etc. However the digital signage system based emergency exit sign management is one of the best solution to guide people under emergency situations to escape. This research paper, propose an intelligent evacuation route GUIDE that uses the combination centralized Wireless Sensor Networks (WSN) and digital signage for people safety and avoids dangers from emergency conditions. This proposed system applies WSN to detect the environment condition in the building and uses an evacuation algorithm to estimate the safe route to escape using the sensor information and then activates the signage system to display the safe evacuation route instruction GUIDE according to the location the signage system is installed. This paper presented the prototype of the proposed signage system and execution time to find the route with future research directions. The proposed system provides a natural intelligent evacuation route interface for self or remote operation in facility management to efficiently GUIDE people to the safe exit under emergency conditions.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.2
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• pp.149-156
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• 2011

There is much information of equipment in shop floor because the manufacturing processes are different as the equipment within the manufacturing process is varied. To provide effective process information to MES and other production systems, the DAS requires an equipment monitoring system that takes into account the characteristics of the equipment on the shop floor. In this study, we proposed some methods for collecting the required information about various equipments on a shop floor. The equipments such as CNC can be interfaced with the DAS by using a PLC-based method and a sensor-based interface board can be used to interface general equipments. The proposed methods can be used to collect information on the shop floor in real-time. Moreover these methods are very adaptive and can be easily modified according to the changes made to the shop floor. The information about a real shop floor acquired by employing these methods is saved in a database and the can be provided to a supervisor and MES so that they are aware of the status of the shop floor.

• Journal of Sensor Science and Technology
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• v.18 no.1
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• pp.77-85
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• 2009

We propose a new image pixel architecture which has OFD(Over Flow Device) node by improving conventional 3TR pixel structure. Newly designed pixel consists of photo diode which is verified with HSPICE simulation, PMOS reset transistor, several NMOS and several PMOS transistors. Photodiode signals from each PMOS and NMOS are detected by Reset PMOS. These output signals give enough chances to detect wide operation coverage because OFD node has overflow photocurrent. According to various light intensity, we analyzed characteristic of the output voltage with a SPICE tool. Proposed pixel output has specific value which can detect possible from $0.1{\mu}W/cm^2$ to $10W/cm^2$ light intensity. It has wide-dynamic range of 160 dB.

• Journal of KIISE:Computer Systems and Theory
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• v.34 no.11
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• pp.572-580
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• 2007

Wireless sensor networks are sensing, computing and communication infrastructures that allow us to monitor, instrument, observe, and respond to phenomena in the harsh environment. Generally, the wireless sensor networks are composed of many deployed sensor nodes that were designed to be very cost-efficient in terms of production cost. For example, UC Berkeley's MICA motes have only 8-bit CPU, 4KB RAM, and 128KB FLASH memory space. Therefore, sensor operating systems that run on the sensor nodes should be able to operate efficiently in terms of the resource management. In this paper, we present a dynamic threads stack management scheme for space-constrained and multi-threaded sensor operating systems. In this scheme, the necessary stack space of each function is measured on compile-time. Then, the information is used to dynamically allocate and release each function's stack space on run-time. It was implemented in Nano-Qplus sensor operating system. Our experimental results show that the proposed scheme outperforms the existing fixed-size stack allocation mechanism.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.1
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• pp.147-154
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• 2009

This paper presents a grating~integrated SPR (Surface Plasmon Resonance) sensor chip for simple and inexpensive biomolecule detection. The grating-integrated SPR sensor chip has two sensing channels having a nano grating for SPR coupling. An external mirror is used for multi channel SPR sensing. The present sensor chip replaces bulky and expensive optical components, such as fiber-optic switches or special shaped prisms, resulting in a simple and inexpensive wavelength modulated multi-channel SPR sensing system. We fabricate a SPR sensor chip integrated with 835 nm-pitch gratings by a micromolding technique to reduce the fabrication cost. In the experimental characterization, the refractive index sensitivity of each sensing channel is measured as $321.8{\pm}8.1nm$/RI and $514.3{\pm}8.lnm$/RI, respectively. 0.5uM of the target biomolecule (streptavidin) was detected by a $1.13{\pm}0.16nm$ shift of the SPR dip in the 10%-biotinylated sample channel, while the SPR dip in the reference channel for environmental perturbation monitoring remained at the same position. From the experimental results, multi-channel biomolecule detection capability of the present grating-integrated SPR sensor chip has been verified. On the basis of the preliminary experiments, we successfully measured the binding reaction rate for the $2\;nM{\sim}200\;nM$ monoclonal-antibiotin, thus verifying biomolecule concentration detectability of the present SPR sensor chip. The binding reaction rates measured from the present SPR sensor chip agredd well with those from a commercialized SPR sensor.

• Journal of KIISE:Computing Practices and Letters
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• v.14 no.1
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• pp.13-21
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• 2008

In general, data communication among sensor nodes requires more energy than internal processing or sensing activities. In this paper, we propose a noble technique to reduce the number of packet transmissions necessary for sending/receiving queries/results among neighboring nodes with the help of context-aware routing tables. The important information maintained in the context-aware routing table is which physical properties can be measured by descendent nodes reachable from the current node. Based on the information, the node is able to eliminate unnecessary packet transmission by filtering out the child nodes for query dissemination or result relaying. The simulation results show that up to 80% of performance gains can be achieved with our technique.

• Bulletin of the Korean Chemical Society
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• v.34 no.9
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• pp.2577-2582
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• 2013

A novel stick-shaped portable sensing device featuring a microhole array interface between the polyvinylchloride-2-nitrophenyloctylether (PVC-NPOE) gel and water phase was developed for in-situ sensing of perchlorate ions in real water samples. Perchlorate sensitive sensing responses were obtained based on measuring the current changes with respect to the assisted transfer reaction of perchlorate ions by a perchlorate selective ligand namely, bis(dibenzoylmethanato)Ni(II) (Ni(DBM)2) across the polarized microhole array interface. Cyclic voltammetry was used to characterize the assisted transfer reaction of perchlorate ions by the $Ni(DBM)_2$ ligand when using the portable sensing device. The current response for the transfer of perchlorate anions by $Ni(DBM)_2$ across the micro-water/gel interface linearly increased as a function of the perchlorate ion concentration. The technique of differential pulse stripping voltammetry was also utilized to improve the sensitivity of the perchlorate anion detection down to 10 ppb. This was acquired by preconcentrating perchlorate anions in the gel layer by means of holding the ion transfer potential at 0 mV (vs. Ag/AgCl) for 30 s followed by stripping the complexed perchlorate ion with the ligand. The effect of various potential interfering anions on the perchlorate sensor was also investigated and showed an excellent selectivity over $Br^-$, $NO_2{^-}$, $NO_3{^-}$, $CO{_3}^{2^-}$, $CH_3COO^-$ and $SO{_4}^{2^-}$ ions. As a final demonstration, some regional water samples from the Sincheon river in Daegu city were analyzed and the data was verified with that of ion chromatography (IC) analysis from one of the Korean-certified water quality evaluation centers.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.9
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• pp.62-71
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• 2002

An intergral C-V converter is proposed to solve the nonlinearity problem of capacitive pressure sensors. The integral C-V converter consists of a switched-capacitor integrator and a switched-capacitor differential amplifier. It converts the sensor capacitance change which is inversely proportional to an applied pressure into a linear voltage output. Various PSPICE simulations prove that the convertor has excellent characteristics, such as low nonlinearity less than 0.01%/FS and low sensitivity to parallel offset capacitance and parasitic capacitance for the displacement range of sensor diaphragm set to 0 ${\sim}$ 90% of the initial distance between the electrodes in the simulation. We also show that the offset compensation and the gain trimming are easily achieved with the integral C-V converter.