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Integral C-V Converter for a Fully Differential Capacitive Pressure Sensor  

Lee, Dae-Sung (Korea Electronics Technology Institute, Nano-Mechtronics Research Center)
Kim, Kyu-Chull (Dankook University, Dept. of Electrical, Electronics & Computer Engineering)
Park, Hyo-Derk (Korea Electronics Technology Institute, Nano-Mechtronics Research Center)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.39, no.9, 2002 , pp. 62-71 More about this Journal
Abstract
An intergral C-V converter is proposed to solve the nonlinearity problem of capacitive pressure sensors. The integral C-V converter consists of a switched-capacitor integrator and a switched-capacitor differential amplifier. It converts the sensor capacitance change which is inversely proportional to an applied pressure into a linear voltage output. Various PSPICE simulations prove that the convertor has excellent characteristics, such as low nonlinearity less than 0.01%/FS and low sensitivity to parallel offset capacitance and parasitic capacitance for the displacement range of sensor diaphragm set to 0 ${\sim}$ 90% of the initial distance between the electrodes in the simulation. We also show that the offset compensation and the gain trimming are easily achieved with the integral C-V converter.
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