• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.101-103
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• 2007

In this paper. we design a robust optimal controller for ultra-precision positioning system. Generally, it is hard to control the nanometric scale positioning system because of the parameter uncertainties and external disturbances. To solve this problem. we suggest a control algorithm based on the modified sliding-mode control and the LQ control in an augmented system. The augmented system is composed of additional state variables: state estimates and control input in the nominal system. Through comparison with LQ optimal control, it is verified that the proposed control algorithm is more robust to the unexpected parameter variations and external noises.

• Journal of Electrical Engineering and Technology
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• v.7 no.4
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• pp.558-563
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• 2012

In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with $10{\times}10$ coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}3urad$, ${\pm}2urad$, ${\pm}1urad$]The errors of long stroke movement test is [X, Y, Z, ${\theta}_X$, ${\theta}_Y$, ${\theta}_Z$]${\leq}$ [${\pm}200nm$, ${\pm}200nm$, ${\pm}250nm$, ${\pm}1.5urad$, ${\pm}2urad$, ${\pm}0.5urad$].

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1273-1279
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• 2013

We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.38.3-38
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• 2001

In the planetary surface exploration , micro-rovers or nano-rovers are very attractive choices for a surface exploration system providing mobility functions and other features required in the surface probe missions at small mass and relatively small cost. This paper surveys and summarizes the requirements for Mars exploration rovers in micro or nano scale and outlines the control concepts for navigation including the obstacle/hazard avoidance and the path planning. In this context, autonomous reaction capabilities are the key elements to control design in conjunction with the remote control schemes to deal with the significant signal propagation delays. Other navigation and control aspects such as the instrument fine positioning and the flip-over of the rovers are also briefly introduced. The current technical limitations of the micro- and nano-rovers are summarized.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.189-197
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• 2014

Diffractive optical elements (DOEs) - in general a complex pattern of micro- and nano-scale structures - can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.851-858
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• 2011

Nanopositioning technologies play an important role in the progress of electronics, optics, bio-engineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-nm. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.