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http://dx.doi.org/10.7736/KSPE.2013.30.12.1273

Double-Pitch Dual Grating Method for Detecting the Axial Offset in Roll System  

Kim, Geehong (Nano-Mechanical System Research Division, KIMM)
Ten, Aleksey-Desen (Nano-Mechanical System Research Division, KIMM)
Lim, Hyungjun (Nano-Mechanical System Research Division, KIMM)
Lee, Jaejong (Nano-Mechanical System Research Division, KIMM)
Choi, Keebong (Nano-Mechanical System Research Division, KIMM)
Publication Information
Journal of the Korean Society for Precision Engineering / v.30, no.12, 2013 , pp. 1273-1279 More about this Journal
Abstract
We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.
Keywords
Double-Pitch Dual Grating; Alignment; Roll System;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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