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http://dx.doi.org/10.7736/KSPE.2014.31.3.189

Current Status and Technical Issues of Ultra-precision Machine Tools  

Oh, Jeong Seok (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials)
Kim, Chang-Ju (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials)
Park, Chun Hong (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials)
Choi, Young Jae (IT Converged Process R&D Group, Korea Institute of Industrial Technology)
Publication Information
Abstract
Diffractive optical elements (DOEs) - in general a complex pattern of micro- and nano-scale structures - can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.
Keywords
Ultra-precision machine tool; Diffractive optical element; Positioning stability; Bearing; Thermal stability;
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Times Cited By KSCI : 6  (Citation Analysis)
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