• 한국진공학회지
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• 제22권5호
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• pp.245-249
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• 2013

MOSFET 구조의 차세대 Oxide 박막으로 주목받고 있는 $HfO_X$박막을 rf magnetron sputter를 이용하여 Si(100) 기판 위에 증착하였다. 증착시 산소의 유량을 5, 10, 15 sccm으로 변화를 주며 증착하였고 이후 furnace에서 400부터 $800^{\circ}C$까지 질소분위기로 열처리 하였다. 실험결과 $HfO_X$ 박막의 전기적 특성은 산소유량 증가에 따라 누설전류 특성이 향상되었으나, 열처리 온도가 증가함에 따라서는 감소하였다. 특히, 이 논문에서는 Nano-indenter와 AFM으로 $HfO_X$ 박막의 nanomechanics 특성을 측정하였다. 측정 결과에 의하면 열처리 온도가 증가함에 따라 최대 압입력을 기준으로 최대 압입 깊이가 24.9 nm에서 38.8 nm로 증가하였으며 특히 $800^{\circ}C$ 열처리된 박막에서 압입 깊이가 급격하게 증가하였다. 이러한 압입 깊이의 급격한 증가는 박막내 응력 완화에 의한 스트레스 변화로 예상되며, 그 원인으로 증착시 박막내 포함된 산소가 열처리 조건에 의해 빠져나감에 의한 것으로 판단된다.

• Structural Engineering and Mechanics
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• 제67권4호
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• pp.417-425
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• 2018

The main aim of this paper is to investigate the bending of Euler-Bernouilli nano-beams made of bi-directional functionally graded materials (BDFGMs) using Eringen's non-local elasticity theory in the integral form with compare the differential form. To the best of the researchers' knowledge, in the literature, there is no study carried out into integral form of Eringen's non-local elasticity theory for bending analysis of BDFGM Euler-Bernoulli nano-beams with arbitrary functions. Material properties of nano-beam are assumed to change along the thickness and length directions according to arbitrary function. The approximate analytical solutions to the bending analysis of the BDFG nano-beam are derived by using the Rayleigh-Ritz method. The differential form of Eringen's non-local elasticity theory reveals with increasing size effect parameter, the flexibility of the nano-beam decreases, that this is unreasonable. This problem has been resolved in the integral form of the Eringen's model. For all boundary conditions, it is clearly seen that the integral form of Eringen's model predicts the softening effect of the non-local parameter as expected. Finally, the effects of changes of some important parameters such as material length scale, BDFG index on the values of deflection of nano-beam are studied.

• Advances in nano research
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• 제1권3호
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• pp.153-158
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• 2013

An approach to achieving of spatially homogeneous, ordered ensemble of semiconductor quantum rods in polymer film of polyvinyl butyral is reported. The CdSe/ZnS quantum rods are embedded to the polymer film. Obtained film is stretched up to four times to its initial length. A concentration of quantum rods in the samples is around $2{\times}10^{-5}$ M. The absorption spectra, obtained in the light with orthogonal polarization, confirm the occurrence of spatial ordering in a quantum rod ensemble. Anisotropy of the optical properties in the ordered quantum rod ensemble is examined. The presented method can be used as a low-cost solution for preparing the nanostructured materials with anisotropic properties and high concentration of nanocrystals.

• Structural Engineering and Mechanics
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• 제73권3호
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• pp.287-302
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• 2020

This investigation deals with a size-dependent coupled thermoelasticity analysis based on Green-Naghdi (GN) theory in nano scale using a new modified nonlocal model of heat conduction, which is based on the GN theory and nonlocal Eringen theory of elasticity. In the analysis based on the proposed model, the nonlocality is taken into account in both heat conduction and elasticity. The governing equations including the equations of motion and the energy balance equation are derived using the proposed model in a nano beam resonator. An analytical solution is proposed for the problem using the Laplace transform technique and Talbot technique for inversion to time domain. It is assumed that the nano beam is subjected to sinusoidal thermal shock loading, which is applied on the one of beam ends. The transient behaviors of fields' quantities such as lateral deflection and temperature are studied in detail. Also, the effects of small scale parameter on the dynamic behaviors of lateral deflection and temperature are obtained and assessed for the problem. The proposed GN-based model, analytical solution and data are verified and also compared with reported data obtained from GN coupled thermoelasticity analysis without considering the nonlocality in heat conduction in a nano beam.

• Structural Engineering and Mechanics
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• 제55권5호
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• pp.1001-1014
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• 2015

Bending analysis of functionally graded (FG) nano-plates is investigated in the present work based on a new sinusoidal shear deformation theory. The theory accounts for sinusoidal distribution of transverse shear stress, and satisfies the free transverse shear stress conditions on the top and bottom surfaces of the plate without using shear correction factor. The material properties of nano-plate are assumed to vary according to power law distribution of the volume fraction of the constituents. The size effects are considered based on Eringen's nonlocal theory. Governing equations are derived using energy method and Hamilton's principle. The closed-form solutions of simply supported nano-plates are obtained and the results are compared with those of first-order shear deformation theory and higher-order shear deformation theory. The effects of different parameters such as nano-plate length and thickness, elastic foundation, orientation of foundation orthtotropy direction and nonlocal parameters are shown in dimensionless displacement of system. It can be found that with increasing nonlocal parameter, the dimensionless displacement of nano-plate increases.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.545-545
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• 2007

Recently, innovative process has been investigated in order to replace the conventional high-cost micro patterning processes on the electronic products. To produce desirable profit margins from this low cost products, printed circuit board(PCB), will require dramatic changes in the current manufacturing philosophies and processes. Innovative process using metal nano particles replaces the current industry standard of subtractive etched of copper as a highly efficient way to produce robust circuitry on low cost substrates. An advantage of using metal nano particles process in patterned conductive line manufacturing is that the process is additive. Material is only deposited in desired locations, thereby reducing the amount of chemical and material waste. Simply, it just draws on the substrate as glass epoxy or polyimide with metal nano particles. Particles, when their size becomes nano-meter scale, show some specific characteristics such as enhanced reactivity of surface atoms, decrease in melting point, high electric conductivity compared with the bulk. Melting temperature of metal gets low, the metal nano particles could be formated onto polymer substrates and sintered under $300^{\circ}C$, which would be applied in PCB. It can be getting the metal line of excellent electric conductivity.

• 광학세계
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• 통권125호
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• pp.22-23
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• 2010

1970년대 중반 일본에서 만들어진 메카트로닉스(Mechatronics)라는 용어는 기계공학(Mechanics)과 전자공학(Electronics)의 합성어로 1980년대 이후 전세계적으로 널리 사용되었다. 이후 컴퓨터 기술의 급속한 발전에 힘입어 메카트로닉스는 로봇, 공장자동화, CNC공작기계 등 현대산업의 근간을 이루는 핵심 기술로 자리매김 하였다. 최근에는 학문의 경계를 허무는 작업들이 더욱 속도를 내고 있는 가운데, 생활에서 늘 접하는 휴대폰, TV, 빔프로젝트 등의 제품에 시각적 신호를 창출하기 위한 광학적 요소가 결합되고 있다. 이를 우리는 옵토메카트로닉스(Optomechatronics)라는 영역으로 분류한다. 여기에 생체공학(Bionics)과 나노기술(Nano technology)의 결합을 필요로 하는 제품들이 또한 바이오옵토메카트로닉스(Bio-Optomechatronics)또는 나노바이오 옵토메카트로닉스(Nano-Bioopmechatronics)등의 새로운 영역 창출을 준비하고 있다.

• 마이크로전자및패키징학회지
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• 제18권4호
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• pp.11-18
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• 2011

3차원 칩 적층 접합에 사용하기 위한 Cu-Cu 금속 저온 접합 공정을 위하여 접합 온도 및 플라즈마 표면 전처리에 따른 열 압착 접합을 수행 하였다. 4점굽힘시험과 CCD 카메라를 이용하여 Cu 접합부의 정량적인 계면접착에너지를 평가하였다. 접합 온도 $250^{\circ}C$, $300^{\circ}C$, $350^{\circ}C$에서 각각 $1.38{\pm}1.06$(상한값), $7.91{\pm}0.27$(하한값), $10.36{\pm}1.01$(하한값) $J/m^2$으로 접합온도 $300^{\circ}C$ 이상에서 계면접착에너지 5 $J/m^2$ 이상의 값을 얻었다. 접합 온도 $300^{\circ}C$ 이하 낮은 온도에서 접합하기 위해 Cu-Cu 열 압착 접합 전 Ar+$H_2$ 플라즈마로 $200^{\circ}C$에서 2분간 표면 전처리 후 $250^{\circ}C$ 조건에서 열 압착 접합할 경우 계면접착에너지 값이 $6.59${\pm}0.03$(하한값) $J/m^2$로 표면 전 처리하지 않은 시험편에 비해 접합 특성이 크게 증가 하였다.

• Interaction and multiscale mechanics
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• 제4권2호
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• pp.107-122
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• 2011

Mechanical behavior in nano-sized structures differs from those in macro sized structures due to surface effect. As the ratio of surface to volume increases, surface effect is not negligible and causes size-dependent mechanical behavior. In order to identify this size effect, atomistic simulations are required; however, it has many limitations because too much computational resource and time are needed. To overcome the restrictions of the atomistic simulations and graft the well-established continuum theories, the continuum model considering surface effect, which is based on the bridging technique between atomistic and continuum simulations, is introduced. Because it reflects the size effect, it is possible to carry out a variety of analysis which is intractable in the atomistic simulations. As a part of the application examples, the homogenization method is applied to micro/nano thin films with porosity and the homogenized elastic coefficients of the nano scale thickness porous films are computed in this paper.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1182-1185
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• 2003

Recently, the research of the nano technology has been done on a lot of area over the world. Especially, the interest of them is much higher for semiconductor companies and other super accuracy processing area. In this thesis, we have approached the characteristic of the tensile and bonding of copper, frequently used to nano wires, by molecular dynamics simulation. And the simulation was done by EAM, Embedded Atom Method which has the most highest accuracy for metal. Then the feature of copper at atom space is understood through the simulation of nano wire.