• 한국정밀공학회지
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• 제31권3호
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• pp.189-197
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• 2014

Diffractive optical elements (DOEs) - in general a complex pattern of micro- and nano-scale structures - can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

• 소성∙가공
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• 제12권7호
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• pp.640-646
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• 2003

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as potential application to fabricate the surface nanostructures because of its operational versatility and simplicity. The objective of the work is to suggest new mastless pattern fabrication technique using the combination of machining by nanoindenter and KOH wet etching. The scratch option of the nanoindenter is a very promising method for obtaining nanometer scale features on a large size specimen because it has a very wide working area and load range. Sample line patterns were machined on a silicon surface, which has a native oxide on it, by constant load scratch (CLS) of the Nanoindenter with a Berkovich diamond tip, and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structure was made because of masking effect of the affected layer generated by nano-scratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved patterns can be used as a mold that will be used for mass production processes such as nanoimprint or PDMS molding process. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• 한국정밀공학회지
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• 제23권8호
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• pp.39-46
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• 2006

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• 한국재료학회지
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• 제2권3호
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• pp.172-179
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• 1992

$Al_2O_3/ZrO_2$복합분말에 상릉분말을 침가하여 상압소결법으로 $Al_2O_3/ZrO_2$복합체를 제조한 후, 밀도, 강도, 경도 및 파괴인성등의 물성을 측정하였으며 미세구조 및 파괴단면도 관찰하였다. 상용분말의 침가량이 중량비로 50%이하인 경우에는 평균 꺽임 강도가 640 MPa정도로 거의 변화가 없었으며, 50%이상 첨가된 경우에는 강도가 저하되었는데, 이는 미세조직과 관계가 있는 것으로 생각된다. 또한 파괴인성(4.3-5.3 $Mpam^{1/2}$)값은 상용분말 첨가량에 비례하여 증가하였다. 파괴단면 관찰결과 파괴원인으로는 가공에서 생기는 표면 결함, $ZrO_2$ agglomeration에 의한 crack-like void 및 $Al_2O_3/ZrO_2$ nano복합체 분말과 상용분말간의 소결성 차이에서 생기는 계면 분리등이 관찰되었는데, nano 복합 분말만을 사용한 소결체에서는 가공에 의한 표면 결함만이 파괴원으로 작용하였다. 또한, 파괴형태는 주로 transgranular fracture이었다

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.25-25
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• 2018

Electron beam melting (EBM) is one of powder based additive manufacturing technology used to produce parts for high geometrical complexity and directly with three-dimensional computer aided design (CAD) model. It is kind of the most promising methods with additive manufacturing for a wide range of medical applications, such as orthopedic, dental implant, and etc. This research has been investigated the microstructure and mechanical properties of as fabricated and hot iso-static pressing (HIP) processed specimens, which are made by an Arcam A1 EBM system. The Ti-6Al-4V titanium alloy powder was used as a material for the 3 dimensional printing specimens. Mechanical properties were conducted with EBM manufacturing and computer numerical control (CNC) machining specimens, respectively. Surface morphological analysis was conducted by scanning electron microscopy (SEM) for their surface, dissected plan, and fractured surface after tensile test. The mechanical properties were included tensile stress-strain and nano-indentation test as a analysis level between nano and macro. As following highlighted results, the stress-strain curves on elastic region were almost similar between as fabricated and HIP processed while the ductile (plastic deformed region) properties were higher with HIP than that of as fabricated processed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.820-823
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• 2002

MEMS structures Generally have been fabricated using surface-machining, but the interface failure between silicon substrate and evaporated thin film frequently takes place due to difference of linear coefficient of thermal expansion. Therefore this paper studied the effect of the residual stress caused by variable external loads. This study did not analyzed accurate quantity of the residual stress but trend for the effect of residual stress. Several specimens were fabricated using other material(Al, Au and Cu) and thermal load was applied. The residual stress was measured by nano-indentation using AFM. The results showed the existence of the residual stress due to thermal load. The indentation area of the thermal loaded thin film reduced about 3.5% comparing with the virgin thin film caused by residual stress. The finite element analysis results are similar to indentation test.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.401-404
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• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

• 한국생산제조학회지
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• 제19권5호
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• pp.705-709
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• 2010

It is quite complex to draw the geometry of electron trajectories in electron optics because such trajectories have various aberrations that cannot be easily calculated. However, if we need to know roughly the geometry, the focal length and the principal planes in order to understand the properties of column, a simple numerical solution can be a useful method. We are developing the electron beam machining system based on SEM. In this paper, we show rough geometry, focal length and principal planes by a numerical solution for electron lens I in our column. These results will be utilized in developing a simulation program for electron optics.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.538-541
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• 2003

Ultra-precision machining was carried out on a electroless nickel materials using single crystal diamond tools. The effects of the cutting velocity, the tool length, the tool nose radius, the feed rate and depth of cut on the surface roughness were studied. In this paper, the cutting condition for getting nano order smooth surface of electroless nickel have been examined experimentally by the ultra-precision machine and single crystal diamond tools. And also. the surface roughness was measured by the three dimension