Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Simple Analysis of the Properties of Condenser Lens 1 in SEM

SEM에서 접속 렌즈 1 의 특성에 대한 간단한 분석

  • Lim, Sun-Jong (KIMM Nano Covergence & Manufacturling Systems Research Division)
  • Received : 2010.06.04
  • Accepted : 2010.09.30
  • Published : 2010.10.15
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Abstract

It is quite complex to draw the geometry of electron trajectories in electron optics because such trajectories have various aberrations that cannot be easily calculated. However, if we need to know roughly the geometry, the focal length and the principal planes in order to understand the properties of column, a simple numerical solution can be a useful method. We are developing the electron beam machining system based on SEM. In this paper, we show rough geometry, focal length and principal planes by a numerical solution for electron lens I in our column. These results will be utilized in developing a simulation program for electron optics.

Keywords

References

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