• 한국공작기계학회논문집
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• 제15권3호
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• 한국정밀공학회지
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• 제26권4호
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• pp.128-133
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• 2009

Focused-ion-beam (FIB) system is capable of both machining and measuring in nano-scale; hence nano-scale focusing quality is important. This paper investigates design parameters of two electrostatic lenses in order to achieve the best ion beam focusing performance. Commercial SIMION simulator is used to optimize the dimensions of the condenser and objective lenses and investigate the influence of assembly error on focusing quality The simulation results show that the beam focusing quality is not influenced by angle deviation within ${\pm}0.02\;deg$ and geometrical eccentricity within ${\pm}50$ micrometers.

• Applied Microscopy
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• 제42권4호
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• pp.223-227
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• 2012

Focused Ion Beam (FIB) systems have incorporated versatile nanomanipulators with inherent sophisticated machining capability to characterize the electrical properties of highly miniature components of electronic devices. Carbon fibers were chosen as a model system to test the applicability of nanomanipulators to microscale electronic materials, with special emphasis on the direct current current-voltage characterizations in terms of electrode configuration. The presence of contact resistance affects the electrical characterization. This resistance originates from either i) the so-called "spreading resistance" due to the geometrical constriction near the electrode - material interface or ii) resistive surface layers. An appropriate electrode strategy is proposed herein for the use of FIB-based manipulators.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.182-185
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• 2005

Indentation pattern and line pattern were machined on borosilicate(Pyrex 7740 glass) surface using the combination of mechanical machining by $Nanoi-indenter\circledR$ XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched and indented Pyrex 7740 glass surface was investigated. In this study, effects of indentation and scratch process with etching time on the morphologies of the indented and scratched surfaces after isotropic etching were investigated from an angle of deformation energies.

• 산업기술연구
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• 제14권
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• pp.119-125
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• 1994

Ultra-precision machine tool equipped with the diamond bite tip is used to machine optical products, drums of VTR or computer hard disk. It needs nano technology in the surface roughness of workpiece. To perform the nano scale machining, ultra-precision machine tool must be designed and manufactured in consideration of the vibration characteristics. In this paper, using the finite element analysis, we investigate the modal parameters of the ultra-precision machine tool structures, which use cast iron, granite and alumina ceramic for the bed materials. To verify the numerical results, we manufacture a model of ultra-precision machine tool using granite bed and perform impulse test. Through the theoretical and experimental analyses, we could compare and estimate the vibration characteristics of the three models for the ultra-precision machine tools.

• 한국정밀공학회지
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• 제21권4호
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• pp.24-31
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• 2004

The objective of this work is to suggest a mastless pattern fabrication technique using the combination of machining by Nanoindenter(equation omitted) XP and HF wet etching. Sample line patterns were machined on a borosilicate surface by constant load scratch (CLS) of the Nanoindenter(equation omitted) XP with a Berkovich diamond tip, and they were etched in HF solution to investigate chemical characteristics of the machined borosilicate surface. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• 한국정밀공학회지
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• 제19권1호
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• pp.18-24
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• 2002

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2005년도 춘계학술발표대회 논문집
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• pp.102-103
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• 2005

Using THz time-domain spectroscopy, we study plasmonic band gaps in periodic metal arrays of slits. Femtosecnd machining system guarantees good quality sub millimeter structures for THz spectroscopy. Fabry-Perot effect enhances the transmission when the two resonances cross but does not alter the surface plasmon peak positions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.455-458
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• 2002

In recent years, precision positioning stage is demanded fur some industrial fields such as semi conductor lithography, ultra precision machining and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of it such as 3-axis positioning, characteristic of motion and resolution is verified.

• 한국산업융합학회 논문집
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• 제14권2호
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• pp.45-52
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• 2011

Since the most exclusive machines of the modern industries which require the nano precision rates are evolved from the machine tools, the design of the stable machine tool structure is very critical. Exclusive machines for the modern industries such as semiconductor, solar cell and LED have surface machining processes which are similar to the face cutting and grinding of conventional machine tools. This study was initiated to stabilize a milling machine structure and further to help design those exclusive machines which have similar machining mechanisms. The vibrations inherent to the machine tool structures hurt the precision machining as well as damage the longevity of the structures. There have been numerous researches in order to suppress the vibrations of machine tool structures using the extra modules such as actuators and dampers. In this paper, the dynamic properties are analyzed to obtain the natural frequencies and mode shapes of a machine tool structure which reflect the main reasons of the biggest vibrations under the given operating conditions. And the feasibility of improving the stability of the structure without using any additional apparatus has been investigated with minor design changes. The result of the study shows that simple changes based on proper system identification can considerably improve the stability of the machine tool structure.