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Beam Focusing Performance of Electrostatic Lens using SIMION Simulator  

Oh, Maeng-Ho (Graduate School of Knowledge-based Technology & Energy, Korea Polytechnic Univ.)
Jeong, In-Sung (Department of physics, Yonsei Univ.)
Lee, Jong-Hang (Department of Mechanical Engineering, Korea Polytechnic Univ.)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.4, 2009 , pp. 128-133 More about this Journal
Abstract
Focused-ion-beam (FIB) system is capable of both machining and measuring in nano-scale; hence nano-scale focusing quality is important. This paper investigates design parameters of two electrostatic lenses in order to achieve the best ion beam focusing performance. Commercial SIMION simulator is used to optimize the dimensions of the condenser and objective lenses and investigate the influence of assembly error on focusing quality The simulation results show that the beam focusing quality is not influenced by angle deviation within ${\pm}0.02\;deg$ and geometrical eccentricity within ${\pm}50$ micrometers.
Keywords
Focused Ion Beam; Ion Column; Design Parameter; Condenser Lens; Objective Lens; Focusing Quality; Assembly Error;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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