• Advances in nano research
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• v.8 no.3
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• pp.203-214
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• 2020

This paper investigated bending of magneto-electro-elastic (MEE) nanobeams under hygro-thermal loading embedded in Winkler-Pasternak foundation based on nonlocal elasticity theory. The governing equations of nonlocal nanobeams in the framework parabolic third order beam theory are obtained using Hamilton's principle and solved implementing an analytical solution. A parametric study is presented to examine the effect of the nonlocal parameter, hygro-thermal-loadings, magneto-electro-mechanical loadings and aspect ratio on the deflection characteristics of nanobeams. It is found that boundary conditions, nonlocal parameter and beam geometrical parameters have significant effects on dimensionless deflection of nanoscale beams.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.401-404
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• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

• Steel and Composite Structures
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• v.36 no.2
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• pp.179-186
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• 2020

In this paper, the forced resonance vibration of porous functionally graded (FG) curved nanobeam is examined. In order to capture the hardening and softening mechanisms of nanostructure, the nonlocal strain gradient theory is employed to build the size-dependent model. Using the Timoshenko beam theory together with the Hamilton principle, the equations of motion for the curved nanobeam are derived. Then, Navier series are used in order to obtain the dynamical deflections of the porous FG curved nanobeam with simply-supported ends. It is found that the resonance position of the nanobeam is very sensitive to the nonlocal and strain gradient parameters, material variation, porosity coefficient, as well as geometrical conditions. The results indicate that the resonance position is postponed by increasing the strain gradient parameter, while the nonlocal parameter has the opposite effect on the results. Furthermore, increasing the opening angle or length-to-thickness ratio will result in resonance position moves to lower-load frequency.

• Advances in materials Research
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• v.7 no.1
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• pp.1-16
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• 2018

Thermal bifurcation buckling behavior of fully clamped Euler-Bernoulli nanobeam built of a through thickness functionally graded material is explored for the first time in the present paper. The variation of material properties of the FG nanobeam are graded along the thickness by a power-law form. Temperature dependency of the material constituents is also taken into consideration. Eringen's nonlocal elasticity model is employed to define the small-scale effects and long-range connections between the particles. The stability equations of the thermally induced FG nanobeam are derived via the principal of the minimum total potential energy and solved analytically for clamped boundary conditions, which lead for more accurate results. Moreover, the obtained buckling loads of FG nanobeam are validated with those existing works. Parametric studies are performed to examine the influences of various parameters such as power-law exponent, small scale effects and beam thickness on the critical thermal buckling load of the temperature-dependent FG nanobeams.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1767-1772
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• 2008

A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.149-153
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• 2005

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. The polepieces of these lenses are usually made with high purity iron which is hard to fabricate and very expensive. In this paper, the possibility of using polepiece of object lens composed with pure iron and low carbon steel was examined to reduce cost. The magnetic field at object lens was calculated with finite element method, and practical focusing qualities of SEM pictures were observed comparing for the object lens polepieces with pure iron and two type of composed with low carbon steel.

• Journal of the Optical Society of Korea
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• v.17 no.1
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• pp.73-80
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• 2013

In the process of lithography using ultra violet light sources for semiconductor devices, most of defects are made by sub-micrometer pollutants generated at photochemical reactions. We proposed and developed a novel vibration-insensitive on-axis interferometer with a sub-micrometer lateral resolution by using the interference between two beams: one scattered from defects and the other reflected from a reference area without defects. The proposed system was successfully demonstrated to detect a small Al defect of 0.5 ${\mu}m$ diameter within the inspection time of less than 30 minutes over the area of the photo-mask which is 6 inch by 6 inch square.

• Steel and Composite Structures
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• v.32 no.3
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• pp.293-304
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• 2019

In the present paper, the element free Galerkin (EFG) method is developed for geometrically nonlinear analysis of deep beams considering small scale effect. To interpret the behavior of structure at the nano scale, the higher-order gradient elasticity nonlocal theory is taken into account. The radial point interpolation method with high order of continuity is used to construct the shape functions. The nonlinear equation of motion is derived using the principle of the minimization of total potential energy based on total Lagrangian approach. The Newmark method with the small time steps is used to solve the time dependent equations. At each time step, the iterative Newton-Raphson technique is applied to minimize the residential forces caused by the nonlinearity of the equations. The effects of nonlocal parameter and aspect ratio on stiffness and dynamic parameters are discussed by numerical examples. This paper furnishes a ground to develop the EFG method for large deformation analysis of structures considering small scale effects.

• Geomechanics and Engineering
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• v.17 no.2
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• pp.175-180
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• 2019

This research is concerned with post-buckling investigation of nano-scaled beams constructed from porous functionally graded (FG) materials taking into account geometrical imperfection shape. Hence, two types of nanobeams which are perfect and imperfect have been studied. Porous FG materials are classified based on even or uneven porosity distributions. A higher order nonlinear refined beam theory is used in the present research. Both perfect and imperfect nanobeams are formulated based on this refined theory. A detailed study is provided to understand the effects of geometric imperfection, pore distribution, material distribution and small scale effects on buckling of FG nanobeams.

• Advances in nano research
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• v.12 no.4
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• pp.353-363
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• 2022

This paper presents an investigation about superharmonic and subharmonic resonances of a carbon nanotube reinforced composite beam subjected to lateral harmonic load with damping effect based on the modified couple stress theory. As reinforcing phase, three different types of single walled carbon nanotubes (CNTs) distribution are considered through the thickness in polymeric matrix. The governing nonlinear dynamic equation is derived based on the von Kármán nonlinearity with using of Hamilton's principle. The Galerkin's decomposition technique is utilized to discretize the governing nonlinear partial differential equation to nonlinear ordinary differential equation and then is solved by using of multiple time scale method. Effects of different patterns of reinforcement, volume fraction, excitation force and the length scale parameter on the frequency-response curves of the carbon nanotube reinforced composite beam are investigated. The results show that volume fraction and the distribution of CNTs play an important role on superharmonic and subharmonic resonances of the carbon nanotube reinforced composite beams.