• Title/Summary/Keyword: Nano Patterns

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A study on the micro pattern replication difference in injection molding (사출성형시 미세패턴 전사성 차이에 관한 연구)

  • Kim, Tae-Hoon;Yoo, Yeong-Eun;Je, Tae-Jin;Park, Yeong-Woo;Roh, Seung- Hwan;Choi, Doo-Sun
    • Design & Manufacturing
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    • v.2 no.4
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    • pp.48-53
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    • 2008
  • We injection molded a thin type of plate and wedge type of plate with micro prizm patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, melt temperature, injection rate or packing pressure. The size of the $90^{\circ}$ prizm pattern is $50{\mu}m$ and the size of the plate is about $335mm{\times}213mm$ and $400mm{\times}400mm$. The thicknesses are 2.6mm and 0.7mm at each edge of the wedge type of plate and 1mm at each edge of the thin type of plate. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns on the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

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Fabrication of a Nano Pattern Using Focused Ion Beam (집속이온빔을 이용한 나노 패턴 형성)

  • Han J.;Min B.K.;Lee S.J.;Park C.W.;Lee J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1531-1534
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    • 2005
  • Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

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Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography (나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구)

  • Hong, S.H.;Bae, B.J.;Kwak, S.U.;Lee, H.
    • Journal of Surface Science and Engineering
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    • v.41 no.6
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    • pp.331-334
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    • 2008
  • The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{\circ}C$ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.

HeLa Cell Culture on Nanoimprinted Patterns Using Conducting Polymer (전도성 고분자 나노임프린트 패턴 상의 HeLa 세포 배양)

  • Ahn, Junhyoung;Park, Kyungsook;Lee, Suok;Jung, Sanghee;Lim, Hyungjun;Shin, Yong-Beom;Lee, JaeJong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.41 no.1
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    • pp.63-67
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    • 2017
  • In bioscience and biotechnology, the research of fundamental life mechanisms and their diseases caused by insufficiency is important. The study of a whole organism is difficult and sometimes impossible because of DNA, RNA, proteins, cellular organelles, various cells, and organs. Cell cultures can provide a simple method for researching cellular mechanisms and conditions, both in terms of physiological performance, and in response to chemical stimulation. According to conventional cell culture methodology, the flat surface is used with surface treatments for cell adhesion on the surface. Micro- and nanoscale patterns have been developed with chemical and biochemical modifications for cell immobilization. In this study, HeLa cell culture on nanostructures patterns was studied, including the 300 nm line and 150 nm pillar structures, using nanoimprint lithography and pyrrole as a biocompatible conducting polymer.

The Effect of Process Condition in Nano-molding on the Property of SAM (self-assembled monolayer) (나노성형 공정 조건이 자기조립 단분자막의 이형 특성에 미치는 영향)

  • Lee, Nam-Seok;Han, Jeong-Won;Kang, Shin-Ill
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.10a
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    • pp.83-86
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    • 2005
  • In this study, SAM (self-assembled monolayer) was applied as an anti-adhesion layer in the nano molding process, to reduce the surface energy between the nano-stamper and the moldeded polymeric nano patterns. Before depositing SAM on the stamper, the nickel stamper was pretreated to remove oxide on the nickel stamper surface. Then, using the solution deposition method, alkanethiol SAM as an anti-adhesion layer was deposited on nickel surface. To examine the effectiveness of the SAM deposition on the metallic nano stamper, the contact angle and the lateral friction force were measured at the actual processing temperature and pressure for the case of nano compression molding and at the actual UV dose for the case of nano UV molding. The surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the high hydrophobic quality of SAM on the nickel stamper maintained under the actual molding environments.

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Durability of Nano-/micro- Pt Line Patterns Formed on Flexible Substrate (유연기판 위 형성된 나노-마이크로 Pt 금속선 패턴의 내구성 연구)

  • Park, Tae Wan;Choi, Young Joong;Park, Woon Ik
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.3
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    • pp.49-53
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    • 2018
  • Since various methods to form well-aligned nano-/micro- patterns are underlying technologies to fabricate next generation wearable electronic devices, many efforts have been made to realize finer patterns in recent years. Among lots of patterning methods, the present invention includes a nano-transfer printing (n-TP) process which is advantageous in that a processing cost is low and high-resolution patterns can be formed within a short processing time. We successfully achieved pattern formation of highly ordered Pt lines with line-width of 250 nm, 500 nm, and $1{\mu}m$ on transparent and flexible substrates. In addition, we analyzed the durability of the patterns, showing excellent stability of line-shape even after a physical and repeated bending test of 500 times using a bending machine. As a result, it is expected that a n-TP process is very useful for forming various metal patterns, and it is also expected to be applied to wiring and interconnection technology of next generation flexible electronic devices.

Automated Inspection System for Micro-pattern Defection Using Artificial Intelligence (인공지능(AI)을 활용한 미세패턴 불량도 자동화 검사 시스템)

  • Lee, Kwan-Soo;Kim, Jae-U;Cho, Su-Chan;Shin, Bo-Sung
    • Journal of the Korean Society of Industry Convergence
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    • v.24 no.6_2
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    • pp.729-735
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    • 2021
  • Recently Artificial Intelligence(AI) has been developed and used in various fields. Especially AI recognition technology can perceive and distinguish images so it should plays a significant role in quality inspection process. For stability of autonomous driving technology, semiconductors inside automobiles must be protected from external electromagnetic wave(EM wave). As a shield film, a thin polymeric material with hole shaped micro-patterns created by a laser processing could be used for the protection. The shielding efficiency of the film can be increased by the hole structure with appropriate pitch and size. However, since the sensitivity of micro-machining for some parameters, the shape of every single hole can not be same, even it is possible to make defective patterns during process. And it is absolutely time consuming way to inspect all patterns by just using optical microscope. In this paper, we introduce a AI inspection system which is based on web site AI tool. And we evaluate the usefulness of AI model by calculate Area Under ROC curve(Receiver Operating Characteristics). The AI system can classify the micro-patterns into normal or abnormal ones displaying the text of the result on real-time images and save them as image files respectively. Furthermore, pressing the running button, the Hardware of robot arm with two Arduino motors move the film on the optical microscopy stage in order for raster scanning. So this AI system can inspect the entire micro-patterns of a film automatically. If our system could collect much more identified data, it is believed that this system should be a more precise and accurate process for the efficiency of the AI inspection. Also this one could be applied to image-based inspection process of other products.

A Study on the Functionality and Stability of LDPE-Nano ZnO Composite Film (LDPE-나노 ZnO 복합필름의 기능성 및 재질안정성 평가)

  • Lee, Wooseok;Ko, Seonghyuk
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.24 no.1
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    • pp.27-34
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    • 2018
  • In this work, nano ZnO was introduced into low density poly ethylene (LDPE) composites films with various contents (0, 0.5, 1.0, 3.0 and 5.0 wt%) by melt-extrusion. Their basic properties such as crystallinity, chemical bonds and surface morphology were examined by XRD, FTIR and SEM. XRD patterns and FTIR peaks intensity were increased in proportion to the ZnO contents. SEM images showed well dispersed nano ZnO in LDPE composite films. Antimicrobial functionality of LDPE-nano ZnO composite films was also studied and the presence of nano ZnO resulted in significant improvement of antimicrobial functionality compared to the pure LDPE film. To evaluate influence of nano ZnO on LDPE properties required as packaging material, thermal, mechanical, gas barrier and optical properties of LDPE-nano ZnO composite films were characterized with various analytical techniques including TGA, UTM, OTR, WVTR and UV-Vis spectroscopy. As a result, except optical and mechanical properties of LDPE, no significant effects were found in other properties. Opacity of pure LDPE was greatly increased with increasing concentration of nano ZnO and tensile strength was also improved at 0.5wt% ZnO content.

Influence of electro-magneto-thermal environment on the wave propagation analysis of sandwich nano-beam based on nonlocal strain gradient theory and shear deformation theories

  • Arani, Ali Ghorbanpour;Pourjamshidian, Mahmoud;Arefi, Mohammad
    • Smart Structures and Systems
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    • v.20 no.3
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    • pp.329-342
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    • 2017
  • In this paper, the dispersion characteristics of elastic waves propagation in sandwich nano-beams with functionally graded (FG) face-sheets reinforced with carbon nanotubes (CNTs) is investigated based on various high order shear deformation beam theories (HOSDBTs) as well as nonlocal strain gradient theory (NSGT). In order to align CNTs as symmetric and asymmetric in top and bottom face-sheets with respect to neutral geometric axis of the sandwich nano-beam, various patterns are employed in this analysis. The sandwich nano-beam resting on Pasternak foundation is subjected to thermal, magnetic and electrical fields. In order to involve small scale parameter in governing equations, the NSGT is employed for this analysis. The governing equations of motion are derived using Hamilton's principle based on various HSDBTs. Then the governing equations are solved using analytical method. A detailed parametric study is conducted to study the effects of length scale parameter, different HSDBTs, the nonlocal parameter, various aligning of CNTs in thickness direction of face-sheets, different volume fraction of CNTs, foundation stiffness, applied voltage, magnetic intensity field and temperature change on the wave propagation characteristics of sandwich nano-beam. Also cut-off frequency and phase velocity are investigated in detail. According to results obtained, UU and VA patterns have the same cut-off frequency value but AV pattern has the lower value with respect to them.

Fabrication Process of a Nano-precision Polydimethylsiloxane Replica using Vacuum Pressure-Difference Technique (진공 압력차이법에 의한 나노 정밀도를 가지는 폴리디메틸실록산 형상복제)

  • 박상후;임태우;양동열;공홍진;이광섭
    • Polymer(Korea)
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    • v.28 no.4
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    • pp.305-313
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    • 2004
  • A vacuum pressure-difference technique for making a nano-precision replica is investigated for various applications. Master patterns for replication were fabricated using a nano-replication printing (nRP) process. In the nRP process, any picture and pattern can be replicated from a bitmap figure file in the range of several micrometers with resolution of 200nm. A liquid-state monomer is solidified by two-photon absorption (TPA) induced by a femto-second laser according to a voxel matrix scanning. After polymerization, the remaining monomers were removed simply by using ethanol droplets. And then, a gold metal layer of about 30nm thickness was deposited on the fabricated master patterns prior to polydimethylsiloxane molding for preventing bonding between the master and the polydimethylsiloxane mold. A few gold particles attached on the polydimethylsiloxane stamp during detaching process were removed by a gold selecting etchant. After fabricating the polydimethylsiloxane mold, a nano-precision polydimethylsiloxane replica was reproduced. More precise replica was produced by the vacuum pressure-difference technique that is proposed in this paper. Through this study, direct patterning on a glass plate, replicating a polydimethylsiloxane mold, and reproducing polydimethylsiloxane replica are demonstrated with a vacuum pressure-difference technique for various micro/nano-applications.