• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.10
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• pp.1876-1882
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• 2008

Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator, operator attaches a CNT at the apex of Atomic Force Microscope(AFM) tip, which requires a mastery of mechanics and long manufacture time. Nano manipulator is installed inside a Scanning Electron Microscope(SEM) chamber to observe the operation. This paper presents a control scheme for horizontal axes of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, and the position information so obtained is fed to control horizontal axes of nano manipulator. That is, a visual servoing loop is realized to control the axes more precisely in nano scale.

• Proceedings of the KIEE Conference
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• 2007.10a
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• pp.251-252
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• 2007

Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator operator attaches a CNT at the end of Atomic Force Microscopy(AFM) tip, which requires a master mechanic and long manufacture time. Nano manipulator is installed inside Scanning Electron Microscopy (SEM) chamber to observe the operation. This paper presents a control of horizontal axis of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, the position information so obtained is fed to control horizontal axis of nano manipulator. To be specific, visual servoing loop was realized to control the axis more precisely.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.260-263
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• 2008

The bending test of an individual ZnO nanorod was performed with a nano-manipulator and a force sensor inside the scanning electron microscope (SEM), and the bending properties of ZnO nanorod were also discussed. The ZnO nanorod used in this experiment was fabricated by means of solution base process. The force sensor used for bending test of ZnO nanorod was typed with cantilever. The force sensor was mounted on the nano-manipulator. The nano-manipulator was controlled and manipulated by a personal computer. The each end of an individual ZnO nanorod was attached on the rigid support and the tip of the force sensor with an electron beam exposure, and then the bending test was carried out by controlling of the nano-manipulator. The bending modulus of a ZnO nanorod was calculated at 69.35GPa after the bending test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.637-638
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• 2011

• Applied Microscopy
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• v.51
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• pp.8.1-8.7
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• 2021

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.238.2-238.2
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.73-76
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• 2005

Carbon nanotubes (CNTs) have attracted an increasing attention due to their superior mechanical properties and potential application in industries. The strength of CNT has been predicted or calculated through several simulation techniques but actual experiments on stress-strain behavior are rare due to its dimensional limit, nanoscale positioning/manipulation, and instrumental resolution. We have attempted to observe straining responses of a multi-walled carbon nanotube (MWNT) by performing an in-situ tensile testing in a scanning electron microscope. The carbon nanotube, having its both ends attached on a cantilever force sensor and Y-shaped support, was elongated by a computer-controlled nanomanipulator. Linear deformation and fracture behaviors of MWNT were successfully observed and its force-displacement curve was also measured from the bending stiffness and displacement of the force sensor and manipulator.

• The Journal of Korea Robotics Society
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• v.2 no.1
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• pp.64-70
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• 2007

In this paper, a robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. By the experiment, we proved that the developed the system gives acceptable performance when minute operations. Developed the micro-nano robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this system, micro gripper is designed and fabricated with MEMS technology and the displacement of jaw is up to 142.8 micro meter. We think that new robot system will be appropriate for micro system assembly tasks and life science application.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.497-498
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.27 no.8
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• pp.84-90
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• 2010

In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. Slit mask is utilized to block the part of beam and transmit only high intensity portion. A nano manipulator is utilized to handle the silt mask. Geometrical analysis on fabricated profile through silt mask was conducted. By utilizing proposed method, improvement of machining resolution was achieved.