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Nano Visual Servoing Loop Using SEM Image  

Choi, Jin-Ho (충남대 공대 전자과)
Ahn, Sang-Jung (한국표준과학연구원)
Park, Byong-Chon (한국표준과학연구원)
Lyou, Joon (충남대 전자과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.57, no.10, 2008 , pp. 1876-1882 More about this Journal
Abstract
Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator, operator attaches a CNT at the apex of Atomic Force Microscope(AFM) tip, which requires a mastery of mechanics and long manufacture time. Nano manipulator is installed inside a Scanning Electron Microscope(SEM) chamber to observe the operation. This paper presents a control scheme for horizontal axes of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, and the position information so obtained is fed to control horizontal axes of nano manipulator. That is, a visual servoing loop is realized to control the axes more precisely in nano scale.
Keywords
AFM; Nano Manipulator; Edge Detection; Visual Servoing; CNT Tip;
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