• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1518-1521
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• 2005

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries This paper focus to apply the sputtering technology accumulated by experiments to 3d structure fabrication with high resolution. Therefore some verifications and discussions of the characteristics of FIB sputtering results according to focal length were described in this paper. And we suggested the definition of rectangular pattern profile and made the verifications of sputtering results based on definition of it.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.6
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• pp.71-75
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• 2006

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. The target of this paper is the analysis of FIB sputtering process according to tilt angle, dwell time and overlap for application of 3D micro and pattern fabrication and to find the effective beam scanning conditions using Taguchi method. Therefore we make the conclusions that tilt angle is dominant parameter for sputtering yield. Burr size is reduced as tilt angle is higher.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.229-233
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper was carried out some experiments of the micro plasma electrode fabrications using FIB. The sputtering of FIB has one major problem that is redeposited by sputtered material including $Ga^+$ ion source. Therefore we have verified the effect of the reposition by EDX. And the optimal condition is suggested to machine the micro plasma electrode.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1171-1174
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• 2005

Manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.11
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• pp.41-46
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• 2019

The purpose of this study is to examine and propose a high quality blade manufacturing method by applying ELID grinding technology to machining the tungsten carbide blade edge for MLCC sheet cutting. In this study, experiments are performed according to the abrasive type of grinding wheel, grinding method and grinding direction using the non-stop continuous dressing ELID grinding technology. By comparing and analyzing the chipping phenomena and surface roughness of both the blade grinding surface and the processed surface, a method for machining the tungsten carbide blade for cutting MLCC sheet is proposed. From the analysis of the surface roughness and chipping phenomena, it is confirmed that the use of diamond abrasive is advantageous for the blade machining. In addition, it succeeds in the machining of $6{\mu}m$ fine blade without any chipping, by using the grinding wheel #4000 with the diamond abrasive.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.9
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• pp.799-804
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• 2014

Hard turning is a machining process for hardened materials with high surface quality so that grinding process can be eliminated. Therefore, the hard turning is capable of reducing machining time and improving productivity. In this study, hardened AISI4140 (high-carbon chromium steel) that has excellent yield strength, toughness and wear resistance was finish turned using CBN tools. Wear characteristics of CBN tool was analyzed in dry and MQL mixed with nano-particle (Nano-MQL). The dominant fracture mechanism of CBN tool is diffusion and dissolution wear on the rake surface resulting in thinner cutting edge. Abrasive wear by hard inclusion in AISI4140 was dominant on the flank surface. Nano-MQL reduced tool wear comparing with the dry machining but chip evacuation should be considered. A cryogenically treated tool showed promising result in tool wear.

• Transactions of Materials Processing
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• v.28 no.5
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• pp.239-246
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• 2019

Various surface texturing techniques have been studied because of the effective applicability of micro or nano scale surface patterns. Particularly, the most promising types of patterns include the hierarchical patterns, which consists of micro/nano structures. Different processes such as MEMS, laser machining, micro cutting and micro grinding have been applied in the production of hierarchical patterns on various material surfaces. This study demonstrates the process of hot imprinting to induce the hierarchical patterns on the Al alloy surfaces. Wire electrical discharge machining (WEDM) process was used to imprint molds with micro scale sinusoidal pattern. In addition, the sinusoidal pattern with rough surface morphology was obtained as a result of the discharge craters. Consequently, the hierarchical patterns consisting of the sinusoidal pattern and the discharge craters were prepared on the imprinting mold surface. Hot imprinting process for the Al plates was conducted on the prepared mold, and the replication performance was analyzed. As a result, it was confirmed that the hierarchical patterns of the mold were effectively duplicated on the surface of Al plate.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.9
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• pp.14-19
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.19-20
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.757-760
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• 2005

The technology of rapid prototyping (RP) is used for design verification, function test and fabrication of prototype. The current issues in RP are improvement in accuracy and application of various materials. In this paper, a hybrid rapid prototyping system is introduced which can fabricate nano composites using various materials. This hybrid system adopts RP and machining process, so material deposition and removal is performed at the same time in a single station. As examples, micro gears and a composite scaffold were fabricated using photo cured polymer with nano powders such as carbon black and hydroxyapatite. From the micro gear samples the hybrid RP technology showed higher precision than those made by casting or deposition process.