Analysis on FIB-Sputtering Process using Taguchi Method
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Lee, Seok-Woo
(한국생산기술연구원)
Choi, Byoung-Yeol (한국생산기술연구원 e가공공정팀) Kang, Eun-Goo (한국생산기술연구원 e가공공정팀) Hong, Won-Pyo (한국생산기술연구원 e가공공정팀) Choi, Hon-Zong (한국생산기술연구원 e가공공정팀) |
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7 | Watanabe, K., Hoshino, T., Kodo, K., Kanda, K., Haruyama, Y., Kaito, T., Fujita, J., Ishida, M., Ochiai, Y., Tajima, T. and Matsui, S., 2004, 'Nanoimprint using three-dimensional microlens mold made by focused -ion-beam chemical vapor deposition,' J. Vac. Sci. Technol., B22(1), Jan/Feb, pp. 22-26 |
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