• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.12-12
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• 2008

Ruthenium is one of the noble metals having good thermal and chemical stability, low resistivity, and relatively high work function(4.71eV). Because of these good physical, chemical, and electrical properties, Ru thin films have been extensively studied for various applications in semiconductor devices such as gate electrode for FET, capacitor electrodes for dynamic random access memories(DRAMs) with high-k dielectrics such as $Ta_2O_5$ and (Ba,Sr)$TiO_3$, and capacitor electrode for ferroelectric random access memories(FRAMs) with Pb(Zr,Ti)$O_3$. Additionally, Ru thin films have been studied for copper(Cu) seed layers for Cu electrochemical plating(ECP) in metallization process because of its good adhesion to and immiscibility with Cu. We investigated Ru thin films by thermal ALD with various deposition parameters such as deposition temperature, oxygen flow rate, and source pulse time. Ru thin films were grown by ALD(Lucida D100, NCD Co.) using RuDi as precursor and $O_2$ gas as a reactant at 200~$350^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.10
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• pp.1090-1094
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• 2004

Studies on porous oxide electrode, dye and electrolyte for dye-sensitized solar cells have been intensively carried out until now. However, counter electrode have not been much studied so far. Accordingly, it is needed to investigate new counter electrode materials with superior catalyst property and to substitute for Pt electrode. In this case, carbon nano-tubes (CNTs) are one of alternatives for counter electrodes as following merits: low resistivity, excellent electron emission property, large surface area and low cost due to development of mass production technique. Such advantages gave us to select multiwalled CNTs (MWCNT) as counter electrode for dye-sensitized solar cell. Also, cyclic voltammetry and impedance spectroscopy were used to investigate electrochemical properties of both CNT electrode and Pt electrode. It was found that sheet resistance of CNT electrode was similar to that of Pt electrode, also, electrochemical properties of CNT electrode was superior to that of Pt electrode on the basis on the measurement of CV and impedance spectrum. It was found that CNT is likely to be a very promising electrode material for dye solar cells.

• Journal of the Korean Electrochemical Society
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• v.13 no.3
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• pp.157-162
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• 2010

The electrodes comprising nano-sized $LiFePO_4$, carbon black and binder are prepared with two different Al current collectors. One is the generally used normal Al foil and the other is the chemically etched Al foil. Surface characteristics of each Al foil and electrochemical performance of the cathodes using each foil are investigated. The electrode from the etched Al foil exhibits better physical and electrochemical properties as compared to those of the normal Al foil because the etched Al foil has rough surface with sub-micron pores which improve the adhesion between the electrode materials and the substrate. The electrode on the etched Al foil has such a strong peel strength that the impedance is smaller than that of normal one. Indeed the $LiFePO_4$ electrode from the etched Al foil exhibits a better rate capability and remains intact even after storage for 1 week at the charged state at the elevated temperature $60^{\circ}C$.

• Transactions on Electrical and Electronic Materials
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• v.16 no.5
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• pp.260-263
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• 2015

Epoxy/micro-sized alumina composite was prepared and the effects of alumina content on the electrical and mechanical properties were investigated in order to develop an insulation material for gas insulated switchgear (GIS). Nano-sized alumina (average particle size: 30 μm) was also incorporated into the epoxy/micro-sized alumina composite. An electrical insulation breakdown strength test was carried out in sphere-sphere electrodes and the data were estimated by Weibull statistical analysis. Tensile strength was measured at a crosshead speed of 10 mm/min using a universal testing machine. Alumina content was varied from 0 wt% to 70 wt%.). As micro-sized alumina content increased, insulation breakdown strength increased until 40 wt% alumina content and decreased after that content. The tensile strength of a neat epoxy system was 82.2 MPa and that value for 60 wt% alumina content was 91.8 MPa, which was 111.7% higher than inthe neat epoxy system. The insulation breakdown strength of micro-sized alumina (60 wt%)/nano-sized alumina (1 phr) glycerol diglycidyl ether (GDE) (1 phr) composite was 54.2 MPa, which was 116% higher than the strength of the system without nano-sized alumina.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.207-207
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• 2008

ZnO is one of the widely utilized n-type semiconducting oxide materials in the field of optoelectronic devices. For its application to the fabrication of promising ultraviolet (UV) photodetectors, ZnO with various structures has been extensively studied. However, study on the photodetectors using zero-dimensional (0-D) ZnO nanoparticle is scarce while the 0-D nanoparticle structure has many advantages compared to the other dimensional structures for absorption of light. In this study, the photocurrent characteristics of ZnO nanoparticles were investigated through a simply pasting of the nanoparticles across the pre-patterned electrodes. Then the photoluminescence (PL) characteristic, photocurrent response spectrum, photo- and dark-current and photoresponse spectrum were investigated with a He-Cd laser and an Xe lamp. An dominant PL peak of the ZnO nanoparticles was located at the wavelength of 380 nm under the illumination of 325-nm wavelength light. The ratio of photocurrent to dark current (on/off ratio) is as high as 106 which is considerable value for promising photodetectors. On the other hand, the time constants in photoresponse were relatively slow. The reasons of the high on/off ratio and relatively slow photoresponse characteristic will be discussed.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.505-512
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• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• Transactions on Electrical and Electronic Materials
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• v.6 no.3
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• pp.87-90
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• 2005

$SiO_2$ via-hole etching with a high aspect ratio is a key process in fabricating ULSI devices; however, accumulated charge during plasma etching can cause etching stop, micro-loading effects, and charge build-up damage. To alleviate this concern, charge-up damage sensor was fabricated for the ultimate goal of real-time monitoring of accumulated charge. As an effort to reach the ultimate goal, fabricated sensor was used for electrical potential measurements of via holes between two poly-Si electrodes and roughly characterized under various plasma conditions using statistical design of experiment (DOE). The successful identification of potential difference under various plasma conditions not only supports the evidence of potential charge-up damage, but also leads the direction of future study.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.2
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• pp.116-123
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• 2009

Carbon black, activated carbon and carbon nanotube have been used as supporting materials for precious metal catalysts used in fuel cell electrodes. One-step flame synthesis method is used to coat 2-5nm Pt dots on flame-generated carbon particles. By adjusting flame temperature, gas flow rates and resident time of particles in flame, we can obtain Pt/C nano catalyst-support composite particles. Additional injection of hydrogen gas facilitates pyrolysis of Pt precursor in flame. The size of as-incepted Pt dots increases along the flame due to longer resident time and sintering in high temperature flame. Surface coverage and dispersion of the Pt dots is varied at different sampling heights and confirmed by Transmission electron microscopy (TEM), Energy-dispersive spectra (EDS) and X-ray diffraction (XRD). Crystalinity and surface bonding groups of carbon are investigated through X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy.

• Transactions of the Korean hydrogen and new energy society
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• v.32 no.6
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• pp.612-617
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• 2021

In the case of a metal sulfide electrode, it is used as an anode or cathode active material in a lithium battery. The reason is that the voltage exists between 0.8 and 2.0 V via lithium electrode and the discharge and charge capacity is high. In order to manufacture nickel sulfide for electrode, which are widely used, nano-nickel powder was sulfided using ammonium polysulfide, and single-phase NiS electrodes were manufactured through heat treatment. The prepared NiS electrode had a high initial capacity of 500 mAh/g or more, and was stabilized after 20 cycles to maintain a capacity of 400 mAh/g or more until 100 cycles.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.7
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• pp.601-605
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• 2014

Porous conductors are known to demonstrate excellent electrical, mechanical, and chemical resistance. These porous conductors demonstrated potential applications in various fields such as electrodes for supercapacitors, flexible heaters, catalytic electrodes, and sorbents. In this study, we described a pressure sensitive device using conductive and porous sponges. With an extremely simple "dipping and drying" process using a single-walled carbon nanotube (SWCNT) solution, we produced conductive sponges with sheet resistance of < $30k{\Omega}/sq$. These carbon nanotube sponges can be deformed into any shape elastically and repeatedly compressed to large strains without collapse. The pressure sensors developed from these sponges demonstrated high resistance change under pressure of up to a half of their initial resistance.