• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.333-334
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• 2007

This paper describes the characteristics of poly (polycrystalline) 3C-SiC grown on SiOz and AlN substrates, respectively. The crystalline quality of poly 3C-SiC was improved from resulting in decrease of FWHM (full width half maximum) of XRD by increasing the growth temperature. The minimum growth temperature of poly 3C-SiC was $1100^{\circ}C$. The surface chemical composition and the electron mobility of poly 3C-SiC grown on each substrate were investigated by XPS and Hall Effect, respectively. The chemical compositions of surface of poly 3C-SiC films grown on $SiO_2$ and AlN were not different. However, their electron mobilities were $7.65\;cm^2/V.s$ and $14.8\;cm^2/V.s$, respectively. Therefore, since the electron mobility of poly 3C-SiC films grown on AlN buffer layer was two times higher than that of 3C-SiC/$SiO_2$, a AlN film is a suitable material, as buffer layer, for the growth of poly 3C-SiC thin films with excellent properties for M/NEMS applications.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.7-14
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.22-29
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• 2008

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.1
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• pp.41-46
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• 2012

As the development of MEMS/NEMS structure and application technology the demand for an assessment of the mechanical properties have increased. The mechanical properties are mainly evaluated by using tensile test or ultrasonic wave measurement. However, the new technology have been developed such as nano-indentation, guided wave method because they have a limitation in case of a thin plate and thin film. In the study, the guided wave velocities are measured by electromagnetic-acoustic transducer(EMAT), the material properties of thin metallic foils are obtained using optimization process of the theoretical and experimental group velocity of guided wave. The Young's modulus obtained by the optimization process(201.6 GPa), nano-indentation(207.0 GPa) and literature value(203.7 GPa) of a $50{\mu}m$ thick nickel thin plate shows good agreement within 3%.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.134-139
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• 2007

We report the suspension of individual multi-walled carbon nanotubes (MWNTs) from the bottom substrate using deep trench electrodes that were fabricated using optical lithography. During drying of the solution in dielectrophoretic assembly, the capillary force pulls the MWNT toward the bottom substrate, and it then remains as a deformed structure adhering to the bottom substrate after the solution has dried out. Small-diameter MWNTs cannot be suspended using thin electrodes with large gaps, but large-diameter MWNTs can be suspended using thicker electrodes. We present the statistical experimental results for successful suspension, as well as the feasible conditions for a MWNT suspension based on a theoretical approach.

• Tribology and Lubricants
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• v.22 no.6
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• pp.320-328
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• 2006

In this study, the simulation of rolling contact fatigue based on stress analysis is conducted under Elastohydrodynamic Lubrication state. To predict a crack initiation life accurately, it is necessary to calculate contact stress and subsurface stresses accurately. Contact stresses are obtained by contact analysis of a semi-infinile solid based on the use of influence functions and the subsurface stress field is obtained using rectangular patch solutions. And a numerical algorithm using Newton-Rapson method was constructed to calculate the Elastohydrodynamic lubrication pressure. Based on these stress values, several multiaxial high-cycle fatigue criteria are used and the critical loads corresponding to fatigue limits are calculated.

• Electronics and Telecommunications Trends
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• v.26 no.3
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• pp.95-104
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• 2011

셀칩(cells on chips)이란, MEMs/NEMs 응용분야 중 생명공학과 관련된 세포분야로의 응용에 이용되는 대표적인 기술로서 현재 전세계에서 경쟁적으로 연구, 개발되고 있다. 셀칩은 생체내부에서 세포가 성장하는 공간적(spatial), 시간적(temporal) 조건을 정교하게 모사(mimicking)함으로써, 복잡한 생화학적 생체 내(in vivo) 환경을 이해할 수 있는 새로운 기회를 창조하고 있다. 또한 셀칩과 다양한 형태의 분석용 센서와의 결합된 시스템을 통하여, 세포기반 질병진단 시스템의 소형화 및 조기진단 시스템 개발을 위한 바이오멤스 핵심 플랫폼 기술로 인식되고 있다. 즉 DNA, 단백질, 세포 등의 바이오 물질을 마이크로/나노시스템 위에서 검출 및 분석함으로써 극미량의 생체물질을 실시간 고감도 분석이 가능하게 할 것이다. 본 고에서는 셀칩분야의 기술 및 응용에 관해 정리하고 있다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.237-237
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• 2009

Zinc oxide (ZnO) thin film was deposited on Si substrates using polycrystalline (poly) 3C-SiC buffer layer, in which the ZnO film was grown by sol-gel method. Physical characteristics of the grown ZnO film was investigated experimentally by means of SEM, XRD, FT-IR (Furier Transform-Infrared spectrum), and AFM. XRD pattern was proved that the grown ZnO film on 3C-SiC layers had highly (002) orientation with low FWHM (Full width of half maxium). These results showed that ZnO thin film grown on 3C-SiC buffer layers can be used for various piezoelectric fields and M/NEMS applications.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.11
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• pp.2436-2441
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• 2002

Finite element technique considering adhesive forces is proposed and applied to analyze the behavior of elastic hemispherical asperity adhesively contacting the plane surface of semi -infinite rigid body. It is demonstrated that the finite element model simulates interfacial phenomena such as jump -to-contact and adhesion hysteresis that cannot be simulated with the currently available adhesive contact continuum models. This simulation aiso provides valuable information on contact pressure, contact region and stress distributions. This technique is anticipated to be utilized in designing a low-adhesion surface profile for MEMS/NEMS applications since various contact geometries can be analyzed with this technique.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.8
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• pp.152-156
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• 2004

A new tool of surface patterning technique for general purpose lithography was developed based on shadow mask method. This paper describes the fabrication of a new type of miniaturized shadow mask. The shadow mask is fabricated by photolithography and etching of 100-mm full wafer. The fabricated shadow mask has over 388 membranes with apertures of micrometer length scale ranging from 1${\mu}{\textrm}{m}$ to 100s ${\mu}{\textrm}{m}$ made on each 2mm${\times}$2mm large low stress silicon nitride membrane. It allows micro scale patterns to be directly deposited on substrate surface through apertures of the membrane. This shadow mask method has much wider choice of deposit materials, and can be applied to wider class of surfaces including chemical functional layer, MEMS/NEMS surfaces, and biosensors.