• Journal of Institute of Control, Robotics and Systems
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• v.6 no.6
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• pp.500-505
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• 2000

This paper deals with wafer temperature uniformity control essential in rapid thermal processing (RTP). One of the important control objectives of RTP is to keep the temperature over the wafer surface as uniformly as possible. For this, a discrete time state equation around the operating point is first identified by using the subspace fitting method, and a multivariable LQG(Linear Quadratic Gaussian) controller is designed based on the identified model. Simulation and experimental results show improvement in temperature uniformity over the conventional PID method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.720-723
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• 1995

As a part of the configuration design expert system of machine tools, inference mechanisms are constructed in this paper. In addition to procedural inference, the method of multivariable inference is considered as an efficient approach to deal with the cases of highly coupled condition. We propose a generalized multivariable inference procedure. The procedure is applied to the type selection module of the configuration design expert system of machine tools in order to demonstrate the efficiency and validity.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.115.5-115
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• 2001

This paper suggests that the immune algorithm can effectively be used in tuning of a multivariable system. Then artificial immune network always has a new paraller decentralized processing mechanism for various situations, since antibodies communication to each other among different species of antibodies/B-cells through the simulation and suppression chains among antibodies that form a large-scaled network. In addition to that, the structure of the network is not fixed, but varies continuously. That is, the artificial immune network flexibly self-organizes according to dynamic changes of external environment (meta-dynamics function). However, up to the present time, models based on the conventional crisp approach ...

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1992.04a
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• pp.133-142
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• 1992

A kineamatic nonlinear multivariable laundher is modeled of which the azimoth and elevation axes are drived simultaneously and SISO and MIMO LQG/LTR controllers are designed and evaluated for this system. Also, the suitable command input function is suggested for the desired command following performance and the LQG/LTR control system with disturbances and load variation is evaluated for the entire operating range by computer simulation. It is found that the linear SISO LQG/LTR controller can be used for the kinematic nonlinear multivariable launder in the entire operating range and is effective for disturbance rejection and load variation.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.47.2-47
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• 2001

This paper is concerned with the limiting zeros, as the sampling period tends to zero, of a multivariable discrete-time system composed of an approximate fractional-order hold (AFROH), a continuous-time plant and a sampler in cascade. An approximate fractional-order hold is proposed to implement fractional-order hold (FROH) and is applied to instead of the zero-order hold (ZOH). The implementing problem of the fractional-order hold is overcome. The properties of the limiting zeros are studied and the location problem of them is solved. In addition, a stability condition of the zeros for sufficiently small sampling period is derived ...

• Proceedings of the KIEE Conference
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• 1997.07b
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• pp.606-608
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• 1997

In this paper, Neuro-Fuzzy Controller(NFC), a fuzzy system realized using a neural network, is to adopt for the multivariable system. In the multivariable system, the interactive effects between the variables should be taken into account. A simple compensator, using the steady-state information can be obtained for open-loop stable systems, is presented to cope with this problem. However, it should be supposed that the plant is unknown to the control system designer, but an estimate of the DC gain has been obtained by carrying out experiments on the plant. Also, if the variables are not combinated completely, it is difficult to design the controller. Therefore, we design a neuro-fuzzy controller which controls a multivariable system with only input output informations, and compare its performance with that of a PI controller. In the proposed controller, the construction of the membership functions and rule base, which is highly heuristic, can be achieved using a training process. This allows the combination of knowledge of human experts and evidence from input-output data.

• Journal of the Korean Institute of Telematics and Electronics S
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• v.36S no.11
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• pp.22-33
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• 1999

This paper presents the method for the automatic tuning of a design weighting polynomial parameters of a generalized minimum-variance stochastic ultivariable self-tuning controller which adapts to changes in the higher order nonminimum phase system parameters with time delays and noises. The self-tuning effect is achieved through the recursive least square algorithm at the parameter estimation stage and also through the Robbins-Monro algorithm at the stage of optimizing the design weighting polynomial parameters of the controller. The proposed multivariable self-tuning method is simple and effective compared with pole restriction method. The computer simulation results are presented to adapt the higher order multivariable system with nonminimum phase and with changeable system parameters.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.5
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• pp.950-960
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• 2010

In this paper, a multi-input multi-output(MIMO) integral variable structure system with an integral-augmented sliding surface is designed for the improved robust control of uncertain multivariable system under the matched persistent disturbance. To effectively remove the reaching phase problems, the integral augmented sliding surface is proposed. Then for its design, the eigenstructure assignment technique is introduced to. To guarantee the designed performance against the persistent disturbance, the stabilizing control for multi-input system is also designed to generate the sliding mode on the integral sliding surface. The stability of the global system together with the existence condition of the sliding mode are investigated and proved for the case of multi input system in the presence of uncertainty and disturbance. The reaching phase is completely removed in proposed MIMO VSS by satisfying the two requirements. An example and computer simulations will be present for showing the usefulness of algorithm.

• Journal of the Korean Institute of Telematics and Electronics S
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• v.34S no.7
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• pp.66-77
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• 1997

This paper presents an automatic tuning method for parameters of a multivaiable self-tuning velocity-type PID controller which adapts to changes in the system parameters with time delays and noises. The velocity-type PID control structure is determined in the process of minimizing the variance of the auxiliarly output, and self-tuning effect is achieved through the recursive least square algorithm at the parameter estimation stage and also through the Robbins-Monro algorithm at the stage of optiminzing the design parameters of the controller. The proposed PID type multivariable self-tuning method is simple andeffective compared with other esisting multivariable self-tuning methods. Computer simulation has shown that the proposed algorithm is beter than the trial-and-error method in the tracking performance.

• Proceedings of the KIEE Conference
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• 1990.11a
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• pp.402-406
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• 1990

A new approach of a time-varying switching hyperplane based on the theory of variable structure system (VSS) is proposed for the control of multivariable systems. While the conventional switching surface can net achieve the robust performance against parameter variations and disturbances before the sliding mode occurs, the proposed switching hyperplane, which is obtained from the eigen-structure assignment theory powerfully used in the linear multivariable systems, ensures the sliding mode from the initial state. And new continuous control input which guarantees the sliding mode is proposed. This new control input does not arise chattering problem which arises with the conventional control input of variable structure control systems. Through numerical examples, the expellant performances of the proposed controller are verified.